M-511 • M-521 • M-531 High-Precision Linear Stage

High Travel Accuracy, Long Travel Ranges, Many Motor Variants

  • Travel ranges: 102, 204 und 306 mm (4", 8", 12")
  • Max. velocity to 100 mm/s
  • Encoder resolution 50 nm
  • Load capacity to 100 kg
  • Zero-play ball screw
  • XY and XYZ combinations
M-511 • M-521 • M-531 High-Precision Linear Stage
Product Description Specifications Downloads Quote / Order

Reference-class linear stage

High travel accuracy and load capacity due to precision linear guides with preloaded recirculating ball bearings. Backlash-compensated ball screw with 2 mm pitch. Stress-relieved aluminum base for high stability.

XY and XYZ combinations with M-501 precision Z stages possible.

Drive types and position measurement

  • M-5x1.DDx: DC motor with integrated ActiveDrive amplifiers for high velocity combined with direct-measuring linear encoder for high resolution and repeatability. M-5x1.DD2 also with integrated holding brake.
  • M-5x1.DG1: DC gear motor with direct control and rotary encoder.
  • M-5x1.PG1: DC gear motor with integrated ActiveDrive amplifier and rotary encoder.
  • M-5x1.PD1: DC motor with integrated amplifier and rotary encoder.
  • M-5x1.EC: Brushless DC motor with integrated block commutation and rotary encoder.

Noncontact limit switches. Noncontact reference switch in the middle of the travel range.

Application fields

Industry and research. Laser materials processing, surface inspection.

Specifications

Datasheet

Datasheet M-511 • M-521 • M-531

Version / Date
2022-06-20
pdf - 1 MB
Version / Date
2022-06-20
pdf - 1 MB
Version / Date
2018-01-15
pdf - 739 KB

Downloads

Product Note

Product Note

Product Change Notification M-Portfolio-Streamlining Part-3

M-313.80, M-331.1MS, M-332.5MS, M-333.1MS, M-333.2MS, M-403.1VG, M-403.1VP, M-403.2VG, M-403.2VP, M-403.4VG, M-403.4VP, M-403.6VG, M-403.6VP, M-403.8VG, M-403.8VP, M-413.1VG, M-413.1VP, M-413.2VG, M-413.2VP, M-413.3VG, M-413.3VP, M-414.1VG, M-414.1VP, M-414.2VG, M-414.2VP, M-414.3VG, M-414.3VP, M-414.500, M-451.01, M-451.12S, M-451.1DG, M-451.1PD, M-500.18V, M-500.90, M-505.4DG, M-511.2S1, M-521.2S1, M-531.2S1, M-605.11, M-619.00, M-620.00, M-621.00, M-622.00, M-623.00, M-624.10, M-642.00, M-653.00, M-655.00

Version / Date
2019-08-13
pdf - 381 KB
English

Datasheet

Datasheet

Datasheet M-511 • M-521 • M-531

Version / Date
2022-06-20
pdf - 1 MB
Version / Date
2022-06-20
pdf - 1 MB
Version / Date
2018-01-15
pdf - 739 KB

Documentation

Documentation

Short Instructions MP119EK

Positioners with Electric Motors: M-06x, M-11x, M-12x, M-4xx, M-5xx

Version / Date
3.2.0 01/2021
pdf - 1 MB
Version / Date
3.2.0 01/2021
pdf - 1 MB
Documentation

User Manual MP113

M-511, M-521, M-531 Micropositioning Stages

Version / Date
1.2 2021-10-04
pdf - 2 MB
Version / Date
1.2 2021-10-04
pdf - 2 MB
Documentation

PI Mounting Adapters for Micropositioning

Overview of all possible combinations of PI linear, rotary and tilt stages

Version / Date
---
pdf - 760 KB
Version / Date
---
pdf - 763 KB

3-D Models

3-D Models

M-511 3-D model

zip - 4 MB
3-D Models

M-521 3-D model

zip - 3 MB
3-D Models

M-531 3-D model

zip - 4 MB
Separate connection cable required for motor and sensor connection respectively.

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

M-511.DD1

High-precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422

M-511.DD2

High-precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; electromagnetic safety brake

M-511.DG1

High-precision linear stage; DC gear motor; 102 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422

M-511.EC

High-precision linear stage; brushless DC motor; 102 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

M-511.PD1

High-precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

M-511.PG1

High-precision linear stage; DC gear motor with ActiveDrive; 102 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422

M-521.DD1

High-precision linear stage; DC motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422

M-521.DD2

High-precision linear stage; DC motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; electromagnetic safety brake

M-521.DG1

High-precision linear stage; DC gear motor; 204 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422

M-521.EC

High-precision linear stage; brushless DC motor; 204 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

M-521.PD1

High-precision linear stage; DC motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

M-521.PG1

High-precision linear stage; DC gear motor with ActiveDrive; 204 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422

M-531.DD1

High-precision linear stage; DC motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422

M-531.DD2

High-precision linear stage; DC motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; electromagnetic safety brake

M-531.DG1

High-precision linear stage; DC gear motor; 306 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422

M-531.EC

High-precision linear stage; brushless DC motor; 306 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

M-531.PD1

High-precision linear stage; DC motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 100 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

M-531.PG1

High-precision linear stage; DC gear motor with ActiveDrive; 306 mm travel range; 1000 N load capacity; 6 mm/s maximum velocity; ball screw; incremental rotary encoder, 2048 counts/rev sensor resolution, A/B quadrature, RS-422

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