V-551 Precision Linear Stage

Reference-class linear positioner

Thanks to the smooth-running precision linear guides with crossed roller bearings, the linear positioner is particularly suitable for scanning applications with constant velocity. The anti-creep system reliably prevents cage creep. The guides have high load capacity and high precision under all operating conditions.

Linear motors

Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Direct position measuring

Position measuring is performed with the highest accuracy directly at the motion platform so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured values, allows a position resolution of much less than one nanometer. The optical and noncontact PIOne encoders are based on an interferometric measuring principle. Due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Application fields

Industry and research. Automation. Metrology. Photonics and precision scanning in semiconductor or flat panel display manufacturing