Variable Travel Ranges and Axis Configuration

Travel ranges 50 to 1800 µm
Resolution to 0.1 nm
Linearity error 0.02 %
X, XY, Z versions; XYZ combination possible

Rapid scanning motion of a P-621.1CD (specified rise time: 5 ms) with a digital controller with 16-bit sensor resolution and DDL option. The digital dynamic linearization reduces the tracking error during scanning to <20 nm. The improvement over a standard PID controller is up to 3 orders of magnitude and increases with the frequency.

P-62x.1CD/.1CL/.10L, dimensions in mm.

Application fields

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test applications
Semiconductor technology
Photonics
Fiber positioning

Outstanding lifetime due to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

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Datasheet

Versione / Data

2023-12-12

pdf - 1 MB

Versione / Data

2023-12-12

pdf - 1 MB

Versione / Data

2018-06-06

pdf - 891 KB

Versione / Data

2018-06-08

pdf - 969 KB

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Select a travel range:

Motion	P-620.10L	P-620.1CD	P-620.1CL	P-621.10L	P-621.1CD	P-621.1CL	P-622.10L	P-622.1CD	P-622.1CL	P-625.10L	P-625.1CD	P-625.1CL	P-628.10L	P-628.1CD	P-628.1CL	P-629.10L	P-629.1CD	P-629.1CL	Tolerance
Active axes	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X
Travel range in X, open loop	60 µm	60 µm	60 µm	120 µm	120 µm	120 µm	300 µm	300 µm	300 µm	600 µm	600 µm	600 µm	950 µm	950 µm	950 µm	1800 µm	1800 µm	1800 µm	±20 %
Pitch (Rotational crosstalk in θY with motion in X)	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 30 µrad	± 30 µrad	± 30 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 3 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 6 µrad	± 10 µrad	± 10 µrad	± 10 µrad	typ.
Travel range in X		50 µm	50 µm		100 µm	100 µm		250 µm	250 µm		500 µm	500 µm		800 µm	800 µm		1500 µm	1500 µm
Linearity error in X		0.02 %	0.02 %		0.02 %	0.02 %		0.02 %	0.02 %		0.03 %	0.03 %		0.03 %	0.03 %		0.03 %	0.03 %	typ.
Positioning	P-620.10L	P-620.1CD	P-620.1CL	P-621.10L	P-621.1CD	P-621.1CL	P-622.10L	P-622.1CD	P-622.1CL	P-625.10L	P-625.1CD	P-625.1CL	P-628.10L	P-628.1CD	P-628.1CL	P-629.10L	P-629.1CD	P-629.1CL	Tolerance
Resolution in X, open loop	0.1 nm	0.1 nm	0.1 nm	0.2 nm	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	0.5 nm	2 nm	2 nm	2 nm	typ.
Bidirectional repeatability in X		1 nm	1 nm		1 nm	1 nm		1 nm	1 nm		5 nm	5 nm		10 nm	10 nm		14 nm	14 nm	typ.
Integrated sensor		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in X		0.2 nm	0.2 nm		0.4 nm	0.4 nm		0.7 nm	0.7 nm		1.4 nm	1.4 nm		1.8 nm	1.8 nm		3 nm	3 nm
Drive Properties	P-620.10L	P-620.1CD	P-620.1CL	P-621.10L	P-621.1CD	P-621.1CL	P-622.10L	P-622.1CD	P-622.1CL	P-625.10L	P-625.1CD	P-625.1CL	P-628.10L	P-628.1CD	P-628.1CL	P-629.10L	P-629.1CD	P-629.1CL	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Maximum power consumption	3 W	3 W	3 W	9 W	9 W	9 W	9 W	9 W	9 W	10 W	10 W	10 W	18 W	18 W	18 W	49 W	49 W	49 W
Electrical capacitance in X	0.35 µF	0.35 µF	0.35 µF	1.5 µF	1.5 µF	1.5 µF	3.1 µF	3.1 µF	3.1 µF	6.2 µF	6.2 µF	6.2 µF	19 µF	19 µF	19 µF	52 µF	52 µF	52 µF	±20 %
Short-term maximum operating frequency	367 Hz	367 Hz	367 Hz	267 Hz	267 Hz	267 Hz	133 Hz	133 Hz	133 Hz	72 Hz	72 Hz	72 Hz	42 Hz	42 Hz	42 Hz	42 Hz	42 Hz	42 Hz
Mechanical Properties	P-620.10L	P-620.1CD	P-620.1CL	P-621.10L	P-621.1CD	P-621.1CL	P-622.10L	P-622.1CD	P-622.1CL	P-625.10L	P-625.1CD	P-625.1CL	P-628.10L	P-628.1CD	P-628.1CL	P-629.10L	P-629.1CD	P-629.1CL	Tolerance
Stiffness in X	0.42 N/µm	0.42 N/µm	0.42 N/µm	0.35 N/µm	0.35 N/µm	0.35 N/µm	0.2 N/µm	0.2 N/µm	0.2 N/µm	0.1 N/µm	0.1 N/µm	0.1 N/µm	0.12 N/µm	0.12 N/µm	0.12 N/µm	0.13 N/µm	0.13 N/µm	0.13 N/µm	±20 %
Resonant frequency in X, unloaded	1100 Hz	1100 Hz	1100 Hz	800 Hz	800 Hz	800 Hz	400 Hz	400 Hz	400 Hz	215 Hz	215 Hz	215 Hz	125 Hz	125 Hz	125 Hz	125 Hz	125 Hz	125 Hz	±20 %
Resonant frequency in X, under load with 20 g	550 Hz	550 Hz	550 Hz	520 Hz	520 Hz	520 Hz	340 Hz	340 Hz	340 Hz	180 Hz	180 Hz	180 Hz	115 Hz	115 Hz	115 Hz	120 Hz	120 Hz	120 Hz	±20 %
Resonant frequency in X, under load with 120 g	260 Hz	260 Hz	260 Hz	240 Hz	240 Hz	240 Hz	185 Hz	185 Hz	185 Hz	110 Hz	110 Hz	110 Hz	90 Hz	90 Hz	90 Hz	110 Hz	110 Hz	110 Hz	±20 %
Permissible push force in X	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Permissible push force in Y	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	8 N	8 N	8 N	max.
Permissible push force in Z	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Permissible pull force in X	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	110 g	110 g	110 g	160 g	160 g	160 g	200 g	200 g	200 g	240 g	240 g	240 g	380 g	380 g	380 g	720 g	720 g	720 g
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Miscellaneous	P-620.10L	P-620.1CD	P-620.1CL	P-621.10L	P-621.1CD	P-621.1CL	P-622.10L	P-622.1CD	P-622.1CL	P-625.10L	P-625.1CD	P-625.1CL	P-628.10L	P-628.1CD	P-628.1CL	P-629.10L	P-629.1CD	P-629.1CL	Tolerance
Operating temperature range	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C
Connector	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT	LEMO LVPZT	D-sub 7W2 (m)	LEMO LVPZT
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m
Recommended controllers / drivers	E-503, E-505, E-610, E-665	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-665	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-665	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-665	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-665	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-665	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754
Sensor connector			LEMO for capacitive sensors			LEMO for capacitive sensors			LEMO for capacitive sensors			LEMO for capacitive sensors			LEMO for capacitive sensors			LEMO for capacitive sensors

P-628.1CD / P-628.1CL: Linearity error in X (typ.) 0.03 % with digital controller. With analog controllers 0.05 %.

P-629.1CD / P-629.1CL: Linearity error in X (typ.) 0.03 % with digital controller. With analog controllers 0.08 %.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

Vacuum versions to 10^-9 hPa are available under the P-62x.1U order numbers.

All specifications based on room temperature (22 °C ±3 °C).

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Product Note

Versione / Data

2021-04-19

pdf - 377 KB

inglese

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Datasheet

Versione / Data

2023-12-12

pdf - 1 MB

Versione / Data

2023-12-12

pdf - 1 MB

Versione / Data

2018-06-06

pdf - 891 KB

Versione / Data

2018-06-08

pdf - 969 KB

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Documentation

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Versione / Data

6.2.0 03/2024

pdf - 561 KB

Versione / Data

6.2.0 03/2024

pdf - 595 KB

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Documentation

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

Versione / Data

1.3.0 2021-11-03

pdf - 3 MB

Versione / Data

1.3.0 2021-11-03

pdf - 3 MB

3D Models

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zip - 954 KB

Success Story

Accurate Profile Reproduction of the Finest Structures Thanks to Piezo Technology and Confocal Technology. Author: Gernot Hamann

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pi1135E

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pi1135D

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P-620.10L

PIHera precision linear nanopositioner, 60 µm, without sensor, LEMO connector

Specifications

Datasheet P-620.1 – P-629.1

Specifications

Downloads

Product Note

Product Change Notification Piezo Actuator Driven Products

Datasheet

Datasheet P-620.1 – P-629.1

Documentation

Short Instructions PZ240

User Manual PZ234

3D Models

P-62x.1 STEP

Success Story

Optical 3D Surface Measuring Technology

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