P-752 High-Precision Nanopositioning Stage

Highly Dynamic and Stable Piezo Scanner with Extremely Accurate Guiding

Resolution 0.1 nm
Fast response behavior
Travel range up to 35 µm
Highest linearity due to capacitive sensors
Friction-free flexure guides for very high travel accuracy
Outstanding lifetime thanks to PICMA® piezo actuators

Response behavior of a P-752.11C to square wave control with an amplitude of 3 nm. Sub-nm resolution, stability, and bidirectional repeatability are clearly visible. Controller: E-501.00, E-503.00, E-509.C1; servo control settings: 240 Hz bandwidth.

P-752.1xx, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

P-752.2xx, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Application fields

Scanning microscopy
Measuring technology
Test procedures and quality assurance
Photonics
Fiber positioning

Outstanding lifetime due to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the mechanics' D-sub connector. The auto calibration function on the digital controller automatically uses this data every time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

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Datasheet

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2023-12-11

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2023-12-11

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2018-06-08

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2018-06-08

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Select a travel range:

Motion	P-752.11C	P-752.1CD	P-752.21C	P-752.2CD	Tolerance
Active axes	X	X	X	X
Travel range in X	15 µm	15 µm	30 µm	30 µm
Travel range in X, open loop, at -20 to 120 V	20 µm	20 µm	35 µm	35 µm	+20 / -0 %
Linearity error in X	0.03 %	0.03 %	0.03 %	0.03 %	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 1 µrad	± 1 µrad	± 1 µrad	± 1 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 1 µrad	± 1 µrad	± 1 µrad	± 1 µrad	typ.
Positioning	P-752.11C	P-752.1CD	P-752.21C	P-752.2CD	Tolerance
Unidirectional repeatability in X	± 1 nm	± 1 nm	± 2 nm	± 2 nm	typ.
Resolution in X, open loop	0.1 nm	0.1 nm	0.2 nm	0.2 nm	typ.
Integrated sensor	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in X	0.1 nm	0.1 nm	0.2 nm	0.2 nm
Drive Properties	P-752.11C	P-752.1CD	P-752.21C	P-752.2CD	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	2.1 µF	2.1 µF	3.7 µF	3.7 µF	±20 %
Mechanical Properties	P-752.11C	P-752.1CD	P-752.21C	P-752.2CD	Tolerance
Stiffness in X	30 N/µm	30 N/µm	20 N/µm	20 N/µm	±20 %
Resonant frequency in X, unloaded	3200 Hz	3200 Hz	2100 Hz	2100 Hz	±20 %
Resonant frequency in X, under load with 300 g	980 Hz	980 Hz	600 Hz	600 Hz	±20 %
Permissible push force in X	100 N	100 N	100 N	100 N	max.
Permissible push force in Z	30 N	30 N	30 N	30 N	max.
Permissible pull force in X	10 N	10 N	10 N	10 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	250 g	250 g	350 g	350 g	±5 %
Material	Steel	Steel	Steel	Steel
Miscellaneous	P-752.11C	P-752.1CD	P-752.21C	P-752.2CD	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	LEMO FFS.00.250.CTCE24	D-sub 7W2 (m)	LEMO FFS.00.250.CTCE24	D-sub 7W2 (m)
Sensor connector	LEMO FFA.00.250.CTLC31		LEMO FFA.00.250.CTLC31
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	+50 / -0 mm
Recommended controllers / drivers	E-505, E-610, E-625, E-754	E-505, E-610, E-625, E-754	E-505, E-610, E-625, E-754	E-505, E-610, E-625, E-754

Repeatability: Typical, full travel.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

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2021-04-19

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Datasheet

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2023-12-11

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