E-509 Signal Conditioner / Piezo Servo Module

The E-509 is a position control module with sensor evaluation electronics for nanopositioning systems with integrated position sensors. It automatically eliminates drift or hysteresis occurring during voltage-controlled piezo operation and compensates for changes in the piezo actuator's position in the event of a load change by instantly adjusting the piezo voltage.

Technology

Proportional-integral position control of the E-509 servo controller modules is specially optimized for piezo operation. The proportional and integral term as well as the control bandwidth can be adjusted individually. The integrated notch filters (can be set for each axis) improve the stability and allow wider-bandwidth operation closer to the mechanical resonant frequency of the piezo system. Positioning accuracy and repeatability in the nanometer range are therefore possible depending on the piezo product and the sensor type connected.

The E-509.E03 model for signal evaluation and E-509.E3 model as servo controller module are available for high-resolution capacitive single-plate sensors in the PISeca series.