P-733.3CD
XYZ piezo nanopositioner; 100 µm × 100 µm × 10 µm travel range (X × Y × Z); capacitive, indirect position measuring; D-sub 25W3 (m); 1.5 m cable length
P-733.3 XYZ Piezo Nanopositioner
High-Precision XYZ Scanner with Aperture
- Travel ranges to 100 µm × 100 µm in X, Y and to 10 µm in Z
- Resolution to 0.1 nm due to capacitive sensors
- High velocity versions with direct drive
- Ultrahigh vacuum-compatible and nonmagnetic versions on request
- Parallel kinematics for higher accuracy and dynamics
- Parallel metrology for active compensation of guiding errors
- Zero-play, high-precision flexure guide system
- Clear aperture 50 mm × 50 mm for transmitted-light applications
P-733.3CD / .3CL, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
P-733.3DD, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
P-733.3 XYZ Piezo Nanopositioner
Descrizione del Prodotto
Specifiche
Download
Quotazione / Ordine
Application fields
- Scanning microscopy
- Confocal microscopy
- Mask/wafer positioning
- Surface measuring technology
- Nanoimprinting
- Micromanipulation
- Image processing / stabilization
- Nanopositioning with high flatness and straightness of motion
Outstanding lifetime thanks to PICMA® piezo actuators
The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High tracking accuracy in the nanometer range due to parallel position measuring
All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.
Specifications
Specifications
Select a travel range:
| Motion | P-733.3CD | P-733.3CL | P-733.3DD | Tolerance |
|---|---|---|---|---|
| Active axes | X Y Z | X Y Z | X Y Z | |
| Travel range in X | 100 µm | 100 µm | 30 µm | |
| Travel range in Y | 100 µm | 100 µm | 30 µm | |
| Travel range in Z | 10 µm | 10 µm | 10 µm | |
| Travel range in X, open loop, at -20 to 120 V | 115 µm | 115 µm | 33 µm | +20 / -0 % |
| Travel range in Y, open loop, at -20 to +120 V | 115 µm | 115 µm | 33 µm | +20 / -0 % |
| Travel range in Z, open loop, at -20 to 120 V | 12 µm | 12 µm | 14 µm | +20 / -0 % |
| Linearity error in X | 0.03 % | 0.03 % | 0.03 % | typ. |
| Linearity error in Y | 0.03 % | 0.03 % | 0.03 % | typ. |
| Linearity error in Z | 0.03 % | 0.03 % | 0.03 % | typ. |
| Pitch (Rotational crosstalk in θX with motion in Y) | ± 3 µrad | ± 3 µrad | ± 5 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in X) | ± 3 µrad | ± 3 µrad | ± 5 µrad | typ. |
| Pitch (Rotational crosstalk in θY with motion in Z) | ± 5 µrad | ± 5 µrad | ± 5 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in X) | ± 10 µrad | ± 10 µrad | ± 10 µrad | typ. |
| Yaw (Rotational crosstalk in θZ with motion in Y) | ± 10 µrad | ± 10 µrad | ± 10 µrad | typ. |
| Positioning | P-733.3CD | P-733.3CL | P-733.3DD | Tolerance |
| Unidirectional repeatability in X | ± 2 nm | ± 2 nm | ± 2 nm | typ. |
| Unidirectional repeatability in Y | ± 2 nm | ± 2 nm | ± 2 nm | typ. |
| Unidirectional repeatability in Z | ± 1 nm | ± 1 nm | ± 1 nm | typ. |
| Resolution in X, open loop | 0.2 nm | 0.2 nm | 0.1 nm | typ. |
| Resolution in Y, open loop | 0.2 nm | 0.2 nm | 0.1 nm | typ. |
| Resolution in Z, open loop | 0.1 nm | 0.1 nm | 0.1 nm | typ. |
| Integrated sensor | Capacitive, indirect position measuring | Capacitive, indirect position measuring | Capacitive, indirect position measuring | |
| System resolution in X | 0.3 nm | 0.3 nm | 0.1 nm | typ. |
| System resolution in Y | 0.3 nm | 0.3 nm | 0.1 nm | typ. |
| System resolution in Z | 0.2 nm | 0.2 nm | 0.1 nm | typ. |
| Drive Properties | P-733.3CD | P-733.3CL | P-733.3DD | Tolerance |
| Drive type | PICMA® | PICMA® | PICMA® | |
| Electrical capacitance in X | 6 µF | 6 µF | 6.2 µF | ±20 % |
| Electrical capacitance in Y | 6 µF | 6 µF | 6.2 µF | ±20 % |
| Electrical capacitance in Z | 2.4 µF | 2.4 µF | 3.3 µF | ±20 % |
| Mechanical Properties | P-733.3CD | P-733.3CL | P-733.3DD | Tolerance |
| Stiffness in X | 1.4 N/µm | 1.4 N/µm | 4 N/µm | ±20 % |
| Stiffness in Y | 1.4 N/µm | 1.4 N/µm | 4 N/µm | ±20 % |
| Stiffness in Z | 9 N/µm | 9 N/µm | 10 N/µm | ±20 % |
| Resonant frequency in X, unloaded | 460 Hz | 460 Hz | 1200 Hz | ±20 % |
| Resonant frequency in X, under load with 120 g | 340 Hz | 340 Hz | ±20 % | |
| Resonant frequency in X, under load with 200 g | 295 Hz | 295 Hz | 530 Hz | ±20 % |
| Resonant frequency in Y, unloaded | 460 Hz | 460 Hz | 1200 Hz | ±20 % |
| Resonant frequency in Y, under load with 120 g | 340 Hz | 340 Hz | ±20 % | |
| Resonant frequency in Y, under load with 200 g | 295 Hz | 295 Hz | 530 Hz | ±20 % |
| Resonant frequency in Z, unloaded | 1400 Hz | 1400 Hz | 1100 Hz | ±20 % |
| Resonant frequency in Z, under load with 120 g | 1060 Hz | 1060 Hz | ±20 % | |
| Resonant frequency in Z, under load with 200 g | 650 Hz | 650 Hz | 635 Hz | ±20 % |
| Permissible push force in X | 50 N | 50 N | 50 N | max. |
| Permissible push force in Y | 50 N | 50 N | 50 N | max. |
| Permissible push force in Z | 50 N | 50 N | 50 N | max. |
| Permissible pull force in X | 20 N | 20 N | 20 N | max. |
| Permissible pull force in Y | 20 N | 20 N | 20 N | max. |
| Permissible pull force in Z | 20 N | 20 N | 20 N | max. |
| Overall mass | 675 g | 675 g | 675 g | ±5 % |
| Material | Aluminum | Aluminum | Aluminum | |
| Miscellaneous | P-733.3CD | P-733.3CL | P-733.3DD | Tolerance |
| Operating temperature range | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | |
| Connector | D-sub 25W3 (m) | LEMO FFA.00.250.CTAC22 | D-sub 25W3 (m) | |
| Cable length | 1.5 m | 1.5 m | 1.5 m | ±10 mm |
| Recommended controllers / drivers | E-503, E-505, E-610, E-621, E-625, E-712, E-727 | E-503, E-505, E-610, E-621, E-625, E-712, E-727 | E-503, E-505, E-610, E-621, E-625, E-712, E-727 | |
| Sensor connector | LEMO FFA.00.250.CTLC31 |
P-733.3DD: Linearity error with digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %.
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
Downloads
Product Note
Product Note
Product Change Notification Piezo Actuator Driven Products
Versione / Data
2021-04-19
pdf - 377 KB
inglese
Datasheet
Documentation
Documentation
User Manual PZ103
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
Versione / Data
1.2.0 2024-05-16
pdf - 2 MB
Versione / Data
1.2.0 2024-05-16
pdf - 2 MB
3D Models
3D Models
P-733 3-D model
zip - 2 MB
Brochure
Brochure
Microscope Stage Configurator
Sample Stages and Holders for Inverted Microscopes
Versione / Data
BRO70E
pdf - 3 MB
inglese
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
P-733.3CL
XYZ piezo nanopositioner; 100 µm × 100 µm × 10 µm travel range (X × Y × Z); capacitive, indirect position measuring; LEMO connectors; 1.5 m cable length
P-733.3DD
XYZ piezo nanopositioner; 30 µm × 30 µm × 10 µm travel range (X × Y × Z); capacitive, indirect position measuring; D-sub 25W3 (m); 1.5 m cable length
Come Ricevere un’Offerta
Clicca su OFFERTA / ORDINE
Aggiungi le alternative alla lista per l’offerta
Compila il modulo offerta
Invia una richiesta di prezzo a PI
Vi contatteremo al più presto
Chiedi ad un Ingegnere!
Ricevere rapidamente una risposta alla tua risposta via email o telefono da un Sales Engineer dalla sede PI più vicina a te.
Compatible Electronics
Compatible Accessories
Related Products
Tecnologia
Tecnologia PICMA®
Elevata affidabilità e lunga durata attraverso il processo di produzione brevettato per attuatori multistrato.
Sistemi con Guida a Flessione
Le Guide a Flessione realizzate da PI hanno dimostrato i loro punti di forza nei nanoposizionatori. Guidano l'attuatore piezoelettrico e garantiscono un movimento rettilineo senza inclinazione o spostamento laterale.
Controllori Digitali
La tecnologia digitale apre a diverse possibilità di miglioramento delle prestazioni nell'ingegneria di controllo che non sono possibili con la tecnologia analogica convenzionale.
Sensori Capacitivi
I sensori capacitivi sono il sistema metrologico prescelto per le applicazioni più esigenti di nanoposizionamento.
Sistemi Di Posizionamento Piezo a Cinematica Parallela
In un sistema multiasse a cinematica parallela, tutti gli attuatori agiscono direttamente su un'unica piattaforma mobile.
Vuoto
Gestione attenta, locali adeguati: PI non solo ha le attrezzature necessarie per la qualificazione dei materiali, dei componenti e dei prodotti finiti, ma vanta anche molti anni di esperienza per quanto riguarda sistemi di posizionamento in HV e UHV.