XY piezo scanner; 100 µm × 100 µm travel range (X × Y); capacitive, direct position measuring; D-sub 25W3 (m); 1.5 m cable length
P-734 XY Piezo Scanner
Highly Dynamic, Highest Travel Accuracy, with Aperture
- Flatness 5 nm, ideal for surface analysis and scanning microscopy
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Travel range 100 µm × 100 µm
- Clear aperture 56 mm × 56 mm
- Resolution of 0.3 nm due to capacitive position sensors
Application fields
- Scanning microscopy
- Confocal microscopy
- Mask/wafer positioning
- Surface measuring technology
- Nanoimprinting
- Micromanipulation
- Image processing / stabilization
- Nanopositioning with high flatness and straightness of motion
Outstanding lifetime thanks to PICMA® piezo actuators
The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
Motion | P-734.2CD | P-734.2CL | Tolerance |
---|---|---|---|
Active axes | X Y | X Y | |
Travel range in X | 100 µm | 100 µm | |
Travel range in Y | 100 µm | 100 µm | |
Travel range in X, open loop, at -20 to 120 V | 110 µm | 110 µm | +20 / -0 % |
Travel range in Y, open loop, at -20 to +120 V | 110 µm | 110 µm | +20 / -0 % |
Linearity error in X | 0.03 % | 0.03 % | typ. |
Linearity error in Y | 0.03 % | 0.03 % | typ. |
Flatness (Linear crosstalk in Z with motion in X) | ± 5 nm | ± 5 nm | typ. |
Flatness (Linear crosstalk in Z with motion in Y) | ± 5 nm | ± 5 nm | typ. |
Pitch (Rotational crosstalk in θX with motion in Y) | ± 3 µrad | ± 3 µrad | typ. |
Pitch (Rotational crosstalk in θY with motion in X) | ± 3 µrad | ± 3 µrad | typ. |
Yaw (Rotational crosstalk in θZ with motion in X) | ± 10 µrad | ± 10 µrad | typ. |
Yaw (Rotational crosstalk in θZ with motion in Y) | ± 10 µrad | ± 10 µrad | typ. |
Positioning | P-734.2CD | P-734.2CL | Tolerance |
Resolution in X, open loop | 0.2 nm | 0.2 nm | typ. |
Resolution in Y, open loop | 0.2 nm | 0.2 nm | typ. |
Integrated sensor | Capacitive, direct position measuring | Capacitive, direct position measuring | |
System resolution in X | 0.3 nm | 0.3 nm | |
System resolution in Y | 0.3 nm | 0.3 nm | |
Drive Properties | P-734.2CD | P-734.2CL | Tolerance |
Drive type | PICMA® | PICMA® | |
Electrical capacitance in X | 6.2 µF | 6.2 µF | ±20 % |
Electrical capacitance in Y | 6.2 µF | 6.2 µF | ±20 % |
Mechanical Properties | P-734.2CD | P-734.2CL | Tolerance |
Stiffness in X | 3 N/µm | 3 N/µm | ±20 % |
Stiffness in Y | 3 N/µm | 3 N/µm | ±20 % |
Resonant frequency in X, unloaded | 500 Hz | 500 Hz | ±20 % |
Resonant frequency in X, under load with 200 g | 350 Hz | 350 Hz | ±20 % |
Resonant frequency in X, under load with 500 g | 250 Hz | 250 Hz | ±20 % |
Resonant frequency in Y, unloaded | 500 Hz | 500 Hz | ±20 % |
Resonant frequency in Y, under load with 200 g | 350 Hz | 350 Hz | ±20 % |
Resonant frequency in Y, under load with 500 g | 250 Hz | 250 Hz | ±20 % |
Permissible push force in X | 300 N | 300 N | max. |
Permissible push force in Y | 300 N | 300 N | max. |
Permissible push force in Z | 20 N | 20 N | max. |
Permissible pull force in X | 100 N | 100 N | max. |
Permissible pull force in Y | 100 N | 100 N | max. |
Guide | Flexure guide with lever amplification | Flexure guide with lever amplification | |
Overall mass | 1040 g | 1040 g | ±5 % |
Material | Aluminum | Aluminum | |
Miscellaneous | P-734.2CD | P-734.2CL | Tolerance |
Operating temperature range | -20 to 80 °C | -20 to 80 °C | |
Connector | D-sub 25W3 (m) | LEMO LVPZT | |
Cable length | 1.5 m | 1.5 m | |
Recommended controllers / drivers | E-712, E-727 | E-500, E-503, E-505, E-509 | |
Sensor connector | LEMO for capacitive sensors |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual PZ103
P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors
3D Models
P-734 3-D model
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
XY piezo scanner; 100 µm × 100 µm travel range (X × Y); capacitive, direct position measuring; LEMO LVPZT; 1.5 m cable length
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