- Suitable for vacuum up to 10-9 hPa
- Travel ranges from 26 to 102 mm (1" to 4")
- Repeatability to 0.1 µm
- DC gear motor, stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. Therefore, a bakeout temperature of up to 80 °C can be reached. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6 hPa.
Higher quality for high vacuum applications
In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum, the drive screw and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.
The highest quality for special requirements in ultrahigh vacuum
In this vacuum class, the product is optimized in all details and thanks to components suitable for ultrahigh vacuum, in order to reach PI V9 vacuum class up to 10-9 hPa. Among other things, only selected types of plastic are used for this purpose and bakeout temperatures of 120 °C with measuring system, respectively 150 °C without measuring system are applied.
Motor types available
- DC motor with gearhead for high torques and resolution at low motor power, to 10-6 hPa
- 2-phase stepper motor for low velocity and high resolution, to 10-9 hPa
Types of position measuring
- Without encoder (open loop)
- Integrated rotary encoder on the motor shaft
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
Short Instructions MP146EK
Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx
User Manual MP186
This document describes the following precision linear positioner, vacuum-compatible 1 E-7 hPa: L-509.0x1300V7; L-509.0x1311V7
User Manual L509T0018
L-509 Vacuum-Compatible Precision Linear Positioner (1E-9 hPa)
User Manual MP174
L-509 Vacuum-Compatible Precision Linear Stage (1 E-6 hPa)
3-D model L-509.054132V6
3-D model L-509.051600V9
3-D model L-509.051100V6
3-D model L-509.034132V6
3-D model L-509.031600V9
3-D model L-509.031300V7
3-D model L-509.031100V6
3-D model L-509.024132V6
3-D model L-509.021600V9
3-D model L-509.021300V7
3-D model L-509.0513xxV7
3-D model L-509.0211xxV6
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