L-509 Precision Linear Stage

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Motion	L-509.025132	L-509.035132	L-509.055132	L-509.10AD10	L-509.10DG10	L-509.10SD00	L-509.14AD00	L-509.1ASD00	L-509.20AD10	L-509.20DG10	L-509.20SD00	L-509.24AD00	L-509.2ASD00	L-509.40AD10	L-509.40DG10	L-509.40SD00	L-509.44AD00	L-509.4ASD00	Tolerance
Active axes	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X	X
Travel range in X	26 mm	52 mm	102 mm	26 mm	26 mm	26 mm	26 mm	26 mm	52 mm	52 mm	52 mm	52 mm	52 mm	102 mm	102 mm	102 mm	102 mm	102 mm
Maximum velocity in X, unloaded	50 mm/s	50 mm/s	50 mm/s	50 mm/s	3 mm/s	20 mm/s	50 mm/s	20 mm/s	50 mm/s	3 mm/s	20 mm/s	50 mm/s	20 mm/s	50 mm/s	3 mm/s	20 mm/s	50 mm/s	20 mm/s
Linear crosstalk in Y with motion in X	± 1 µm	± 2 µm	± 4 µm	± 1 µm	± 1 µm	± 1 µm	± 1 µm	± 1 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 4 µm	± 4 µm	± 4 µm	± 4 µm	± 4 µm	typ.
Linear crosstalk in Z with motion in X	± 1 µm	± 2 µm	± 4 µm	± 1 µm	± 1 µm	± 1 µm	± 1 µm	± 1 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 2 µm	± 4 µm	± 4 µm	± 4 µm	± 4 µm	± 4 µm	typ.
Rotational crosstalk in θY with motion in X	± 60 µrad	± 90 µrad	± 120 µrad	± 60 µrad	± 60 µrad	± 60 µrad	± 60 µrad	± 60 µrad	± 90 µrad	± 90 µrad	± 90 µrad	± 90 µrad	± 90 µrad	± 120 µrad	± 120 µrad	± 120 µrad	± 120 µrad	± 120 µrad	typ.
Rotational crosstalk in θZ with motion in X	± 60 µrad	± 90 µrad	± 120 µrad	± 60 µrad	± 60 µrad	± 60 µrad	± 60 µrad	± 60 µrad	± 90 µrad	± 90 µrad	± 90 µrad	± 90 µrad	± 90 µrad	± 120 µrad	± 120 µrad	± 120 µrad	± 120 µrad	± 120 µrad	typ.
Positioning	L-509.025132	L-509.035132	L-509.055132	L-509.10AD10	L-509.10DG10	L-509.10SD00	L-509.14AD00	L-509.1ASD00	L-509.20AD10	L-509.20DG10	L-509.20SD00	L-509.24AD00	L-509.2ASD00	L-509.40AD10	L-509.40DG10	L-509.40SD00	L-509.44AD00	L-509.4ASD00	Tolerance
Unidirectional repeatability in X	0.2 µm	0.2 µm	0.2 µm	0.2 µm	0.1 µm	0.3 µm	0.1 µm	0.1 µm	0.2 µm	0.1 µm	0.3 µm	0.1 µm	0.1 µm	0.2 µm	0.1 µm	0.3 µm	0.1 µm	0.1 µm	typ.
Bidirectional repeatability in X	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 2 µm	± 1 µm	± 0.2 µm	± 0.2 µm	± 0.5 µm	± 2 µm	± 1 µm	± 0.2 µm	± 0.2 µm	± 0.5 µm	± 2 µm	± 1 µm	± 0.2 µm	± 0.2 µm	typ.
Minimum incremental motion in X	0.5 µm	0.5 µm	0.5 µm	0.8 µm	0.1 µm	0.1 µm	0.2 µm	0.02 µm	0.8 µm	0.1 µm	0.1 µm	0.2 µm	0.02 µm	0.8 µm	0.1 µm	0.1 µm	0.2 µm	0.02 µm	typ.
Integrated sensor	Incremental rotary encoder	Incremental rotary encoder	Incremental rotary encoder	Incremental rotary encoder	Incremental rotary encoder		Incremental linear encoder	Incremental linear encoder	Incremental rotary encoder	Incremental rotary encoder		Incremental linear encoder	Incremental linear encoder	Incremental rotary encoder	Incremental rotary encoder		Incremental linear encoder	Incremental linear encoder
Sensor signal	A/B quadrature, RS-422	A/B quadrature, RS-422	A/B quadrature, RS-422	A/B quadrature, RS-422	A/B quadrature, RS-422		A/B quadrature, RS-422	Sin/cos, 1 V peak-peak	A/B quadrature, RS-422	A/B quadrature, RS-422		A/B quadrature, RS-422	Sin/cos, 1 V peak-peak	A/B quadrature, RS-422	A/B quadrature, RS-422		A/B quadrature, RS-422	Sin/cos, 1 V peak-peak
Sensor resolution	20000 Impulse/U	20000 Impulse/U	20000 Impulse/U	16384 Impulse/U	4096 Impulse/U				16384 Impulse/U	4096 Impulse/U				16384 Impulse/U	4096 Impulse/U
Reference switch	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical
Limit switch	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical	Optical
System resolution in X					8.2363 nm	5000 nm		5 nm		8.2363 nm	5000 nm		5 nm		8.2363 nm	5000 nm		5 nm
Sensor resolution							0.05 nm					0.05 nm					0.05 nm
Sensor signal periods								20 µm					20 µm					20 µm
Drive Properties	L-509.025132	L-509.035132	L-509.055132	L-509.10AD10	L-509.10DG10	L-509.10SD00	L-509.14AD00	L-509.1ASD00	L-509.20AD10	L-509.20DG10	L-509.20SD00	L-509.24AD00	L-509.2ASD00	L-509.40AD10	L-509.40DG10	L-509.40SD00	L-509.44AD00	L-509.4ASD00	Tolerance
Drive type	Brushless DC motor	Brushless DC motor	Brushless DC motor	DC motor with ActiveDrive	DC gear motor	2-phase stepper motor	DC motor with ActiveDrive	2-phase stepper motor	DC motor with ActiveDrive	DC gear motor	2-phase stepper motor	DC motor with ActiveDrive	2-phase stepper motor	DC motor with ActiveDrive	DC gear motor	2-phase stepper motor	DC motor with ActiveDrive	2-phase stepper motor
Nominal voltage	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V	24 V
Peak voltage	48 V	48 V	48 V	24 V	48 V	48 V	24 V	48 V	24 V	48 V	48 V	24 V	48 V	24 V	48 V	48 V	24 V	48 V
Drive force in negative direction of motion in X	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	typ.
Drive force in positive direction of motion in X	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	60 N	typ.
Resistance phase-phase	0.81 Ω	0.81 Ω	0.81 Ω	1.63 Ω	4.09 Ω	3.3 Ω	1.63 Ω	3.3 Ω	1.63 Ω	4.09 Ω	3.3 Ω	1.63 Ω	3.3 Ω	1.63 Ω	4.09 Ω	3.3 Ω	1.63 Ω	3.3 Ω	typ.
Inductance phase-phase	0.64 mH	0.64 mH	0.64 mH	0.27 mH	0.18 mH	2.8 mH	0.27 mH	2.8 mH	0.27 mH	0.18 mH	2.8 mH	0.27 mH	2.8 mH	0.27 mH	0.18 mH	2.8 mH	0.27 mH	2.8 mH
Back EMF, phase-phase, rotational	3.3 V/kRPM	3.3 V/kRPM	3.3 V/kRPM	3.95 V/kRPM	1.68 V/kRPM		3.95 V/kRPM		3.95 V/kRPM	1.68 V/kRPM		3.95 V/kRPM		3.95 V/kRPM	1.68 V/kRPM		3.95 V/kRPM		max.
Number of pole pairs	7	7	7
Motor resolution						200 Vollschritte/U		200 Vollschritte/U			200 Vollschritte/U		200 Vollschritte/U			200 Vollschritte/U		200 Vollschritte/U
Mechanical Properties	L-509.025132	L-509.035132	L-509.055132	L-509.10AD10	L-509.10DG10	L-509.10SD00	L-509.14AD00	L-509.1ASD00	L-509.20AD10	L-509.20DG10	L-509.20SD00	L-509.24AD00	L-509.2ASD00	L-509.40AD10	L-509.40DG10	L-509.40SD00	L-509.44AD00	L-509.4ASD00	Tolerance
Guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide
Drive screw type	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw
Drive screw pitch	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm
Moved mass in X, unloaded	220 g	220 g	220 g	220 g	220 g	220 g	240 g	240 g	220 g	220 g	220 g	240 g	240 g	220 g	220 g	220 g	250 g	250 g
Permissible push force in Y	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	50 N	max.
Permissible push force in Z	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	max.
Permissible torque in θx	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	30 N·m	max.
Permissible torque in θY	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	max.
Permissible torque in θZ	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	20 N·m	max.
Overall mass	1400 g	1500 g	1700 g	1400 g	1400 g	1400 g	1400 g	1400 g	1500 g	1600 g	1500 g	1600 g	1600 g	1700 g	1900 g	1700 g	1800 g	1800 g
Material	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel	Aluminum, steel
Gear ratio i					29.642					29.642					29.642
Holding force in X, passive					50 N	50 N		50 N		50 N	50 N		50 N		50 N	50 N		50 N
Miscellaneous	L-509.025132	L-509.035132	L-509.055132	L-509.10AD10	L-509.10DG10	L-509.10SD00	L-509.14AD00	L-509.1ASD00	L-509.20AD10	L-509.20DG10	L-509.20SD00	L-509.24AD00	L-509.2ASD00	L-509.40AD10	L-509.40DG10	L-509.40SD00	L-509.44AD00	L-509.4ASD00	Tolerance
Connector	HD D-sub 26 (m)	HD D-sub 26 (m)	HD D-sub 26 (m)	D-sub 15-pole (m)	HD D-sub 26 (m)	HD D-sub 26 (m)	D-sub 15-pole (m)	HD D-sub 26 (m)	D-sub 15-pole (m)	HD D-sub 26 (m)	HD D-sub 26 (m)	D-sub 15-pole (m)	HD D-sub 26 (m)	D-sub 15-pole (m)	HD D-sub 26 (m)	HD D-sub 26 (m)	D-sub 15-pole (m)	HD D-sub 26 (m)
Recommended controllers / drivers	C-891 (one axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller	C-891 (one axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller	C-891 (one axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes)	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes)	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes)	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes)	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes)	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes) ACS modular controller	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-863 (one axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (up to 40 axes)	C-663.12 (one axis) SMC Hydra (two axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller
Operating temperature range	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C
Sensor connector								D-sub 9-pole (m)					D-sub 9-pole (m)					D-sub 9-pole (m)

Product Note

Product Change Notification Motor Driven Products

Version / Date

2021-04-19

Document language English

pdf - 917 KB

Datasheet

Datasheet L-509

Version / Date

2021-03-24

Version / Date

2021-03-24

Version / Date

2021-01-21

Document language

pdf - 2 MB

pdf - 2 MB

pdf - 1 MB

Documentation

3-D model L-509.xxSD00

Version / Date

2017-11-08

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Documentation

User Manual L509T0018

L-509 Vacuum-Compatible Precision Linear Positioner (1E-9 hPa)

Version / Date

2020-06-29

Document language English

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Documentation

User Manual MP141

L-509 Precision Linear Stage, 85 mm Width

Version / Date

1.5 2020-06-30

Version / Date

1.5 2020-06-30

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Documentation

User Manual MP174

L-509 Vacuum-Compatible Precision Linear Stage (1 E-6 hPa)

Version / Date

1.2 2020-06-30

Version / Date

1.2 2020-06-30

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Documentation

User Manual MP186

This document describes the following precision linear positioner, vacuum-compatible 1 E-7 hPa: L-509.0x1300V7; L-509.0x1311V7

Version / Date

1.2 2020-06-29

Document language English

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Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020

Version / Date

2.0.0 01/2020

Document language

pdf - 736 KB

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3-D Models

3-D model L-509.x0DG10

Version / Date

2017-11-08

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3-D Models

3-D model L-509.0xx132

Version / Date

2017-06-09

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3-D Models

3-D model L-509.xxADx0

Version / Date

2017-11-07

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L-509.025132

Precision linear stage; brushless DC motor; 26 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental rotary encoder, 20000 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.035132

Precision linear stage; brushless DC motor; 52 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental rotary encoder, 20000 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.055132

Precision linear stage; brushless DC motor; 102 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental rotary encoder, 20000 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.10AD10

Precision linear stage; DC motor with ActiveDrive; 26 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental rotary encoder, 16384 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.10DG10

Precision linear stage; DC gear motor; 26 mm travel range; 100 N load capacity; 3 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.10SD00

Precision linear stage; 2-phase stepper motor; 26 mm travel range; 100 N load capacity; 20 mm/s maximum velocity; ball screw

L-509.14AD00

Precision linear stage; DC motor with ActiveDrive; 26 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 0.05 nm sensor resolution, A/B quadrature, RS-422

L-509.1ASD00

Precision linear stage; 2-phase stepper motor; 26 mm travel range; 100 N load capacity; 20 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

L-509.20AD10

Precision linear stage; DC motor with ActiveDrive; 52 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental rotary encoder, 16384 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.20DG10

Precision linear stage; DC gear motor; 52 mm travel range; 100 N load capacity; 3 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.20SD00

Precision linear stage; 2-phase stepper motor; 52 mm travel range; 100 N load capacity; 20 mm/s maximum velocity; ball screw

L-509.24AD00

Precision linear stage; DC motor with ActiveDrive; 52 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 0.05 nm sensor resolution, A/B quadrature, RS-422

L-509.2ASD00

Precision linear stage; 2-phase stepper motor; 52 mm travel range; 100 N load capacity; 20 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak

L-509.40AD10

Precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental rotary encoder, 16384 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.40DG10

Precision linear stage; DC gear motor; 102 mm travel range; 100 N load capacity; 3 mm/s maximum velocity; ball screw; incremental rotary encoder, 4096 counts/rev sensor resolution, A/B quadrature, RS-422

L-509.40SD00

Precision linear stage; 2-phase stepper motor; 102 mm travel range; 100 N load capacity; 20 mm/s maximum velocity; ball screw

L-509.44AD00

Precision linear stage; DC motor with ActiveDrive; 102 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 0.05 nm sensor resolution, A/B quadrature, RS-422

L-509.4ASD00

Precision linear stage; 2-phase stepper motor; 102 mm travel range; 100 N load capacity; 20 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak