L-509 Precision Linear Stage

Compact Design, for Loads to 10 kg

L-509 Precision Linear Stage

Product Description Specifications Downloads Quote / Order

L-509 versions with stepper motor, dimensions in mm

L-509 versions with BLDC, DC gearhead, and ActiveDrive DC motors, dimensions in mm

Detail drawing of the L-509 motion platform

L-511 and L-509 precision stages can be combined without adapter plate for multi-axis positioning

Multi-axis setup with L-511 (horizontal) and L-509 (vertical) precision stages

Direction of the axes and torques for linear stages

Travel ranges from 26 to 102 mm (1" to 4")
Repeatability to 0.1 µm
Optional: Direct-measuring linear encoder
ActiveDrive DC, BLDC, DC gear motor, stepper motor
Direction-sensing reference switch
Vacuum-compatible items available

High travel accuracy and load capacity due to crossed roller guides with anti-creep system. Precision ball screw with 1 mm pitch. Compact design. Stress-relieved aluminum base for highest stability. Noncontact optical limit switches. Noncontact optical reference switch with direction sensing in the middle of the travel range.

ActiveDrive DC motor for high velocity: Control via pulse-width-modulated (PWM) signals, the operating voltage is achieved via an amplifier integrated in the motor housing
DC servo motor with gearhead for high torques and resolution at low motor power
2-phase stepper motor for low velocity and high resolution
Brushless DC motor: For applications with a high duty cycle. Use a controller with sine commutation for an exceptionally smooth synchronous motion and low vibrations even at a very low velocity.

Without encoder (open loop)
Rotary encoder integrated on the motor shaft
Incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Autofocus. Laser cutting. Research. Biotechnology. Automation. Vacuum. Optical alignment.

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Datasheet

Datasheet L-509

Version / Date

2019-10-24

Version / Date

2019-10-24

Version / Date

2018-11-26

Version / Date

2018-12-12

Document language

pdf - 2 MB

pdf - 2 MB

pdf - 1 MB

pdf - 1 MB

General specifications	L-509	Unit	Tolerance
Active axes	X
Drive screw type	Ball screw
Drive screw pitch	1	mm
Guide type	Crossed roller guide with anti-creep system
Load capacity	100	N	max.
Permissible lateral force	50	N	max.
Permissible torque M_X in θX	30	N·m	max.
Permissible torque M_Y in θY	25	N·m	max.
Permissible torque M_Z in θZ	20	N·m	max.
Reference and limit switches	Optical
Material	Aluminum, steel
Operating temperature range	5 to 40	°C

Travel range-dependent specifications	L-509.1 L-509.02	L-509.2 L-509.03	L-509.4 L-509.05	Unit	Tolerance
Travel range	26	52	102	mm
Pitch / yaw	±60	±90	±120	µrad	typ.
Straightness / flatness	2	4	8	µm	typ.
Mass
DC gear motor	1.4	1.6	1.9	kg	±5%
BLDC motor	1.4	1.5	1.7	kg	±5%
Active Drive DC motor with rotary encoder	1.4	1.5	1.7	kg	±5%
Active Drive DC motor with linear encoder	1.4	1.6	1.8	kg	±5%
Stepper motor	1.4	1.5	1.7	kg	±5%
Stepper motor with linear encoder	1.5	1.6	1.8	kg	±5%

DC motor and encoder options	DC gear motor with rotary encoder L-509.x0DG10	BLDC motor with rotary encoder L-509.xx5132	ActiveDrive DC motor with rotary encoder L-509.x0AD10	ActiveDrive DC motor with linear encoder L-509.x4AD00	Unit	Tolerance
System resolution	8.2	50	61	50	nm
Unidirectional repeatability	0.1	0.2	0.2	0.1	µm	typ.
Bidirectional repeatability	±2	±0.5	±0.5	±0.2	µm	typ.
Minimum incremental motion	0.1	0.5	0.8	0.2	µm	typ.
Maximum velocity	3	20	50	50	mm/s
Drive force	60	60	60	60	N	max.
Holding force (passive)	50	–	–	–	N	typ.
Limit switch	Forked photoelectric sensor, N/C contactor, 5V, NPN	Forked photoelectric sensor, N/C contactor, 5V, NPN	Forked photoelectric sensor, N/C contactor, 5V, TTL	Forked photoelectric sensor, N/C contactor, 5V, TTL
Gear ratio	2401/81	–	–	–
Motor encoder	Incremental rotary encoder	Incremental rotary encoder	Incremental rotary encoder	–
Motor encoder: Sensor resolution	4096	5000	20000	–	Cts./rev.
Motor encoder: Sensor signal	A/B quadrature, TTL	A/B quadrature, TTL	A/B quadrature, TTL	–
Linear encoder	–	–	–	Incremental linear encoder
Sensor resolution linear encoder	–	–	–	50	nm
Sensor signal linear encoder	–	–	–	A/B quadrature, TTL
Motor type	DC gear motor	BLDC motor	ActiveDrive DC motor (PWM)	ActiveDrive DC motor (PWM)
Operating voltage, nominal	12	36	24	24	V	nom.
Operating voltage, max.	24	48	48	48	V	max.
Terminal resistance	4.09	–	1.63	1.63	Ω	typ.
Terminal inductance	0.18	–	0.27	0.27	mH	typ.
Back EMF	1.68	–	3.95	3.95	V/kRPM	max.
Resistance phase-phase	–	0.807	–	–	Ω	typ.
Inductance phase-phase	–	0.644	–	–	mH	typ.
Back EMF phase-phase	–	3.3	–	–	V/kRPM	max.
Number of pole pairs	–	7	–	–
Motor resolution	–	–	–	–	Full steps/rev.
Connector	1 × HD D-sub 26 (m)	1 × HD D-sub 26 (m)	1 × D-sub 15 (m)	1 × D-sub 15 (m)
Connector: Linear encoder	–	–	–	–
Connector: Supply voltage	–	–	M8 4-pin (m)	M8 4-pin (m)
Moved mass, unloaded	0.22	0.22	0.22	0.24	kg	±5%
Recommended controllers/drivers	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller	C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes)	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes)

Stepper motor and encoder options	2-phase stepper motor L-509.x0SD00	2-phase stepper motor with linear encoder L-509.xASD00	Unit	Tolerance
System resolution	5000	5	nm
Unidirectional repeatability	0.3	0.1	µm	typ.
Bidirectional repeatability	±1	±0.2	µm	typ.
Minimum incremental motion	0.1	0.02	µm	typ.
Maximum velocity	20	20	mm/s
Drive force	60	60	N	max.
Holding force (passive)	60	60	N	typ.
Limit switch	Forked photoelectric sensor, N/C contactor, 5V, NPN	Forked photoelectric sensor, N/C contactor, 5V, NPN
Gear ratio	–	–
Motor encoder	–	–
Motor encoder: Sensor resolution	–	–	Cts./rev.
Motor encoder: Sensor signal	–	–
Linear encoder	–	Incremental linear encoder
Sensor resolution linear encoder	–	5	nm
Sensor signal linear encoder	–	Sin/cos, 1 V peak-peak, 20 µm signal period
Motor type	2-phase stepper motor	2-phase stepper motor
Operating voltage, nominal	24	24	V	nom.
Operating voltage, max.	48	48	V	max.
Resistance phase-phase	6.6	6.6	Ω	typ.
Inductance phase-phase	5.6	5.6	mH	typ.
Back EMF phase-phase	–	–	V/kRM	max.
Number of pole pairs	–	–
Motor resolution	200	200	Full steps/rev.
Connector	1 × HD D-sub 26 (m)	1 × HD D-sub 26 (m)
Connector: Linear encoder	–	1 × D-sub 9 (m)
Connector: Supply voltage	–	–
Moved mass, unloaded	0.22	0.24	kg	±5%
Recommended controllers/drivers	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller

Provided that the controller is ordered at the same time as the positioner, all cables required for operation with the recommended controller are included in the scope of delivery (exception: ACS controller). The cable length is 3 m. Cables for connecting to ACS controllers or other controllers can be ordered as accessories.

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Datasheet

Datasheet L-509

Version / Date

2019-10-24

Version / Date

2019-10-24

Version / Date

2018-11-26

Version / Date

2018-12-12

Document language

pdf - 2 MB

pdf - 2 MB

pdf - 1 MB

pdf - 1 MB

Documentation

User Manual L509T0018

L-509 Vacuum-Compatible Precision Linear Positioner (1E-9 hPa)

Version / Date

2019-09-13

Document language English

Get download link via email

Documentation

User Manual MP141

L-509 Precision Linear Stage, 85 mm Width

Version / Date

1.4.0 2019-08-23

Version / Date

1.4.0 2019-08-23

Document language

Get download link via email Get download link via email

Documentation

User Manual MP174

L-509 Vacuum-Compatible Precision Linear Stage (1 E-6 hPa)

Version / Date

2017-11-30

Version / Date

2017-11-30

Document language

Get download link via email Get download link via email

Documentation

User Manual MP186

This document describes the following precision linear positioner, vacuum-compatible 1 E-7 hPa: L-509.0x1300V7; L-509.0x1311V7

Version / Date

1.0.0 2019-03-18

Document language English

Get download link via email

Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

1.5.0 October 2017

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pdf - 395 KB

3-D Models

L-509 3-D model

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L-509.025132

Precision Linear stage, 85 mm width, 26 mm travel range, brushless DC motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.035132

Precision Linear stage, 85 mm width, 52 mm travel range, brushless DC motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.055132

Precision Linear stage, 85 mm width, 102 mm travel range, brushless DC motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.10AD10

Precision Linear stage, 85 mm width, 26 mm travel range, ActiveDrive DC motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.10DG10

Precision Linear stage, 85 mm width, 26 mm travel range, DC gear motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.10SD00

Precision Linear stage, 85 mm width, 26 mm travel range, stepper motor , including 3 m cable set

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L-509.14AD00

Precision Linear stage, 85 mm width, 26 mm travel range, ActiveDrive DC motor, linear encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.1ASD00

Precision Linear stage, 85 mm width, 26 mm travel range, stepper motor, linear encoder with sin/cos signal transmission , including 3 m cable set

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L-509.20AD10

Precision Linear stage, 85 mm width, 52 mm travel range, ActiveDrive DC motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.20DG10

Precision Linear stage, 85 mm width, 52 mm travel range, DC gear motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.20SD00

Precision Linear stage, 85 mm width, 52 mm travel range, stepper motor , including 3 m cable set

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L-509.24AD00

Precision Linear stage, 85 mm width, 52 mm travel range, ActiveDrive DC motor, linear encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.2ASD00

Precision Linear stage, 85 mm width, 52 mm travel range, stepper motor, linear encoder with sin/cos signal transmission , including 3 m cable set

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L-509.40AD10

Precision Linear stage, 85 mm width, 102 mm travel range, ActiveDrive DC motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.40DG10

Precision Linear stage, 85 mm width, 102 mm travel range, DC gear motor, incremental rotary encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.40SD00

Precision Linear stage, 85 mm width, 102 mm travel range, stepper motor , including 3 m cable set

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L-509.44AD00

Precision Linear stage, 85 mm width, 102 mm travel range, ActiveDrive DC motor, linear encoder with A/B quadrature signal transmission , including 3 m cable set

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L-509.4ASD00

Precision Linear stage, 85 mm width, 102 mm travel range, stepper motor, linear encoder with sin/cos signal transmission , including 3 m cable set

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