L-509 Precision Linear Stage

Active axes

X

Drive screw type

Ball screw

Drive screw pitch

1

mm

Guide type

Crossed roller guide with anti-creep system

Load capacity

100

N

max.

Permissible lateral force

50

N

max.

Permissible torque M_X in θ_X

30

Nm

max.

Permissible torque M_Y in θ_Y

25

Nm

max.

Permissible torque M_z in θ_Z

20

Nm

max.

Reference and limit switches

Optical

Material

Aluminum, steel

Operating temperature range

5 to 40

°C

Travel range

26

52

102

mm

Pitch / yaw

±60

±90

±120

µrad

typ.

Straightness / flatness

2

4

8

µm

typ.

Mass

DC gear motor

1.4

1.6

1.9

kg

±5%

BLDC motor

1.4

1.5

1.7

kg

±5%

Active Drive DC motor with rotary encoder

1.4

1.5

1.7

kg

±5%

Active Drive DC motor with linear encoder

1.4

1.6

1.8

kg

±5%

Stepper motor

1.4

1.5

1.7

kg

±5%

Stepper motor with linear encoder

1.5

1.6

1.8

kg

±5%

System resolution

8.2

50

61

50

nm

Unidirectional repeatability

0.1

0.2

0.2

0.1

µm

Typ.

Bidirectional repeatability

±2

±0.5

±0.5

±0.2

µm

Typ.

Minimum incremental motion

0.1

0.5

0.8

0.2

µm

Typ.

Maximum velocity

3

50

50

50

mm/s

Drive force

60

60

60

60

N

Max.

Holding force (passive)

50

–

–

–

N

Typ.

Limit switch

Forked photoelectric sensor, N/C contact, 5V, NPN

Forked photoelectric sensor, N/C contact, 5V, NPN

Forked photoelectric sensor, N/C contact, 5V, TTL

Forked photoelectric sensor, N/C contact, 5V, TTL

Gear ratio

2401/81

–

–

–

Motor encoder

Incremental rotary encoder

Incremental rotary encoder

Incremental rotary encoder

–

Motor encoder: Sensor resolution

4096

5000

20000

–

Cts./rev.

Motor encoder: Sensor signal

A/B quadrature, TTL

A/B quadrature, TTL

A/B quadrature, TTL

–

Linear encoder

–

–

–

Incremental linear encoder

Sensor resolution linear encoder

–

–

–

50

nm

Sensor signal linear encoder

–

–

–

A/B quadrature, TTL

Motor type

DC gear motor

BLDC motor

ActiveDrive DC motor (PWM)

ActiveDrive DC motor (PWM)

Operating voltage, nominal

12

36

24

24

V

Nom.

Operating voltage, max.

24

48

48

48

V

Max.

Resistance

4.09**

0.807*

1.63**

1.63**

Ω

Typ.

Inductance

0.18**

0.644*

0.27**

0.27**

mH

Typ.

Back EMF

1.68**

3.3*

3.95**

3.95**

V/kRPM

Max.

Number of pole pairs

–

7

–

–

Motor resolution

–

–

–

–

Full steps/rev.

Connector

1 × HD D-sub 26 (m)

1 × HD D-sub 26 (m)

1 × D-sub 15 (m)

1 × D-sub 15 (m)

Connector: Linear encoder

–

–

–

–

Connector: Supply voltage

–

–

M8 4-pin (m)

M8 4-pin (m)

Moved mass, unloaded

0.22

0.22

0.22

0.24

kg

±5%

Recommended controllers / drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-891 (single axis)

C-885 with C-891.11C885 (up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

System resolution

5000

5

nm

Unidirectional repeatability

0.3

0.1

µm

Typ.

Bidirectional repeatability

±1

±0.2

µm

Typ.

Minimum incremental motion

0.1

0.02

µm

Typ.

Maximum velocity

20

20

mm/s

Drive force

60

60

N

Max.

Holding force (passive)

50

50

N

Typ.

Limit switch

Forked photoelectric sensor, N/C contact, 5V, NPN

Forked photoelectric sensor, N/C contact, 5V, NPN

Gear ratio

–

–

Motor encoder

–

–

Motor encoder: Sensor resolution

–

–

Cts./rev.

Motor encoder: Sensor signal

–

–

Linear encoder

–

Incremental linear encoder

Sensor resolution linear encoder

–

5

nm

Sensor signal linear encoder

–

Sin/cos, 1 V peak-peak, 20 µm signal period

Motor type

2-phase stepper motor

2-phase stepper motor

Operating voltage, nominal

24

24

V

Nom.

Operating voltage, max.

48

48

V

Max.

Resistance*

3.3

3.3

Ω

Typ.

Inductance*

2.8

2.8

mH

Typ.

Back EMF

–

–

V/kRM

Max.

Number of pole pairs

–

–

Motor resolution

200

200

Full steps/rev.

Connector

1 × HD D-sub 26 (m)

1 × HD D-sub 26 (m)

Connector: Linear encoder

–

1 × D-sub 9 (m)

Connector: Supply voltage

–

–

Moved mass, unloaded

0.22

0.24

kg

±5%

Recommended controllers/drivers

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller