L-509 Precision Linear Stage

Active axes

X

Drive screw type

Ball screw

Drive screw pitch

1

mm

Guide type

Crossed roller guide with anti-creep system

Load capacity

100

N

max.

Permissible lateral force

50

N

max.

Permissible torque Mx in θX

30

N·m

max.

Permissible torque Mx in θY

25

N·m

max.

Permissible torque Mx in θZ

20

N·m

max.

Reference and limit switches

Optical

Material

Aluminum, steel

Operating temperature range

5 to 40

°C

Travel range

26

52

102

mm

Pitch / yaw

±60

±90

±120

µrad

typ.

Straightness / flatness

2

4

8

µm

typ.

Mass

DC gear motor

1.4

1.6

1.9

kg

±5%

BLDC motor

1.4

1.5

1.7

kg

±5%

Active Drive DC motor with rotary encoder

1.4

1.5

1.7

kg

±5%

Active Drive DC motor with linear encoder

1.4

1.6

1.8

kg

±5%

Stepper motor

1.4

1.5

1.7

kg

±5%

Stepper motor with linear encoder

1.5

1.6

1.8

kg

±5%

System resolution

8.2

50

61

50

nm

Unidirectional repeatability

0.1

0.2

0.2

0.1

µm

typ.

Bidirectional repeatability

±2

±0.5

±0.5

±0.2

µm

typ.

Minimum incremental motion

0.1

0.5

0.8

0.2

µm

typ.

Maximum velocity

3

20

50

50

mm/s

Drive force

60

60

60

60

N

Max.

Holding force (passive)

50

–

–

–

N

typ.

Limit switch

Forked photoelectric sensor, N/C contactor, 5V, NPN

Forked photoelectric sensor, N/C contactor, 5V, NPN

Forked photoelectric sensor, N/C contactor, 5V, TTL

Forked photoelectric sensor, N/C contactor, 5V, TTL

Gear ratio

2401/81

–

–

–

Motor encoder

Incremental rotary encoder

Incremental rotary encoder

Incremental rotary encoder

–

Motor encoder: Sensor resolution

4096

5000

20000

–

Cts./rev.

Motor encoder: Sensor signal

A/B quadrature, TTL

A/B quadrature, TTL

A/B quadrature, TTL

–

Linear encoder

–

–

–

Incremental linear encoder

Sensor resolution linear encoder

–

–

–

50

nm

Sensor signal linear encoder

–

–

–

A/B quadrature, TTL

Motor type

DC gear motor

BLDC motor

ActiveDrive DC motor (PWM)

ActiveDrive DC motor (PWM)

Nominal voltage*

12

36

24

24

V

Peak voltage*

24

48

48

48

V

Terminal resistance

4.09

–

1.63

1.63

Ω

typ.

Terminal inductance

0.18

–

0.27

0.27

mH

typ.

Back EMF

1.68

–

3.95

3.95

V/kRPM

Max.

Resistance phase-phase

–

0.807

–

–

Ω

typ.

Inductance phase-phase

–

0.644

–

–

mH

typ.

Back EMF phase-phase

–

3.3

–

–

V/kRPM

Max.

Number of pole pairs

–

7

–

–

Motor resolution

–

–

–

–

Full steps/rev.

Connector

1 × HD D-sub 26 (m)

1 × HD D-sub 26 (m)

1 × D-sub 15 (m)

1 × D-sub 15 (m)

Connector: Linear encoder

–

–

–

–

Connector: Supply voltage

–

–

M8 4-pin (m)

M8 4-pin (m)

Moved mass, unloaded

0.22

0.22

0.22

0.24

kg

±5%

Recommended controllers/drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-891 (single axis)

C-885 with C-891.11C885 (up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

System resolution

5000

5

nm

Unidirectional repeatability

0.3

0.1

µm

typ.

Bidirectional repeatability

±1

±0.2

µm

typ.

Minimum incremental motion

0.1

0.02

µm

typ.

Maximum velocity

20

20

mm/s

Drive force

60

60

N

Max.

Holding force (passive)

60

60

N

typ.

Limit switch

Forked photoelectric sensor, N/C contactor, 5V, NPN

Forked photoelectric sensor, N/C contactor, 5V, NPN

Gear ratio

–

–

Motor encoder

–

–

Motor encoder: Sensor resolution

–

–

Cts./rev.

Motor encoder: Sensor signal

–

–

Linear encoder

–

Incremental linear encoder

Sensor resolution linear encoder

–

5

nm

Sensor signal linear encoder

–

Sin/cos, 1 V peak-peak, 20 µm signal period

Motor type

2-phase stepper motor

2-phase stepper motor

Nominal voltage*

4

4

V

Peak voltage*

–

–

V

Resistance phase-phase

6.6

6.6

Ω

typ.

Inductance phase-phase

5.6

5.6

mH

typ.

Back EMF phase-phase

–

–

V/kRM

Max.

Number of pole pairs

–

–

Motor resolution

200

200

Full steps/rev.

Connector

1 × HD D-sub 26 (m)

1 × HD D-sub 26 (m)

Connector: Linear encoder

–

1 × D-sub 9 (m)

Connector: Supply voltage

–

–

Moved mass, unloaded

0.22

0.24

kg

±5%

Recommended controllers/drivers

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller