Q-632 Q‑Motion® Rotation Stage

Compact Through Piezo Motor: 30 mm Turntable Diameter

Only 32 mm in width and 8 mm in height
Direct position measurement with incremental encoder with 0.75 µrad resolution
Up to 3 µrad minimum incremental motion
Rotation range >360°
Velocity 45 °/s

Q-632, dimensions in mm

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. The drives acting directly on the runner achieve velocities of max. 45 °/s with an operating frequency up to 20 kHz.

Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing.

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Datasheet

Versione / Data

2020-06-24

pdf - 362 KB

Versione / Data

2020-06-24

pdf - 364 KB

Versione / Data

2021-01-14

pdf - 344 KB

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Motion and positioning	Q-632.930	Unit	Tolerance
	Rotation stage with position sensor for closed-loop operation
Active axis	θ_Z
Rotation range	>360	°
Integrated sensor	Incremental encoder
Sensor resolution	0.75	µrad
Minimum incremental motion	3	µrad	Typ.
Unidirectional repeatability	6	µrad	Typ.
Maximum velocity, closed-loop	20	°/s

Mechanical properties	Q-632.930	Unit	Tolerance
Load capacity, any orientation	0.1	kg
Self-locking	7	mN·m	Min.
Drive torque	6	mN·m	Typ.
Length	36	mm
Width	32	mm
Height	8	mm
Turntable diameter	29	mm

Drive properties	Q-632.930	Unit	Tolerance
Motor type	Piezoelectric inertia drive

Miscellaneous	Q-632.930	Unit	Tolerance
Operating temperature range	0 to 40	°C
Material	Aluminum, steel
Mass without cable	25	g	±10 %
Cable length	1	m
Connector	D-sub
Recommended electronics	E-873.1AT, E-873.10C885