Q-622 Q-Motion® Miniature Rotation Stage

Miniature rotation stage with position sensor for closed-loop operation

Miniature rotation stage without position sensor

Miniature rotation stage, without position sensor for ultrahigh vacuum to 10^-9 hPa

Active axis

θ_Z

θ_Z

θ_Z

Rotation range

>360

>360

>360

°

Integrated sensor

Incremental encoder

–

–

Sensor resolution

0.55

–

–

µrad

Minimum incremental motion

2.2

100 ⁽¹⁾

100 ⁽¹⁾

µrad

typ.

Unidirectional repeatability

3

–

–

µrad

Maximum velocity, open loop

70

70

70

°/s

Load capacity

1

1

1

N

Holding torque, power off

6

6

6

mN·m

min.

Torque

5

5

5

mN·m

typ.

Length

22

22

22

mm

Width

22

22

22

mm

Height

10

10

10

mm

Turntable diameter

22

22

22

mm

Motor type

Piezoelectric inertia drive

Piezoelectric inertia drive

Piezoelectric inertia drive

Operating temperature range

0 to 40

0 to 40

0 to 40

°C

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass without cable

15

12

12

g

Cable length

1

1

1

m

Connector

Sub-D 15 (m)

Sub-D 15 (m)

Sub-D 15 (f)

Recommended electronics

E-873.1AT, E-873.3QTU, E-873.10C885

E-872.401

E-872.401