Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.
- Load capacity to 5 kg, self-locking version
- Travel ranges to 45 mm / 25°
- Min. incremental motion to 0.3 µm
- Repeatability to ±0.1 µm / ±2 µrad
- Velocity to 12.5 mm/s
Precision-class 6-axis positioning system
Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. suitable for vacuum environments to 10-6 hPa.
Compact due to folded drive design
The simulation software simulates the limits of the workspace and load capacity of a hexapod. Therefore, even before making a purchase, you can check whether a particular hexapod model can handle the loads, forces, and torques occurring in an application. For this purpose, the simulation tool takes into account the position and motion of the hexapod as well as the pivot point and several reference coordinate systems.
Fields of application
Research and industry. For micromanipulation, biotechnology, semiconductor manufacturing
Product Change Notification Motor Driven Products
Product Change Notification Hexapod Cables
Short Instructions MS247EK
Hexapod Systems: H-xxx Hexapod with C-887.5xx Controller
User Manual MS200
H-824 Compact Microrobot
H-824.x2x 3-D model
Hexapod Simulation Tool
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Compact hexapod microrobot, gearhead, 0.5 mm/s, 5 kg load, vacuum compatible to 10-6 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately.