PD72Z1x PIFOC Objective Scanning System 100 µm
High Dynamics Piezo Drive for Subnanometer Resolution
- Complete system with digital controller, software, and optional QuickLock thread adapter
- USB, RS-232, analog interfaces
- Travel range 100 µm
- Fine positioning of objectives with sub-nm resolution
- Zero-play, high-precision flexure guide system
- Direct position measuring with capacitive sensors
- Compatible with MetaMorph, µManager, and MATLAB
- All servo control parameters can be changed during operation
Application fields
- Microscopy
- Confocal microscopy
- 3-D imaging
- Screening
- Autofocus systems
- Surface analysis
- Wafer inspection
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
Extensive software for rapid start of productive operation
Thanks to support of MATLAB and NI LabVIEW as well as all common operating systems (Windows, Linux, and macOS), integration succeeds in virtually every environment – quickly and efficiently. Sophisticated programming examples and software tools such as PIMikroMove shorten the time to productive operation considerably.
Specifications
Specifications
PD72Z1SAA* PD72Z1SAQ** PD72Z1SA0*** | PD72Z1CAA* PD72Z1CAQ** PD72Z1CA0*** | Unit | Tolerance | |
---|---|---|---|---|
Active axes | Z | Z | ||
Motion and positioning | ||||
Integrated sensor | SGS | Capacitive | ||
Travel range, closed loop | 100 | 100 | µm | |
Resolution, closed loop | 5 | 1 | nm | typ. |
Linearity error, closed loop | 0.2 | 0.06 | % | typ. |
Repeatability | ±10 | ±5 | nm | typ. |
Tilt θX, θY | 13 | 13 | µrad | typ. |
Crosstalk in X, Y | 100 | 100 | nm | typ. |
Settling time (0.5 µm step with 5 % accuracy, 150 g) | 10 | 10 | ms | typ. |
Mechanical properties | ||||
Stiffness in motion direction | 0.3 | 0.3 | N/µm | ±20 % |
Resonant frequency, no load | 580 | 580 | Hz | ±20 % |
Resonant frequency, under load, 120 g | 235 | 235 | Hz | ±20 % |
Resonant frequency, under load, 200 g | 180 | 180 | Hz | ±20 % |
Push/pull force capacity in motion direction | 100 / 20 | 100 / 20 | N | max. |
Drive properties | ||||
Piezo ceramic | PICMA® P-885 | PICMA® P-885 | ||
Miscellaneous | ||||
Operating temperature range | 10 to 50 | 10 to 50 | °C | |
Material | Aluminum | Aluminum | ||
Mass | 0.22 | 0.24 | kg | ±5 % |
Cable length | 1 | 1 | m | +50 mm / -0 mm |
Piezo controller | E-709 (in the scope of delivery) | |||
Communication interfaces | USB, RS-232, SPI | |||
I/O connector | HD D-sub 26 1 analog input 0 to 10 V 1 sensor monitor 0 to 10 V 1 digital input (LVTTL, programmable) 1 analog output 5 digital outputs (LVTTL, 3 × predefined, 2 × programmable) | |||
Command set | PI General Command Set (GCS) | |||
User software | PIMikroMove | |||
Software drivers | NI LabVIEW drivers, shared libraries for Windows and Linux | |||
Supported functions | Wave generator, data recorder, autozero, trigger I/O, MATLAB, MetaMorph, µManager | |||
Controller dimensions | 160 mm × 96 mm × 33 mm |
Downloads
Product Note
Datasheet
Documentation
User Manual P721T0007
P-721 Fast PIFOC® Piezo Nanofocusing Z Drive
Installation Instructions P721T0002
P-721 Thread Adapters for P-721 / P-725.xxx PIFOC Objective Scanners
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