PD72Z1x PIFOC Objective Scanning System 100 µm

This product has been replaced by the following new product: P-725.xCDE2 PIFOC Focus Scanner for Microscope Objectives

High Dynamics Piezo Drive for Subnanometer Resolution

Complete system with digital controller, software, and optional QuickLock thread adapter
USB, RS-232, analog interfaces
Travel range 100 µm
Fine positioning of objectives with sub-nm resolution
Zero-play, high-precision flexure guide system
Direct position measuring with capacitive sensors
Compatible with MetaMorph, µManager, and MATLAB
All servo control parameters can be changed during operation

PD72Z1x PIFOC objective scanning system 100 µm (objective not included)

PD72Z1xAQ / PD72Z1xA0, dimensions in mm. P-721.xxQ: Suitable PIFOC QuickLock thread adapters.

PD72Z1xAA, dimensions in mm. P-721.xxA: Suitable PIFOC QuickLock thread adapters.

Settling time of 10 ms with 150-g objective (PD72Z1CAQ system)

Microscopy
Confocal microscopy
3-D imaging
Screening
Autofocus systems
Surface analysis
Wafer inspection

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Thanks to support of MATLAB and NI LabVIEW as well as all common operating systems (Windows, Linux, and macOS), integration succeeds in virtually every environment – quickly and efficiently. Sophisticated programming examples and software tools such as PIMikroMove shorten the time to productive operation considerably.

Download datasheet specifications

Datasheet

Version / Date

2018-09-27

pdf - 1 MB

Version / Date

2018-09-27

pdf - 1 MB

Version / Date

2019-09-12

pdf - 953 KB

Version / Date

2019-09-12

pdf - 1,022 KB

Download

	PD72Z1SAA* PD72Z1SAQ PD72Z1SA0*	PD72Z1CAA* PD72Z1CAQ PD72Z1CA0*	Unit	Tolerance
Active axes	Z	Z
Motion and positioning
Integrated sensor	SGS	Capacitive
Travel range, closed loop	100	100	µm
Resolution, closed loop	5	1	nm	typ.
Linearity error, closed loop	0.2	0.06	%	typ.
Repeatability	±10	±5	nm	typ.
Tilt θ_X, θ_Y	13	13	µrad	typ.
Crosstalk in X, Y	100	100	nm	typ.
Settling time (0.5 µm step with 5 % accuracy, 150 g)	10	10	ms	typ.
Mechanical properties
Stiffness in motion direction	0.3	0.3	N/µm	±20 %
Resonant frequency, no load	580	580	Hz	±20 %
Resonant frequency, under load, 120 g	235	235	Hz	±20 %
Resonant frequency, under load, 200 g	180	180	Hz	±20 %
Push/pull force capacity in motion direction	100 / 20	100 / 20	N	max.
Drive properties
Piezo ceramic	PICMA® P-885	PICMA® P-885
Miscellaneous
Operating temperature range	10 to 50	10 to 50	°C
Material	Aluminum	Aluminum
Mass	0.22	0.24	kg	±5 %
Cable length	1	1	m	+50 mm / -0 mm
Piezo controller	E-709 (in the scope of delivery)
Communication interfaces	USB, RS-232, SPI
I/O connector	HD D-sub 26 1 analog input 0 to 10 V 1 sensor monitor 0 to 10 V 1 digital input (LVTTL, programmable) 1 analog output 5 digital outputs (LVTTL, 3 × predefined, 2 × programmable)
Command set	PI General Command Set (GCS)
User software	PIMikroMove
Software drivers	NI LabVIEW drivers, shared libraries for Windows and Linux
Supported functions	Wave generator, data recorder, autozero, trigger I/O, MATLAB, MetaMorph, µManager
Controller dimensions	160 mm × 96 mm × 33 mm

* With M32 QuickLock thread adapter with large aperture

** With M25 QuickLock adapter

*** Without QuickLock adapter (can be ordered separately)

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

Download datasheet downloads

Product Note

PIFOC Portfolio

Version / Date

00.002 2021-09-28

pdf - 624 KB

English

Download

Product Note

Version / Date

2021-04-19

pdf - 377 KB

English

Download

Datasheet

Version / Date

2018-09-27

pdf - 1 MB

Version / Date

2018-09-27

pdf - 1 MB

Version / Date

2019-09-12

pdf - 953 KB

Version / Date

2019-09-12

pdf - 1,022 KB

Download

Documentation

Digital Piezo Controllers E-709.xxG / E-727 / E-754

Version / Date

2.0.0 06/2020

pdf - 2 MB

Version / Date

2.0.0 06/2020

pdf - 2 MB

Download

Documentation

P-721 Fast PIFOC® Piezo Nanofocusing Z Drive

Version / Date

2017-03-29

pdf - 1 MB

English

Documentation

P-721 Thread Adapters for P-721 / P-725.xxx PIFOC Objective Scanners

Version / Date

2022-04-01

pdf - 795 KB

Version / Date

2022-04-01

pdf - 804 KB

quote / order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

PD72Z1CAA

Fast PIFOC piezo nanofocusing system, 100 µm, capacitive sensor, M32 QuickLock thread adapter set with large aperture, digital controller with USB, RS-232

PD72Z1CAQ

Fast PIFOC piezo nanofocusing system, 100 µm, capacitive sensor, M25 QuickLock adapter, digital controller with USB, RS-232

PD72Z1CA0

Fast PIFOC piezo nanofocusing system, 100 µm, capacitive sensor, digital controller with USB, RS-232

PD72Z1SAA

Fast PIFOC piezo nanofocusing system, 100 µm, strain gauge sensor, M32 QuickLock thread adapter set with large aperture, digital controller with USB, RS-232

PD72Z1SAQ

Fast PIFOC piezo nanofocusing system, 100 µm, strain gauge sensor, M25 QuickLock adapter, digital controller with USB, RS-232

PD72Z1SA0

Fast PIFOC piezo nanofocusing system, 100 µm, strain gauge sensor, digital controller with USB, RS-232

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0039 02 665 011 01 info@pionline.it

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PD72Z1x PIFOC Objective Scanning System 100 µm

High Dynamics Piezo Drive for Subnanometer Resolution

Application fields

Subnanometer resolution with capacitive sensors

Maximum accuracy due to direct position measuring

Extensive software for rapid start of productive operation

Specifications

Datasheet PD72Z1x

Specifications

Downloads

Product Note

Product Change Notification P-72x

Product Change Notification Piezo Actuator Driven Products

Datasheet

Datasheet PD72Z1x

Documentation

Short Instructions PZ289

User Manual P721T0007

Installation Instructions P721T0002

Quote / Order

Fast PIFOC piezo nanofocusing system, 100 µm, capacitive sensor, M32 QuickLock thread adapter set with large aperture, digital controller with USB, RS-232

Fast PIFOC piezo nanofocusing system, 100 µm, capacitive sensor, M25 QuickLock adapter, digital controller with USB, RS-232

Fast PIFOC piezo nanofocusing system, 100 µm, capacitive sensor, digital controller with USB, RS-232

Fast PIFOC piezo nanofocusing system, 100 µm, strain gauge sensor, M32 QuickLock thread adapter set with large aperture, digital controller with USB, RS-232

Fast PIFOC piezo nanofocusing system, 100 µm, strain gauge sensor, M25 QuickLock adapter, digital controller with USB, RS-232

Fast PIFOC piezo nanofocusing system, 100 µm, strain gauge sensor, digital controller with USB, RS-232

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