PD72Z1x PIFOC Objective Scanning System 100 µm

Active axes

Z

Z

Motion and positioning

Integrated sensor

SGS

Capacitive

Travel range, closed loop

100

100

µm

Resolution, closed loop

5

1

nm

typ.

Linearity error, closed loop

0.2

0.06

%

typ.

Repeatability

±10

±5

nm

typ.

Tilt θ_X, θ_Y

13

13

µrad

typ.

Crosstalk in X, Y

100

100

nm

typ.

Settling time (0.5 µm step with 5 % accuracy, 150 g)

10

10

ms

typ.

Mechanical properties

Stiffness in motion direction

0.3

0.3

N/µm

±20 %

Resonant frequency, no load

580

580

Hz

±20 %

Resonant frequency, under load, 120 g

235

235

Hz

±20 %

Resonant frequency, under load, 200 g

180

180

Hz

±20 %

Push/pull force capacity in motion direction

100 / 20

100 / 20

N

max.

Drive properties

Piezo ceramic

PICMA® P-885

PICMA® P-885

Miscellaneous

Operating temperature range

10 to 50

10 to 50

°C

Material

Aluminum

Aluminum

Mass

0.22

0.24

kg

±5 %

Cable length

1

1

m

+50 mm / -0 mm

Piezo controller

E-709 (in the scope of delivery)

Communication interfaces

USB, RS-232, SPI

I/O connector

HD D-sub 26

1 analog input 0 to 10 V

1 sensor monitor 0 to 10 V

1 digital input (LVTTL, programmable)

1 analog output

5 digital outputs (LVTTL, 3 × predefined, 2 × programmable)

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Software drivers

NI LabVIEW drivers, shared libraries for Windows and Linux

Supported functions

Wave generator, data recorder, autozero, trigger I/O, MATLAB, MetaMorph, µManager

Controller dimensions

160 mm × 96 mm × 33 mm