- Travel range 100 µm
- Resolution to 0.2 nm
- Linearity error 0.2 %
- Compact: Surface 60 mm × 60 mm
- Particularly inexpensive systems (mechanics and controller)
- Zero-play, high-precision flexure guide system
- Outstanding lifetime due to PICMA® piezo actuators
- Test procedures and quality assurance
- Semiconductor technology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Product Change Notification Piezo Actuator Driven Products
User Manual PZ280
P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages
Short Instructions PZ240
Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
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