M-501 Precision Z Stage

Active axes

Z

Z

Travel range

12.5

12.5

mm

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

40960

2048

Cts./rev.

Design resolution

0.024

0.005

µm

Minimum incremental motion

<0.1

<0.1

µm

Unidirectional repeatability

0.1

0.1

µm

Pitch

±150

±150

µrad

Yaw

±150

±150

µrad

Velocity

3

1

mm/s

Max.

Reference switch repeatability

1

1

µm

Drive screw pitch

1

1

mm

Gear ratio

80/26 (belt drive)

80/26 (belt drive); (28/12)⁴:1 ~ 29.6:1 gearhead

Load capacity

50

100

N

Max.

Holding force

20

100

N

Max.

Motor type

DC motor with PWM control (ActiveDrive)

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

17

4

W

Reference and limit switches

Hall effect

Hall effect

Operating temperature range

10 to 50

-20 to 50

°C

Material

Anodized aluminum

Anodized aluminum

Mass

2.6

2.6

kg

±5 %

Recommended controllers / drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-863 (single axis)

C-884 (up to 6 axes)