- Travel ranges to 1000 mm
- Velocity to 800 mm/s
- Incremental encoder with 15 nm resolution
- 480 N peak force
Reference-class linear stage
High travel accuracy. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).
Multi-axis combinations with the directly driven rotation stages of the UPR series.
Versions with DC servo motors or stepper motors are available with the same footprint.
Magnetic direct drive
Ironless magnetic direct drive for high velocity and acceleration. High position resolution.
Industry and research. Metrology, precision scanning in in semiconductor or electronics manufacturing.
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