N-310 NEXACT® OEM Miniature Linear Motor / Actuator

Compact, Fast, with Long Travel Range, PiezoWalk® Principle

  • Travel range 10 to 125 mm, variable runner lengths
  • Compact in size, inexpensive design
  • Resolution to 0.03 nm
  • Push force up to 10 N
N-310 NEXACT® OEM Miniature Linear Motor / Actuator
Product Description Specifications Downloads Quote / Order

Application fields

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology

Nanometer precision and high feed force with PiezoWalk® walking drives

In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

 

Specifications

Datasheet

Datasheet N-310

Version / Date
2021-10-15
pdf - 573 KB
Version / Date
2021-10-15
pdf - 576 KB
Version / Date
2017-11-16
pdf - 748 KB

Downloads

Datasheet

Datasheet

Datasheet N-310

Version / Date
2021-10-15
pdf - 573 KB
Version / Date
2021-10-15
pdf - 576 KB
Version / Date
2017-11-16
pdf - 748 KB

Documentation

Documentation

User Manual N310T0012

N-310 NEXACT® OEM Miniature Linear Drive

Version / Date
2021-03-09
pdf - 896 KB
English

3-D Models

3-D Models

N-310 3-D model

zip - 341 KB

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