Surface Shaping
Smart Piezo Actuator and Drive Technologies for Active Surface Control
Applications of the future not only require the ability to move objects precisely, but also to change and correct the shape of surfaces. This calls for intelligent piezo system concepts. Our surface shaping technology enables active deformation of large solid plates with nanometer precision. Thanks to advanced control concepts, we achieve controlled surface profiles. Integrated high-resolution sensors, which can optionally be combined with external surface measurements, are used to calculate surface profiles and ensure precise generation or correction of long-wavelength deviations such as bowing and warpage. By superimposing Zernike modes and applying optimized actuation strategies, the system achieves deformations of up to 100 µm while maintaining high static forces. This approach allows for efficient targeted surface control and adaptable performance across a wide range of applications.
Flexible Actuator Design
Flexible Actuator Design
We offer a variety of actuator designs to meet the specific requirements of our customers in terms of installation space, stroke, force, and resolution. The designs are scalable from single-actuator solutions to large arrays with numerous actuators.
Flexible Operation
Flexible Operation
Combining dynamic, quasistatic, and mixed operations allows for the generation of various amplitudes with minimized positioning noise. These range from high-speed dynamic corrections to long-term stable deformations, all without the need for a continuous voltage supply.
Flexible Feature Size
Flexible Feature Size
By employing piezoceramic materials with a structured composition, we achieve exceptional operational flexibility and the ability to precisely shape even the smallest features.
Flexible Shaping
Variable configurations of actuators or actuator arrays enable different types of deformations with the highest resolution. Smart wiring, drive, and sensor concepts simplify the hardware environment.
We have created a hybrid solution with smart actuator arrays to meet our customers’ requirements of tomorrow.
Mathias Winter, Head of Piezo Drives & Systems Technology
Surface Shaping: Today’s Technology, Tomorrow’s Potential
Shaping the surfaces of optical components or substrates with high resolution enhances both imaging and manufacturing quality, particularly in laser processing applications or in highly sensitive semiconductor production. In collaboration with research institutes and industrial partners, our team of engineers successfully addresses the challenges of wiring, driving, and controlling large actuator arrays with the highest resolution.
Looking for a powerful, adaptable platform to master surface shaping? Talk to our engineers about your specific requirements.
Contact us now