PICMA® Chip Multilayer Actuators

Miniature Multilayer Piezo Actuators

Superior lifetime
Ultracompact: from 2 mm × 2 mm × 2 mm
Ideal for dynamic operation
Microsecond response time
Subnanometer resolution
UHV-compatible to 10^-9 hPa

PL0xx: Dimensions

On request, PICMA® Chip piezo actuators can be manufactured with an all-ceramic-insulated inner hole (left) or with precision-ground ceramic end plates (right).

Piezo linear actuator with PICMA

Operating voltage -20 to 100 V. Ceramic insulation, polymer-free. Insensitive to humidity. UHV-compatible to 10^-9 hPa, no outgassing, high bakeout temperature. Flexible thanks to numerous designs. Versions with square, round, or annular cross section.

Possible modifications

PTFE-insulated connecting wires. Various geometric shapes, inner hole. Precision-ground ceramic end plates.

Application fields

Industry and research. For laser tuning, microdispensing, life sciences.

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Datasheet

Versione / Data

2026-03-10

pdf - 2 MB

Versione / Data

2026-03-10

pdf - 2 MB

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	PL022.3x	PL033.3x	PL055.3x	PL088.3x	Unit	Tolerance
Side length (A)	2 ±0.10	3 ±0.10	5 ±0.15	10 ±0.20	mm
Side length (B)	2 ±0.10	3 ±0.10	5 ±0.15	10 ±0.20	mm
Height (TH)	2 ±0.10	2 ±0.10	2 ±0.10	2 ±0.10	mm
Travel range*	2.2	2.2	2.2	2.2	µm	±20 %
Blocking force**	>120	>300	>500	>2000	N
Electrical capacitance***	25	75	250	1100	nF	±20 %
Axial resonant frequency****	>600	>600	>600	>600	kHz
Piezoceramics	PIC252	PIC252	PIC252	PIC252
Operating voltage range	-20 to 100	-20 to 100	-20 to 100	-20 to 100	V
Operating temperature range	-40 to 150	-40 to 150	-40 to 150	-40 to 150	°C
Recommended preload for dynamic operation	15	15	15	15	MPa
Maximum preload for constant force	30	30	30	30	MPa
Recommended electronics	E-610, E-617, E-831	E-610, E-617, E-831	E-610, E-617, E-831	E-610, E-617, E-831

Standard connections: PL0xx.31: PTFE-insulated connecting wires, UHV-compatible, 100 mm, AWG 32, Ø 0.49 mm; PL0xx.30: solderable contacts

* At 0 to 100 V. The values refer to the unattached component and may be lower when glued on.

** At 0 to 100 V

*** Measured at 1 V, 1 kHz, RT

**** Measured at 1 V, unloaded, unclamped. The value is halved for unilateral clamping. Depending on the installation situation, the lateral resonant frequencies can be lower than the axial resonant frequencies.

Custom versions are available on request.

Scarica il datasheet Vai al download Vai alla quotazione / ordine

Datasheet

Versione / Data

2026-03-10

pdf - 2 MB

Versione / Data

2026-03-10

pdf - 2 MB

Download

Datasheet

Versione / Data

2025-08

pdf - 662 KB

Versione / Data

2025-08

pdf - 586 KB

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Documentation

PL022 / PL033 / PL055 / PL088 PICMA® Chip miniature multilayer piezo actuators; PD161 Round PICMA® Chip miniature multilayer piezo actuators; PD050 / PD080 / PD120 / PD150 / PD160 Round PICMA® Chip miniature multilayer piezo actuators with inner hole

Versione / Data

1.1.0 2021-09-27

pdf - 2 MB

Versione / Data

1.1.0 2021-09-27

pdf - 2 MB