P-561 • P-562 • P-563 PIMars Nanopositioning Stage

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Motion	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Active axes	X Y Z	X Y Z	X Y Z	X Y Z	X Y Z	X Y Z	X Y Z
Travel range in X	100 µm	100 µm	200 µm	200 µm	300 µm	300 µm	45 µm
Travel range in Y	100 µm	100 µm	200 µm	200 µm	300 µm	300 µm	45 µm
Travel range in Z	100 µm	100 µm	200 µm	200 µm	300 µm	300 µm	15 µm
Travel range in X, open loop, at -20 to 120 V	150 µm	150 µm	300 µm	300 µm	340 µm	340 µm	58 µm	+20 / -0 %
Travel range in Y, open loop, at -20 to +120 V	150 µm	150 µm	300 µm	300 µm	340 µm	340 µm	58 µm	+20 / -0 %
Travel range in Z, open loop, at -20 to 120 V	150 µm	150 µm	300 µm	300 µm	340 µm	340 µm	18 µm	+20 / -0 %
Linearity error in X	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	max.
Linearity error in Y	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	max.
Linearity error in Z	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.03 %	0.08 %	max.
Flatness (Linear crosstalk in X with motion in Z)	± 30 nm	± 30 nm	± 50 nm	± 50 nm	± 50 nm	± 50 nm	± 20 nm	typ.
Straightness (Linear crosstalk in Y with motion in Z)	± 30 nm	± 30 nm	± 50 nm	± 50 nm	± 50 nm	± 50 nm	± 20 nm	typ.
Flatness (Linear crosstalk in Z with motion in X)	± 15 nm	± 15 nm	± 20 nm	± 20 nm	± 25 nm	± 25 nm	± 10 nm	typ.
Flatness (Linear crosstalk in Z with motion in Y)	± 15 nm	± 15 nm	± 20 nm	± 20 nm	± 25 nm	± 25 nm	± 10 nm	typ.
Pitch (Rotational crosstalk in θX with motion in Y)	± 1 µrad	± 1 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 3 µrad	typ.
Yaw (Rotational crosstalk in θX with motion in Z)	± 15 µrad	± 15 µrad	± 20 µrad	± 20 µrad	± 25 µrad	± 25 µrad	± 3 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 1 µrad	± 1 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 2 µrad	± 3 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 15 µrad	± 15 µrad	± 20 µrad	± 20 µrad	± 25 µrad	± 25 µrad	± 3 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 6 µrad	± 6 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 3 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in Y)	± 6 µrad	± 6 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 3 µrad	typ.
Positioning	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Unidirectional repeatability in X	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	typ.
Unidirectional repeatability in Y	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	± 2 nm	typ.
Unidirectional repeatability in Z	± 2 nm	± 2 nm	± 4 nm	± 4 nm	± 4 nm	± 4 nm	± 2 nm	typ.
Resolution in X, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.1 nm	typ.
Resolution in Y, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.1 nm	typ.
Resolution in Z, open loop	0.2 nm	0.2 nm	0.4 nm	0.4 nm	0.5 nm	0.5 nm	0.1 nm	typ.
Integrated sensor	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring	Capacitive, indirect position measuring
System resolution in X	0.8 nm	0.8 nm	1 nm	1 nm	2 nm	2 nm	0.2 nm
System resolution in Y	0.8 nm	0.8 nm	1 nm	1 nm	2 nm	2 nm	0.2 nm
System resolution in Z	0.8 nm	0.8 nm	1 nm	1 nm	2 nm	2 nm	0.2 nm
Drive Properties	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in X	5.2 µF	5.2 µF	7.4 µF	7.4 µF	7.4 µF	7.4 µF	38 µF	±20 %
Electrical capacitance in Y	5.2 µF	5.2 µF	7.4 µF	7.4 µF	7.4 µF	7.4 µF	38 µF	±20 %
Electrical capacitance in Z	10.4 µF	10.4 µF	14.8 µF	14.8 µF	14.8 µF	14.8 µF	6 µF	±20 %
Mechanical Properties	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Resonant frequency in X, unloaded	190 Hz	190 Hz	160 Hz	160 Hz	140 Hz	140 Hz	920 Hz	±20 %
Resonant frequency in X, under load with 350 g	150 Hz	150 Hz	125 Hz	125 Hz	93 Hz	93 Hz	640 Hz	±20 %
Resonant frequency in Y, unloaded	190 Hz	190 Hz	160 Hz	160 Hz	140 Hz	140 Hz	920 Hz	±20 %
Resonant frequency in Y, under load with 350 g	150 Hz	150 Hz	125 Hz	125 Hz	93 Hz	93 Hz	640 Hz	±20 %
Resonant frequency in Z, unloaded	380 Hz	380 Hz	315 Hz	315 Hz	250 Hz	250 Hz	1050 Hz	±20 %
Resonant frequency in Z, under load with 350 g	260 Hz	260 Hz	211 Hz	211 Hz	148 Hz	148 Hz	695 Hz	±20 %
Permissible push force in X	60 N	60 N	50 N	50 N	40 N	40 N	200 N	max.
Permissible push force in Y	60 N	60 N	50 N	50 N	40 N	40 N	200 N	max.
Permissible push force in Z	100 N	100 N	60 N	60 N	30 N	30 N	250 N	max.
Permissible pull force in X	40 N	40 N	40 N	40 N	30 N	30 N	70 N	max.
Permissible pull force in Y	40 N	40 N	40 N	40 N	30 N	30 N	70 N	max.
Permissible pull force in Z	100 N	100 N	60 N	60 N	30 N	30 N	60 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with direct drive
Overall mass	1450 g	1450 g	1450 g	1450 g	1450 g	1450 g	1550 g	±5 %
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Resonant frequency in X, under load with 100 g			145 Hz	145 Hz	120 Hz	120 Hz	860 Hz	±20 %
Resonant frequency in Y, under load with 100 g			145 Hz	145 Hz	120 Hz	120 Hz	860 Hz	±20 %
Resonant frequency in Z, under load with 100 g			275 Hz	275 Hz	215 Hz	215 Hz	950 Hz	±20 %
Miscellaneous	P-561.3CD	P-561.3CL	P-562.3CD	P-562.3CL	P-563.3CD	P-563.3CL	P-561.3DD	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C	-20 to 80 °C
Connector	D-sub 25W3 (m)	LEMO LVPZT	D-sub 25W3 (m)	LEMO LVPZT	D-sub 25W3 (m)	LEMO LVPZT	D-sub 25W3 (m)
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	+50 / -0 mm
Recommended controllers / drivers	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727	E-503, E-505, E-621, E-712, E-727

Linearity error of P-561.3DD: With digital controller. Nonlinearity of direct drive positioners measured with analog controllers is typically up to 0.1 %.

Parallel kinematics only available for the X and Y axes (not in Z).

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

Super Invar and titanium versions available.

Ask about customized versions.

Product Note

Versione / Data

2021-04-19

pdf - 377 KB

inglese

Datasheet

Versione / Data

2023-12-11

pdf - 776 KB

Versione / Data

2023-12-11

pdf - 779 KB

Versione / Data

2018-06-20

pdf - 856 KB

Versione / Data

2018-07-02

pdf - 932 KB

Documentation

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Versione / Data

6.3.0 03/2025

pdf - 629 KB

Documentation

Unpacking and Packing P-5xx Positioners

Versione / Data

2019-03-04

pdf - 448 KB

inglese

Documentation

P-561, P-562, P-563 PIMars XYZ Nanopositioning Systems

Versione / Data

2.1.0 2023-11-20

pdf - 2 MB

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3D Models

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P-561.3CD

PIMars nanopositioning stage; 100 µm × 100 µm × 100 µm travel range (X × Y × Z), capacitive, indirect position measuring; D-sub 25W3 (m)

P-561.3CL

PIMars nanopositioning stage; 100 µm × 100 µm × 100 µm travel range (X × Y × Z), capacitive, indirect position measuring; LEMO LVPZT

P-562.3CD

PIMars nanopositioning stage; 200 µm × 200 µm × 200 µm travel range (X × Y × Z), capacitive, indirect position measuring; D-sub 25W3 (m)

P-562.3CL

PIMars nanopositioning stage; 200 µm × 200 µm × 200 µm travel range (X × Y × Z), capacitive, indirect position measuring; LEMO LVPZT

P-563.3CD

PIMars nanopositioning stage; 300 µm × 300 µm × 300 µm travel range (X × Y × Z), capacitive, indirect position measuring; D-sub 25W3 (m)

P-563.3CL

PIMars nanopositioning stage; 300 µm × 300 µm × 300 µm travel range (X × Y × Z), capacitive, indirect position measuring; LEMO LVPZT

P-561.3DD

PIMars nanopositioning stage; 45 µm × 45 µm × 15 µm travel range (X × Y × Z); capacitive, indirect position measuring; D-sub 25W3 (m); direct drive