P-562.6CD PIMars 6-Axis Nanopositioning Stage
High-Precision Nanopositioner with 6 Degrees of Freedom
- 6 motion axes: 3 × linear, 3 × rotational
- Travel ranges to 200 µm linear and to 1 mrad tip/tilt angle
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Highest linearity due to capacitive sensors
- Zero-play, high-precision flexure guide system
- Excellent scanning flatness
- Clear aperture 66 mm × 66 mm
- Outstanding lifetime due to PICMA® piezo actuators
- UHV-compatible to 10-9 hPa
Application fields
- Scanning microscopy
- Super-resolution microscopy
- Biotechnology
- Mask/wafer positioning
- Sample positioning
- Interferometry
- Metrology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High tracking accuracy in the nanometer range due to parallel position measuring
All degrees of freedom are measured against a single fixed reference. Undesired crosstalk between axes can be actively compensated (active guiding) in real time (depending on the bandwidth). High tracking accuracy is achieved in the nanometer range even in dynamic operation.
Suitable for sophisticated vacuum applications
All components used in the piezo systems are excellently suited for use in vacuum. No lubricant or grease is necessary for operating. Polymer-free piezo systems allow particularly low outgas rates.
Specifications
Specifications
P-562.6CD | Unit | Tolerance | |
---|---|---|---|
Active axes | X, Y, Z, θX, θY, θZ | ||
Motion and positioning | |||
Integrated sensor | Capacitive | ||
Travel range in X, Y, Z, closed loop | 200 | µm | |
Tip/tilt angle in θX, θY, θZ, closed loop | ±0.5 | mrad | |
Resolution in X, Y, Z, closed loop | 1 | nm | typ. |
Resolution in θX, θY, θZ, closed loop | 0.1 | µrad | typ. |
Linearity error in X, Y, Z | 0.01 | % | typ. |
Linearity error θX, θY, θZ | 0.1 | % | typ. |
Repeatability in X / Y / Z | ±2 / ±2 / ±3 | nm | typ. |
Repeatability θX / θY / θZ | ±0.1 / ±0.1 / ±0.15 | µrad | typ. |
Flatness | <15 | nm | typ. |
Mechanical properties | |||
Resonant frequency in X / Y / Z, no load | 110 / 110 / 190 | Hz | ±20 % |
Load capacity* | 5 | kg | max. |
Drive properties | |||
Ceramic type | PICMA® | ||
Electrical capacitance in X / Y / Z | 7.4 / 7.4 / 14.8 | µF | ±20 % |
Miscellaneous | |||
ID chip functionality | Yes | ||
Operating temperature range | -20 to 80 | °C | |
Material | Aluminum | ||
Mass | 1.45 | kg | ±5 % |
Cable length | 1.5 | m | ±10 mm |
Sensor/voltage connection | 2 × D-sub 25W3 (m) | ||
Recommended electronics | E-712 |
Downloads
Datasheet
Documentation
User Manual PZ297
P-562.6CD Nanopositioner
Technical Note P500T0002
Unpacking and Packing P-5xx Positioners
3-D Models
P-562.6CD 3-D model
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Vacuum
Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.

Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.

Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.