Vertical nanopositioning stage, 120 µm, without sensor
P-611.Z Piezo Z Stage
Compact Nanopositioner
- Compact: Surface only 44 mm × 44 mm
- Travel range 100 µm
- Resolution to 0.2 nm
- Particularly inexpensive systems (mechanics and controller)
- Zero-play, high-precision flexure guide system
- Outstanding lifetime due to PICMA® piezo actuators
- X, XY, XZ and XYZ versions
Application fields
- Micromachining
- Photonics
- Fiber positioning
- Test procedures and quality assurance
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.
Specifications
Specifications
Motion | P-611.Z0 | P-611.ZS | Tolerance |
---|---|---|---|
Active axes | Z | Z | |
Travel range in Z, open loop | 120 µm | 120 µm | ±20% |
Yaw (Rotational crosstalk in θX with motion in Z) | ± 20 µrad | ± 20 µrad | typ. |
Pitch (Rotational crosstalk in θY with motion in Z) | ± 5 µrad | ± 5 µrad | typ. |
Roll (Rotational crosstalk in θZ with motion in Z) | ± 5 µrad | ± 5 µrad | typ. |
Bandwidth, 10% step in Z | 40 Hz | 40 Hz | |
Travel range in Z | 100 µm | ||
Linearity error in Z | 0.1 % | typ. | |
Positioning | P-611.Z0 | P-611.ZS | Tolerance |
Resolution in Z, open loop | 0.2 nm | 0.2 nm | typ. |
Settling time for 10% step in Z | 25 ms | 25 ms | |
Integrated sensor | SGS, indirect position measuring | ||
System resolution in Z | 2 nm | ||
Bidirectional repeatability in Z | ± 5 nm | typ. | |
Drive Properties | P-611.Z0 | P-611.ZS | Tolerance |
Drive type | PICMA® | PICMA® | |
Electrical capacitance in Z | 1.5 µF | 1.5 µF | ±20% |
Mechanical Properties | P-611.Z0 | P-611.ZS | Tolerance |
Guide | Flexure guide with lever amplification | Flexure guide with lever amplification | |
Stiffness in Z | 0.45 N/µm | 0.45 N/µm | ±20 % |
Resonant frequency in Z, under load with 100 g | 265 Hz | 265 Hz | ±20% |
Resonant frequency in Z, under load with 30 g | 375 Hz | 375 Hz | ±20% |
Resonant frequency in Z, unloaded | 460 Hz | 460 Hz | ±20% |
Permissible push force in Z | 15 N | 15 N | max. |
Permissible pull force in Z | 10 N | 10 N | max. |
Overall mass | 176 g | 176 g | |
Material | Aluminum, steel | Aluminum, steel | |
P-611.Z0 | P-611.ZS | Tolerance | |
Connector | LEMO LVPZT | LEMO LVPZT | |
Recommended controllers / drivers | E-610, E-625, E-665, E-836 | E-610, E-625, E-665, E-709.SRG, E-836 | |
Cable length | 1.5 m | 1.5 m | |
Operating temperature range | -20 to 80 °C | -20 to 80 °C | |
Sensor connector | LEMO for strain gauge sensors |
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
All specifications based on room temperature (22 °C ±3 °C).
System properties
System configuration: P-611.ZS and E-665.SR controller with 30 g load
Downloads
Datasheet
Documentation
User Manual PZ253
P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor
Unpacking Instructions P611T0006
Unpacking and Handling of P-611 Positioners
3-D Models
P-611.Z 3-D model
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
Vertical nanopositioning stage, 100 µm, strain gauge sensor
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.