P-611.Z Piezo Z Stage

Compact Nanopositioner

Compact: Surface only 44 mm × 44 mm
Travel range 100 µm
Resolution to 0.2 nm
Particularly inexpensive systems (mechanics and controller)
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators
X, XY, XZ and XYZ versions

The P-611.ZS needs a settling time of 26 ms for a 10-µm step with a load of 30 g.

P-611.ZS, dimensions in mm

Application fields

Micromachining
Photonics
Fiber positioning
Test procedures and quality assurance

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Download datasheet specifications

Datasheet

Version / Date

2021-11-30

pdf - 528 KB

Version / Date

2021-11-30

pdf - 533 KB

Version / Date

2019-01-18

pdf - 718 KB

Version / Date

2019-01-18

pdf - 800 KB

Download

Motion	P-611.Z0	P-611.ZS	Tolerance
Active axes	Z	Z
Travel range in Z, open loop	120 µm	120 µm	±20%
Yaw (Rotational crosstalk in θX with motion in Z)	± 20 µrad	± 20 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 5 µrad	± 5 µrad	typ.
Roll (Rotational crosstalk in θZ with motion in Z)	± 5 µrad	± 5 µrad	typ.
Bandwidth, 10% step in Z	40 Hz	40 Hz
Travel range in Z		100 µm
Linearity error in Z		0.1 %	typ.
Positioning	P-611.Z0	P-611.ZS	Tolerance
Resolution in Z, open loop	0.2 nm	0.2 nm	typ.
Settling time for 10% step in Z	25 ms	25 ms
Integrated sensor		SGS, indirect position measuring
System resolution in Z		2 nm
Bidirectional repeatability in Z		± 5 nm	typ.
Drive Properties	P-611.Z0	P-611.ZS	Tolerance
Drive type	PICMA®	PICMA®
Electrical capacitance in Z	1.5 µF	1.5 µF	±20%
Mechanical Properties	P-611.Z0	P-611.ZS	Tolerance
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification
Stiffness in Z	0.45 N/µm	0.45 N/µm	±20 %
Resonant frequency in Z, under load with 100 g	265 Hz	265 Hz	±20%
Resonant frequency in Z, under load with 30 g	375 Hz	375 Hz	±20%
Resonant frequency in Z, unloaded	460 Hz	460 Hz	±20%
Permissible push force in Z	15 N	15 N	max.
Permissible pull force in Z	10 N	10 N	max.
Overall mass	176 g	176 g
Material	Aluminum, steel	Aluminum, steel
	P-611.Z0	P-611.ZS	Tolerance
Connector	LEMO LVPZT	LEMO LVPZT
Recommended controllers / drivers	E-610, E-625, E-665, E-836	E-610, E-625, E-665, E-709.SRG, E-836
Cable length	1.5 m	1.5 m
Operating temperature range	-20 to 80 °C	-20 to 80 °C
Sensor connector		LEMO for strain gauge sensors

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

System properties

System configuration: P-611.ZS and E-665.SR controller with 30 g load

Download datasheet downloads

Datasheet

Version / Date

2021-11-30

pdf - 528 KB

Version / Date

2021-11-30

pdf - 533 KB

Version / Date

2019-01-18

pdf - 718 KB

Version / Date

2019-01-18

pdf - 800 KB

Download

Documentation

P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor

Version / Date

1.2.1 2021-11-11

pdf - 3 MB

Version / Date

1.2.1 2021-11-11

pdf - 3 MB

Documentation

Unpacking and Handling of P-611 Positioners

Version / Date

2018-01-24

pdf - 768 KB

English

Documentation

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019

pdf - 1 MB

Version / Date

6.1.0 10/2019

pdf - 1 MB

Download

3-D Models

zip - 200 KB

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P-611.Z0

Vertical nanopositioning stage, 120 µm, without sensor

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P-611.ZS

Vertical nanopositioning stage, 100 µm, strain gauge sensor

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