P-611.Z Piezo Z Stage

P-611.Z Piezo Z Stage

Compact Nanopositioner

Compact: Surface only 44 mm × 44 mm
Travel range 100 µm
Resolution to 0.2 nm
Particularly inexpensive systems (mechanics and controller)
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators
X, XY, XZ and XYZ versions

The P-611.ZS needs a settling time of 26 ms for a 10-µm step with a load of 30 g.

P-611.ZS, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Application fields

Micromachining
Photonics
Fiber positioning
Test procedures and quality assurance

Outstanding lifetime thanks to PICMA^® piezo actuators

The PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Download datasheet specifications quote / order

Datasheet

Version / Date

2023-12-11

pdf - 529 KB

Version / Date

2023-12-11

pdf - 533 KB

Version / Date

2019-01-18

pdf - 718 KB

Version / Date

2019-01-18

pdf - 800 KB

Motion	P-611.Z0	P-611.ZS	Tolerance
Active axes	Z	Z
Travel range in Z, open loop	120 µm	120 µm	±20 %
Yaw (Rotational crosstalk in θX with motion in Z)	± 20 µrad	± 20 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 5 µrad	± 5 µrad	typ.
Roll (Rotational crosstalk in θZ with motion in Z)	± 5 µrad	± 5 µrad	typ.
Bandwidth, 10% step in Z	40 Hz	40 Hz
Travel range in Z		100 µm
Linearity error in Z		0.1 %	typ.
Positioning	P-611.Z0	P-611.ZS	Tolerance
Resolution in Z, open loop	0.2 nm	0.2 nm	typ.
Settling time for 10% step in Z	25 ms	25 ms
Bidirectional repeatability in Z		5 nm	typ.
Integrated sensor		SGS, indirect position measuring
System resolution in Z		2 nm
Drive Properties	P-611.Z0	P-611.ZS	Tolerance
Drive type	PICMA®	PICMA®
Electrical capacitance in Z	1.5 µF	1.5 µF	±20 %
Mechanical Properties	P-611.Z0	P-611.ZS	Tolerance
Stiffness in Z	0.45 N/µm	0.45 N/µm	±20 %
Resonant frequency in Z, unloaded	460 Hz	460 Hz	±20 %
Resonant frequency in Z, under load with 30 g	375 Hz	375 Hz	±20 %
Resonant frequency in Z, under load with 100 g	265 Hz	265 Hz	±20 %
Permissible push force in Z	15 N	15 N	max.
Permissible pull force in Z	10 N	10 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	176 g	176 g
Material	Aluminum, steel	Aluminum, steel
Miscellaneous	P-611.Z0	P-611.ZS	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C
Connector	LEMO FFS.00.250.CTCE24	LEMO FFS.00.250.CTCE24
Cable length	1.5 m	1.5 m
Recommended controllers / drivers	E-610, E-625, E-665, E-836	E-610, E-625, E-665, E-709.SRG, E-836
Sensor connector		LEMO FFA.0S.304.CLAC32

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

System properties

System configuration: P-611.ZS and E-665.SR controller with 30 g load

Download datasheet downloads quote / order

Datasheet

Version / Date

2023-12-11

pdf - 529 KB

Version / Date

2023-12-11

pdf - 533 KB

Version / Date

2019-01-18

pdf - 718 KB

Version / Date

2019-01-18

pdf - 800 KB

Documentation

P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor

Version / Date

1.2.2 2022-08-24

pdf - 3 MB

Version / Date

1.2.2 2022-08-24

pdf - 3 MB

Documentation

Unpacking and Handling of P-611 Positioners

Version / Date

2018-01-24

pdf - 768 KB

English

Documentation

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.3.0 03/2025

pdf - 629 KB

Version / Date

6.3.0 03/2025

pdf - 633 KB

3D Models

zip - 200 KB

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P-611.Z0

Piezo Z stage; 120 µm travel range (open loop); LEMO connector; 1.5 m cable length

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P-611.ZS

Piezo Z stage; 100 µm travel range; SGS, indirect position measuring; LEMO connectors; 1.5 m cable length

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