P-611.Z Piezo Z Stage

Compact Nanopositioner

P-611.Z Piezo Z Stage

Product Description Specifications Downloads Quote / Order

The P-611.ZS needs a settling time of 26 ms for one 10-µm step with a load of 30 g.

Compact: Surface only 44 mm × 44 mm
Travel range 100 µm
Resolution to 0.2 nm
Particularly inexpensive systems (mechanics and controller)
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators
X, XY, XZ and XYZ versions

Micromachining
Photonics
Fiber positioning
Test procedures and quality assurance

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

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Datasheet

Datasheet P-611.Z

Version / Date

2019-01-18

Version / Date

2019-01-18

Version / Date

2019-01-18

Version / Date

2019-01-18

Document language

pdf - 646 KB

pdf - 656 KB

pdf - 718 KB

pdf - 800 KB

	P-611.ZS	P-611.Z0	Unit	Tolerance
Active axes	Z	Z
Motion and positioning
Integrated sensor	SGS	-
Travel range at -20 to +120 V, open loop	120	120	µm	+20 % / -0 %
Travel range, closed loop	100	-	µm
Resolution, open loop	0.2	0.2	nm	typ.
Resolution, closed loop	2	-	nm	typ.
Linearity error	0.1	-	%	typ.
Repeatability	<10	-	nm	typ.
Tilt θ_Z (motion in Z)	±5	±5	µrad	typ.
Tilt θ_X (motion in Z)	±20	±20	µrad	typ.
Tilt θ_Y (motion in Z)	±5	±5	µrad	typ.
Mechanical properties
Stiffness	0.45	0.45	N/µm	±20 %
Resonant frequency, no load	460	460	Hz	±20 %
Resonant frequency under load, 30 g	375	375	Hz	±20 %
Resonant frequency under load, 100 g	265	265	Hz	±20 %
Push/pull force capacity	15 / 10	15 / 10	N	max.
Drive properties
Ceramic type	PICMA® P-885	PICMA® P-885
Electrical capacitance	1.5	1.5	µF	±20 %
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	°C
Material	Aluminum, steel	Aluminum, steel
Dimensions	44 mm × 44 mm × 27 mm	44 mm × 44 mm × 27 mm
Mass	176	176	g	±5 %
Cable length	1.5	1.5	m	±10 mm
Sensor connection	LEMO	-
Voltage connection	LEMO	LEMO
Recommended electronics	E-610, E-625, E-665, E-836	E-610, E-625, E-665, E-836

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

System properties

System configuration: P-611.ZS and E-665.SR controller with 30 g load

Small signal bandwidth: 40 Hz

Settling time (10 % step width): 25 ms

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Datasheet

Datasheet P-611.Z

Version / Date

2019-01-18

Version / Date

2019-01-18

Version / Date

2019-01-18

Version / Date

2019-01-18

Document language

pdf - 646 KB

pdf - 656 KB

pdf - 718 KB

pdf - 800 KB

Documentation

User Manual PZ253

P-611 Nanopositioning Systems with Strain Gauge Sensors / without Sensor

Version / Date

1.2.0 2021-04-13

Version / Date

1.2.0 2021-04-13

Document language

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Documentation

Unpacking Instructions P611T0006

Unpacking and Handling of P-611 Positioners

Version / Date

2018-01-24

Document language English

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Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019

Version / Date

6.1.0 10/2019

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

3-D Models

P-611.Z 3-D model

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P-611.Z0

Vertical nanopositioning stage, 120 µm, without sensor

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P-611.ZS

Vertical nanopositioning stage, 100 µm, strain gauge sensor

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