L-306 Compact Precision Z Stage

Compact Design, Multi-Axis Combinations

Compact design: Surface 63 mm × 63 mm
Stepper motors and closed-loop DC motors
Optional: Linear encoder for direct position measuring
Crossed roller guides
Noncontact reference and limit switches

L-306.011100

L-306, dimensions in mm

Z stage with compact size due to folded drive with belt drive. Fits onto linear stages with M6 50 mm × 50 mm connection spacing (e.g., L-406).

2-phase stepper motor or closed-loop DC motor
Backlash-compensated ball screws

Incremental linear encoder (optional with stepper motor variants)
Noncontact optical reference and limit switches

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Research. Semiconductor technology. Photonics. Automation.

Download datasheet Go to specifications

Datasheet

Version / Date

2020-03-23

pdf - 615 KB

Version / Date

2020-03-23

pdf - 617 KB

Version / Date

2021-01-19

pdf - 434 KB

Version / Date

2019-10-17

pdf - 782 KB

Download

	L-306.011100	L-306.011112	L-306.013112	Unit	Tolerance
	Z stage with 2-phase stepper motor	Z stage with 2-phase stepper motor, linear encoder with A/B quadrature signal transmission	Z stage with DC motor, linear encoder with A/B quadrature signal transmission
Motion and positioning
Travel range	13	13	13	mm
Integrated sensor	–	Incremental linear encoder	Incremental linear encoder
Sensor resolution	–	5	50	Nm
Design resolution	2.5	0.005	0.05	µm
Minimum incremental motion	2.5	0.1	0.1	µm	Typ.
Unidirectional repeatability	0.5	0.1	0.1	µm	Typ.
Bidirectional repeatability	±2	±0.5	±0.5	µm	Typ.
Pitch	±175	±175	±175	µrad	Typ.
Yaw	±150	±150	±150	µrad	Typ.
Straightness / flatness	±3	±3	±3	µm	Typ.
Velocity	5	5	5	mm/s	Max.
Reference and limit switches	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, NPN	Forked photoelectric sensor, N/C contact, 5V, NPN
Mechanical properties
Guide type	Crossed roller guide with anti-creep system	Crossed roller guide with anti-creep system	Crossed roller guide with anti-creep system
Drive screw type	Ball screw	Ball screw	Ball screw
Drive screw pitch	0.5	0.5	0.5	mm
Push/pull force	20	20	20	N	Max.
Holding force, power off	20	20	20	N	Typ.
Permissible lateral force	10	10	10	N	Max.
Load capacity	20	20	20	N	Max.
Permissible torque in θ_X, θ_Y	1	1	1	N·m	Max.
Permissible torque in θ_Z	2	2	2	N·m	Max.
Drive properties
Motor type	2-phase stepper motor	2-phase stepper motor	DC motor
Miscellaneous
Operating temperature range	5 to 40	5 to 40	5 to 40	°C
Humidity	20 to 80% rel., not condensing	20 to 80% rel., not condensing	20 to 80% rel., not condensing
Material	Anodized aluminum, steel	Anodized aluminum, steel	Anodized aluminum, steel
Mass	0.6	0.6	0.6	kg	±5 %
Moved mass	0.18	0.18	0.18	kg	±5 %
Connector	HD D-sub 26 (m) (motor)	HD D-sub 26 (m) (motor and encoder)	HD D-sub 26 (m) (motor and encoder)
Cable length	0.5	0.5	0.5	m
Recommended controllers	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller	C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller

Download datasheet Go to download

Datasheet

Version / Date

2020-03-23

pdf - 615 KB

Version / Date

2020-03-23

pdf - 617 KB

Version / Date

2021-01-19

pdf - 434 KB

Version / Date

2019-10-17

pdf - 782 KB

Download

Documentation

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020

pdf - 736 KB

Version / Date

2.0.0 01/2020

pdf - 749 KB

Download

Documentation

Compact Z positioner L-306.011100 / 011112 / 013112

Version / Date

2020-11-11

pdf - 819 KB

Version / Date

2020-11-11

pdf - 865 KB

3-D Models

zip - 2 MB

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Separate connection cable required for motor and sensor connection respectively.

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L-306.011100

Compact Precision Z stage, 13 mm travel range, 20 N load capacity, stepper motor

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L-306.011112

Compact Precision Z stage, 13 mm travel range, 20 N load capacity, stepper motor, linear encoder with A/B quadrature signal transmission, 5 nm sensor resolution

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L-306.013112

Compact Precision Z stage, 13 mm travel range, 20 N load capacity, DC motor, linear encoder with A/B quadrature signal transmission, 50 nm sensor resolution

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