L-306 Compact Precision Z Stage
Compact Design, Multi-Axis Combinations
- Compact design: Surface 63 mm × 63 mm
- Stepper motors and closed-loop DC motors
- Optional: Linear encoder for direct position measuring
- Crossed roller guides
- Noncontact reference and limit switches
Compact Z stage, versatile in use
Z stage with compact size due to folded drive with belt drive. Fits onto linear stages with M6 50 mm × 50 mm connection spacing (e.g., L-406).
Drive
- 2-phase stepper motor or closed-loop DC motor
- Backlash-compensated ball screws
Position measuring
- Incremental linear encoder (optional with stepper motor variants)
- Noncontact optical reference and limit switches
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.
Application fields
Research. Semiconductor technology. Photonics. Automation.
Specifications
Specifications
L-306.011100 | L-306.011112 | L-306.013112 | Unit | Tolerance | |
---|---|---|---|---|---|
Z stage with 2-phase stepper motor | Z stage with 2-phase stepper motor, linear encoder with A/B quadrature signal transmission | Z stage with DC motor, linear encoder with A/B quadrature signal transmission | |||
Motion and positioning | |||||
Travel range | 13 | 13 | 13 | mm | |
Integrated sensor | – | Incremental linear encoder | Incremental linear encoder | ||
Sensor resolution | – | 5 | 50 | Nm | |
Design resolution | 2.5 | 0.005 | 0.05 | µm | |
Minimum incremental motion | 2.5 | 0.1 | 0.1 | µm | Typ. |
Unidirectional repeatability | 0.5 | 0.1 | 0.1 | µm | Typ. |
Bidirectional repeatability | ±2 | ±0.5 | ±0.5 | µm | Typ. |
Pitch | ±175 | ±175 | ±175 | µrad | Typ. |
Yaw | ±150 | ±150 | ±150 | µrad | Typ. |
Straightness / flatness | ±3 | ±3 | ±3 | µm | Typ. |
Velocity | 5 | 5 | 5 | mm/s | Max. |
Reference and limit switches | Forked photoelectric sensor, N/C contact, 5V, NPN | Forked photoelectric sensor, N/C contact, 5V, NPN | Forked photoelectric sensor, N/C contact, 5V, NPN | ||
Mechanical properties | |||||
Guide type | Crossed roller guide with anti-creep system | Crossed roller guide with anti-creep system | Crossed roller guide with anti-creep system | ||
Drive screw type | Ball screw | Ball screw | Ball screw | ||
Drive screw pitch | 0.5 | 0.5 | 0.5 | mm | |
Push/pull force | 20 | 20 | 20 | N | Max. |
Holding force, power off | 20 | 20 | 20 | N | Typ. |
Permissible lateral force | 10 | 10 | 10 | N | Max. |
Load capacity | 20 | 20 | 20 | N | Max. |
Permissible torque in θX, θY | 1 | 1 | 1 | N·m | Max. |
Permissible torque in θZ | 2 | 2 | 2 | N·m | Max. |
Drive properties | |||||
Motor type | 2-phase stepper motor | 2-phase stepper motor | DC motor | ||
Miscellaneous | |||||
Operating temperature range | 5 to 40 | 5 to 40 | 5 to 40 | °C | |
Humidity | 20 to 80% rel., not condensing | 20 to 80% rel., not condensing | 20 to 80% rel., not condensing | ||
Material | Anodized aluminum, steel | Anodized aluminum, steel | Anodized aluminum, steel | ||
Mass | 0.6 | 0.6 | 0.6 | kg | ±5 % |
Moved mass | 0.18 | 0.18 | 0.18 | kg | ±5 % |
Connector | HD D-sub 26 (m) (motor) | HD D-sub 26 (m) (motor and encoder) | HD D-sub 26 (m) (motor and encoder) | ||
Cable length | 0.5 | 0.5 | 0.5 | m | |
Recommended controllers | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller | C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller |
Downloads
Datasheet
Documentation
User Manual L306T0002
Compact Z positioner L-306.011100 / 011112 / 013112
3-D Models
L-306 3-D model
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