P-602.100
PiezoMove OEM linear actuator with high stiffness, 100 µm, open loop
P-602 PiezoMove High-Stiffness Linear Piezo Actuator
With Guide for Travel Ranges to 1 mm
- Flexure guides for linear motion with minimum tip and tilt
- Travel ranges to 1 mm
- Forces to 100 N
- Stiff and backlash-free construction
- Available with integrated position sensors
- Outstanding lifetime due to PICMA® piezo actuators
- Ideal OEM actuator for force generation in adaptive systems technology, for nanoimprint processes or machine tools
- Customized versions with longer travel range, shorter response time or nonmagnetic
P-602, dimensions in mm
Low tilt and no displacement at the output
P-602 PiezoMove High-Stiffness Linear Piezo Actuator
Product Description
Specifications
Downloads
Quote / Order
Application fields
- Nanopositioning
- High-speed switching
- Patch clamp
- Microdispensing
- Adaptive systems technology / automation
- Photonics / integrated optics
- Biotechnology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Specifications
Specifications
P-602.100 / P-602.1S0 / P-602.1SL | P-602.300 / P-602.3S0 / P-602.3SL | P-602.500 / P-602.5S0 / P-602.5SL | P-602.108 / P-602.1S8 / P-602.1L8 | P-602.308 / P-602.3S8 / P-602.3L8 | P-602.508 / P-602.5S8 / P-602.5L8 | P-602.800 / P-602.8S0 / P-602.8SL | Unit | |
|---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | X | |
Motion and positioning | ||||||||
Integrated sensor | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | |
Travel range at -20 to 120 V, open loop | 120 | 300 | 600 | 100 | 300 | 500 | 1000 | µm |
Travel range, closed loop | – / 100 / 100 | – / 300 / 300 | – / 500 / 500 | – / 100 / 100 | – / 300 / 300 | – / 500 / 500 | – / 1000 / 1000 | µm |
Resolution, open loop | 0.2 | 0.3 | 0.4 | 0.2 | 0.3 | 0.4 | 0.5 | nm |
Resolution, closed loop | – / 2 / 2 | – / 3 / 3 | – / 3 / 3 | – / 2 / 2 | – / 3 / 3 | – / 3 / 3 | – / 7 / 7 | nm |
Linearity error, closed loop | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 1.5 / 1.5 | % |
Repeatability | – / 10 / 10 | – / 20 / 20 | – / 35 / 35 | – / 10 / 10 | – / 20 / 20 | – / 35 / 35 | – / 60 / 60 | nm |
Mechanical properties | ||||||||
Stiffness in motion direction | 0.75 | 0.25 | 0.2 | 2.3 | 0.75 | 0.65 | 0.4 | N/µm |
Resonant frequency, no load | 1000 | 450 | 230 | 1100 | 480 | 240 | 150 | Hz |
Push force capacity in motion direction | 70 | 70 | 70 | 100 | 100 | 100 | 100 | N |
Pull force capacity in motion direction | 5 | 5 | 5 | 5 | 5 | 5 | 5 | N |
Drive properties | ||||||||
Piezo ceramic | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-888 | PICMA® P-888 | PICMA® P-888 | PICMA® P-888 | |
Electrical capacitance | 1.5 | 3.1 | 6.2 | 6 | 13 | 26 | 39 | µF |
Miscellaneous | ||||||||
Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | °C |
Material | Stainless steel | Stainless steel | Stainless steel | Stainless steel | Stainless steel | Stainless steel | Stainless steel | |
Dimensions | 28 mm × 17 mm × 9 mm | 46 mm × 19 mm × 9 mm | 85 mm × 26 mm × 9 mm | 28 mm × 22 mm× 14 mm | 46 mm × 24 mm × 14 mm | 85 mm × 31 mm × 14 mm | 126 mm × 34 mm × 14 mm | |
Mass | 0.02 | 0.04 | 0.105 | 0.05 | 0.088 | 0.215 | 0.355 | kg |
Cable length | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | m |
Power / sensor connector | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | |
Recommended electronics | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 |
The resolution of the system is only limited by the noise of the amplifier and measuring technology because PI piezo actuators are free of friction.
All specifications based on room temperature (22 °C ±3 °C).
Downloads
Product Note
Product Note
Product Change Notification Piezo Actuator Driven Products
Version / Date
2021-04-19
pdf - 377 KB
English
Datasheet
Documentation
Documentation
User Manual P602T0001
P-602 PiezoMove High-Stiffness Linear Piezo Actuator
Version / Date
2019-11-21
pdf - 962 KB
English
3-D Models
3-D Models
P-602 3-D model
zip - 2 MB
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.
P-602.1S0
PiezoMove OEM linear actuator with high stiffness, 100 µm, strain gauge sensor
P-602.1SL
PiezoMove OEM linear actuator with high stiffness, 100 µm, strain gauge sensor, LEMO connectors
P-602.108
PiezoMove OEM linear actuator with high force, 100 µm, open loop
P-602.1S8
PiezoMove OEM linear actuator with high force, 100 µm, strain gauge sensor
P-602.1L8
PiezoMove OEM linear actuator with high force, 100 µm, strain gauge sensor, LEMO connectors
P-602.300
PiezoMove OEM linear actuator with high stiffness, 300 µm, open loop
P-602.3S0
PiezoMove OEM linear actuator with high stiffness, 300 µm, strain gauge sensor
P-602.3SL
PiezoMove OEM linear actuator with high stiffness, 300 µm, strain gauge sensor, LEMO connectors
P-602.308
PiezoMove OEM linear actuator with high force, 300 µm, open loop
P-602.3S8
PiezoMove OEM linear actuator with high force, 300 µm, strain gauge sensor
P-602.3L8
PiezoMove OEM linear actuator with high force, 300 µm, strain gauge sensor, LEMO connectors
P-602.500
PiezoMove OEM linear actuator with high stiffness, 500 µm, open loop
P-602.5S0
PiezoMove OEM linear actuator with high stiffness, 500 µm, strain gauge sensor
P-602.5SL
PiezoMove OEM linear actuator with high stiffness, 500 µm, strain gauge sensor, LEMO connectors
P-602.508
PiezoMove OEM linear actuator with high force, 500 µm, open loop
P-602.5S8
PiezoMove OEM linear actuator with high force, 500 µm, strain gauge sensor
P-602.5L8
PiezoMove OEM linear actuator with high force, 500 µm, strain gauge sensor, LEMO connectors
P-602.800
PiezoMove OEM linear actuator with high stiffness, 1000 µm, open loop
P-602.8S0
PiezoMove OEM linear actuator with high stiffness, 1000 µm, strain gauge sensor
P-602.8SL
PiezoMove OEM linear actuator with high stiffness, 1000 µm, strain gauge sensor, LEMO connectors
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Technology
PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.