P-602 PiezoMove High-Stiffness Linear Piezo Actuator

With Guide for Travel Ranges to 1 mm

P-602 PiezoMove High-Stiffness Linear Piezo Actuator

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Low tilt and no displacement at the output

Flexure guides for linear motion with minimum tip and tilt
Travel ranges to 1 mm
Forces to 100 N
Stiff and backlash-free construction
Available with integrated position sensors
Outstanding lifetime due to PICMA® piezo actuators
Ideal OEM actuator for force generation in adaptive systems technology, for nanoimprint processes or machine tools
Customized versions with longer travel range, shorter response time or nonmagnetic

Nanopositioning
High-speed switching
Patch clamp
Microdispensing
Adaptive systems technology / automation
Photonics / integrated optics
Biotechnology

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

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Datasheet

Datasheet P-602

Version / Date

2019-10-23

Version / Date

2019-10-23

Document language

Download

pdf - 453 KB

Download

pdf - 452 KB

	P-602.100 / P-602.1S0 / P-602.1SL	P-602.300 / P-602.3S0 / P-602.3SL	P-602.500 / P-602.5S0 / P-602.5SL	P-602.108 / P-602.1S8 / P-602.1L8	P-602.308 / P-602.3S8 / P-602.3L8	P-602.508 / P-602.5S8 / P-602.5L8	P-602.800 / P-602.8S0 / P-602.8SL	Unit
Active axes	X	X	X	X	X	X	X
Motion and positioning
Integrated sensor	– / SGS / SGS	– / SGS / SGS	– / SGS / SGS	– / SGS / SGS	– / SGS / SGS	– / SGS / SGS	– / SGS / SGS
Travel range at -20 to 120 V, open loop	120	300	600	100	300	500	1000	µm
Travel range, closed loop	– / 100 / 100	– / 300 / 300	– / 500 / 500	– / 100 / 100	– / 300 / 300	– / 500 / 500	– / 1000 / 1000	µm
Resolution, open loop	0.2	0.3	0.4	0.2	0.3	0.4	0.5	nm
Resolution, closed loop	– / 2 / 2	– / 3 / 3	– / 3 / 3	– / 2 / 2	– / 3 / 3	– / 3 / 3	– / 7 / 7	nm
Linearity error, closed loop	– / 0.5 / 0.5	– / 0.5 / 0.5	– / 0.5 / 0.5	– / 0.5 / 0.5	– / 0.5 / 0.5	– / 0.5 / 0.5	– / 1.5 / 1.5	%
Repeatability	– / 10 / 10	– / 20 / 20	– / 35 / 35	– / 10 / 10	– / 20 / 20	– / 35 / 35	– / 60 / 60	nm
Mechanical properties
Stiffness in motion direction	0.75	0.25	0.2	2.3	0.75	0.65	0.4	N/µm
Resonant frequency, no load	1000	450	230	1100	480	240	150	Hz
Push force capacity in motion direction	70	70	70	100	100	100	100	N
Pull force capacity in motion direction	5	5	5	5	5	5	5	N
Drive properties
Piezo ceramic	PICMA® P-885	PICMA® P-885	PICMA® P-885	PICMA® P-888	PICMA® P-888	PICMA® P-888	PICMA® P-888
Electrical capacitance	1.5	3.1	6.2	6	13	26	39	µF
Miscellaneous
Operating temperature range	-20 to 80	-20 to 80	-20 to 80	-20 to 80	-20 to 80	-20 to 80	-20 to 80	°C
Material	Stainless steel	Stainless steel	Stainless steel	Stainless steel	Stainless steel	Stainless steel	Stainless steel
Dimensions	28 mm × 17 mm × 9 mm	46 mm × 19 mm × 9 mm	85 mm × 26 mm × 9 mm	28 mm × 22 mm× 14 mm	46 mm × 24 mm × 14 mm	85 mm × 31 mm × 14 mm	126 mm × 34 mm × 14 mm
Mass	0.02	0.04	0.105	0.05	0.088	0.215	0.355	kg
Cable length	0.5 / 0.5 / 2	0.5 / 0.5 / 2	0.5 / 0.5 / 2	0.5 / 0.5 / 2	0.5 / 0.5 / 2	0.5 / 0.5 / 2	0.5 / 0.5 / 2	m
Power / sensor connector	Bare stranded wires / bare stranded wires / LEMO	Bare stranded wires / bare stranded wires / LEMO	Bare stranded wires / bare stranded wires / LEMO	Bare stranded wires / bare stranded wires / LEMO	Bare stranded wires / bare stranded wires / LEMO	Bare stranded wires / bare stranded wires / LEMO	Bare stranded wires / bare stranded wires / LEMO
Recommended electronics	E-610, E-625, E-831	E-610, E-625, E-831	E-610, E-625, E-831	E-610, E-625, E-831	E-610, E-625, E-831	E-610, E-625, E-831	E-610, E-625, E-831

The resolution of the system is only limited by the noise of the amplifier and measuring technology because PI piezo actuators are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

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Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date

2021-04-19

Document language English

Download

pdf - 377 KB

Datasheet

Datasheet P-602

Version / Date

2019-10-23

Version / Date

2019-10-23

Document language

Download

pdf - 453 KB

Download

pdf - 452 KB

Documentation

Short Instructions PZ302

PiezoMove® Linear Actuators: P-60x

Version / Date

1.0.0 / 2019-11-21

Version / Date

1.0.0 / 2019-11-21

Document language

Download

pdf - 1 MB

Download

pdf - 1 MB

Documentation

User Manual P602T0001

P-602 PiezoMove High-Stiffness Linear Piezo Actuator

Version / Date

2019-11-21

Document language English

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3-D Models

P-602 3-D model

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Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

P-602.100

PiezoMove OEM linear actuator with high stiffness, 100 µm, open loop

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P-602.1S0

PiezoMove OEM linear actuator with high stiffness, 100 µm, strain gauge sensor

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P-602.1SL

PiezoMove OEM linear actuator with high stiffness, 100 µm, strain gauge sensor, LEMO connectors

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P-602.108

PiezoMove OEM linear actuator with high force, 100 µm, open loop