P-602 PiezoMove High-Stiffness Linear Piezo Actuator
With Guide for Travel Ranges to 1 mm
- Flexure guides for linear motion with minimum tip and tilt
- Travel ranges to 1 mm
- Forces to 100 N
- Stiff and backlash-free construction
- Available with integrated position sensors
- Outstanding lifetime due to PICMA® piezo actuators
- Ideal OEM actuator for force generation in adaptive systems technology, for nanoimprint processes or machine tools
- Customized versions with longer travel range, shorter response time or nonmagnetic
Application fields
- Nanopositioning
- High-speed switching
- Patch clamp
- Microdispensing
- Adaptive systems technology / automation
- Photonics / integrated optics
- Biotechnology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Specifications
Specifications
P-602.100 / P-602.1S0 / P-602.1SL | P-602.300 / P-602.3S0 / P-602.3SL | P-602.500 / P-602.5S0 / P-602.5SL | P-602.108 / P-602.1S8 / P-602.1L8 | P-602.308 / P-602.3S8 / P-602.3L8 | P-602.508 / P-602.5S8 / P-602.5L8 | P-602.800 / P-602.8S0 / P-602.8SL | Unit | |
---|---|---|---|---|---|---|---|---|
Active axes | X | X | X | X | X | X | X | |
Motion and positioning | ||||||||
Integrated sensor | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | – / SGS / SGS | |
Travel range at -20 to 120 V, open loop | 120 | 300 | 600 | 100 | 300 | 500 | 1000 | µm |
Travel range, closed loop | – / 100 / 100 | – / 300 / 300 | – / 500 / 500 | – / 100 / 100 | – / 300 / 300 | – / 500 / 500 | – / 1000 / 1000 | µm |
Resolution, open loop | 0.2 | 0.3 | 0.4 | 0.2 | 0.3 | 0.4 | 0.5 | nm |
Resolution, closed loop | – / 2 / 2 | – / 3 / 3 | – / 3 / 3 | – / 2 / 2 | – / 3 / 3 | – / 3 / 3 | – / 7 / 7 | nm |
Linearity error, closed loop | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 0.5 / 0.5 | – / 1.5 / 1.5 | % |
Repeatability | – / 10 / 10 | – / 20 / 20 | – / 35 / 35 | – / 10 / 10 | – / 20 / 20 | – / 35 / 35 | – / 60 / 60 | nm |
Mechanical properties | ||||||||
Stiffness in motion direction | 0.75 | 0.25 | 0.2 | 2.3 | 0.75 | 0.65 | 0.4 | N/µm |
Resonant frequency, no load | 1000 | 450 | 230 | 1100 | 480 | 240 | 150 | Hz |
Push force capacity in motion direction | 70 | 70 | 70 | 100 | 100 | 100 | 100 | N |
Pull force capacity in motion direction | 5 | 5 | 5 | 5 | 5 | 5 | 5 | N |
Drive properties | ||||||||
Piezo ceramic | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-888 | PICMA® P-888 | PICMA® P-888 | PICMA® P-888 | |
Electrical capacitance | 1.5 | 3.1 | 6.2 | 6 | 13 | 26 | 39 | µF |
Miscellaneous | ||||||||
Operating temperature range | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | -20 to 80 | °C |
Material | Stainless steel | Stainless steel | Stainless steel | Stainless steel | Stainless steel | Stainless steel | Stainless steel | |
Dimensions | 28 mm × 17 mm × 9 mm | 46 mm × 19 mm × 9 mm | 85 mm × 26 mm × 9 mm | 28 mm × 22 mm× 14 mm | 46 mm × 24 mm × 14 mm | 85 mm × 31 mm × 14 mm | 126 mm × 34 mm × 14 mm | |
Mass | 0.02 | 0.04 | 0.105 | 0.05 | 0.088 | 0.215 | 0.355 | kg |
Cable length | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | 0.5 / 0.5 / 2 | m |
Power / sensor connector | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | Bare stranded wires / bare stranded wires / LEMO | |
Recommended electronics | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 | E-610, E-625, E-831 |
Downloads
Product Note
Product Change Notification Piezo Actuator Driven Products
Datasheet
Documentation
User Manual P602T0001
P-602 PiezoMove High-Stiffness Linear Piezo Actuator
3-D Models
P-602 3-D model
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.