PI miCos designed and delivered the XYZ stage which was made from granite to ensure evenness and long-term stability as well as decoupling from environmental influences like vibrations. It provides 2000 mm × 1000 mm × 100 mm linear displacement while the overall position deviation is better than 14 micrometers. The allowed pitch error was limited to 50 µrad over the full stroke of 2000 mm. Position repeatability if accessed from arbitrary directions is ±1 µm. On-site commissioning and start-up operation were done by PI miCos.