M-971 Motorized OEM XY Stage
Low Price with High Quantities
- XY stage for the price-sensitive applications
- Precise stepper motors
- Crossed roller guides
- Limit and reference switches (Hall effect)
XY stage for the price-sensitive OEM market
The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to meet the requirements of price-sensitive OEM markets. Proven and cost-optimized components form its basis:
- The design of the guides which includes several short crossed roller guides distributes the load evenly over a large surface and ensures high stiffness and good travel accuracy.
- The drivetrain is based on a widely used linear stage from PI. Its reliability and long lifetime have been proven in use for years.
- By using stepper motors, encoders can be dispensed with and a simple stepper motor controller can be used. The XY stage is equipped with limit and reference switches to ensure fast and precise referencing and safety during operation.
Specifications
Specifications
Motion and positioning | Unit | Tolerance | M-971.01 |
---|---|---|---|
Active axes | X, Y | ||
Travel range in X | mm | 50 | |
Travel range in Y | mm | 25 | |
System resolution in X | nm | 2.5 | |
System resolution in Y | nm | 2.5 | |
Minimum incremental motion in X | µm | Typ. | 0.2 |
Minimum incremental motion in Y | µm | Typ. | 0.2 |
Unidirectional repeatability in X | µm | Typ. | 1 |
Unidirectional repeatability in Y | µm | Typ. | 1 |
Backlash in X | µm | Typ. | 6 |
Backlash in Y | µm | Typ. | 6 |
Velocity in X | mm/s | Max. | 10 |
Velocity in Y | mm/s | Max. | 10 |
Reference switch | Hall effect | ||
Reference switch repeatability | µm | Typ. | 1 |
Limit switches | Hall effect | ||
Rotational crosstalk in θY with motion in X | µrad | Typ. | ±50 |
Rotational crosstalk in θZ with motion in X | µrad | Typ. | ±50 |
Rotational crosstalk in θX with motion in Y | µrad | Typ. | ±50 |
Rotational crosstalk in θZ with motion in Y | µrad | Typ. | ±50 |
Quote / Order
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Please note, this product is only available in quantities of 100 or more. For customer-specific adaptations, please contact PI.
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