LMS-180 Precision Linear Stage

This product has been replaced by the following new product: Stages with Magnetic Direct-Drive Linear Motor

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

Travel range 305 mm (12")
Velocity to 500 mm/s
Incremental encoder with 15 nm resolution

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Direction of the axes and torques for linear stages

68509131, dimensions in mm

Reference-class linear stage

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp). Multi-axis combinations with the directly driven rotation stages of the UPR series. Models with DC servo or stepper motors are available with the same footprint.

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Application fields

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

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Select a travel range:

Motion	68509131	Tolerance
Active axes	X
Travel range in X	305 mm
Maximum velocity in X, unloaded	500 mm/s
Straightness error in Y (straightness)	± 4 µm	typ.
Straightness error in Z (flatness)	± 4 µm	typ.
Angular error around Y (pitch)	± 60 µrad	typ.
Angular error around Z (yaw)	± 50 µrad	typ.
Positioning	68509131	Tolerance
Minimum incremental motion in X	0.04 µm	typ.
Unidirectional repeatability in X	± 0.025 µm	typ.
Bidirectional repeatability in X	0.3 µm	typ.
Reference switch	Encoder index
Limit switches	Inductive
Integrated sensor	Incremental linear encoder
Sensor signal	Sin/cos, 1 V peak-peak
Sensor resolution	15 nm
Drive Properties	68509131	Tolerance
Drive type	Ironless 3-phase linear motor
Nominal voltage	48 V
Nominal current, RMS	3.2 A	typ.
Peak current, RMS	7.5 A	typ.
Drive force in positive direction of motion in X	50 N	typ.
Drive force in negative direction of motion in X	50 N	typ.
Peak force in positive direction of motion in X	150 N
Peak force in negative direction of motion in X	150 N
Force constant	19.9 N/A
Resistance phase-phase	1.8 Ω	typ.
Inductance phase-phase	0.6 mH
Back EMF phase-phase	16 V·s/m	max.
Pole pitch N-N	30 mm
Mechanical Properties	68509131	Tolerance
Permissible push force in Y	500 N	max.
Permissible push force in Z	250 N	max.
Moved mass in X, unloaded	900 g
Guide	Recirculating ball bearing guide
Overall mass	11500 g
Material	Black anodized aluminum
Miscellaneous	68509131	Tolerance
Operating temperature range	10 to 50 °C
Connector	D-sub 9W4 (m)
Sensor connector	D-sub 9 (m)
Recommended controllers/drivers	ACS SPii+EC and other industrial solutions

At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.

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Product Note

Versione / Data

2021-04-19

pdf - 917 KB

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Documentation

Precision Linear Stage

Versione / Data

2017-04-21

pdf - 925 KB