Stage Flexure Piezo per il Nanoposizionamento

PI's piezo flexure stages combine sub-nanometer resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for applications in metrology, for super resolution microscopy, for interferometry or in inspection systems for semiconductor chip production. Piezo flexure stages are available for millisecond-settling precision positioning and dynamic scanning with up to several 100 Hertz in up to 6 degrees of freedom. La combinazione unica di design del sensore, guide a flessione senza attrito e attuatori piezoelettrici PICMA® a lunga durata, rende la meccanica eccellente e robusta. I controllori di movimento piezo supportano l'ottimizzazione delle performance di posizionamento e scansione, e sono facilmente integrabili tramite interfacce digitali o analogiche ed una pratica programmazione.

XYZ Piezo Flexure Scanners

Scanner Piezo a Flessione XYZ

Multi-Axis Piezo Flexure Stages

Stages Piezo a Flessione Multi-Asse

Piezo Flexure Tilting Mirrors

Tilting Mirror Flexure Piezo

XY Piezo Flexure Stages

Stages Flexure Piezo XY

Positioning system based on piezoelectric actuators with a travel range of up to 250 µm and a repeatability of around 1 nm.

Stage Flexure Piezo Lineari

PIFOC® Objective & PInano® Sample Scanners for Microscopy

PIFOC® Objective & PInano® Scanner di Campioni per la Microscopia