- ProductsProductsPI is a worldwide leading supplier of solutions in the fields of motion and positioning. PI does not only develop and produce a broad range of positioning stages and actuators for linear, rotary and vertical motion or combinations of different axes. PI also adapts those solutions to customer-specific applications or supplies finished subsystems for motion and positioning.
- New ProductsNew ProductsOn this site you will find our current new products. If you want to find out more, just contact us: Our sales engineers will get back to you as quickly as possible.
- Product FinderProduct FinderSelect the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results. Select more than one filter at a time, for example, to find positioning stages designed for higher load capacity, too.
- Customized ProductsCustomized ProductsPI is fully at home where unconventional solutions are in demand. This is no longer limited to fields of research. Today, nanotechnology is also present in standardized industrial processes.
- Nanopositioning Piezo Flexure StagesNanopositioning Piezo Flexure StagesPI's piezo flexure stages combine sub-nanometer resolution and guiding precision with minimum crosstalk.
- Multi-Axis Piezo Flexure StagesMulti-Axis Piezo Flexure StagesPI’s multi-axis piezo flexure stages allow positioning and scanning with sub-nanometer precision in up to 6 axis, including tip, tilt and yaw motion. Versions range from most compact cube design to large aperture and low profile.
- PIFOC® Objective & PInano® Sample Scanners for MicroscopyPIFOC® Objective & PInano® Sample Scanners for MicroscopyPiezo flexure stages and objective scanners of the PIFOC® and PInano® series offer high dynamics in positioning and scanning tasks. Well adapted solutions for XY specimen positioning parallel and vertical to the optical axis and Z focusing of the objective are available as standard products.
- Linear Piezo Flexure StagesLinear Piezo Flexure StagesPI’s nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.
- XY Piezo Flexure StagesXY Piezo Flexure StagesHigh-precision 2-axis nanopositioning systems integrate PICMA® piezo actuators for maximum reliability. Repeatable, drift-free positioning with optimal stability is possible by the use of high-quality nanometrology sensors.
- XYZ Piezo Flexure ScannersXYZ Piezo Flexure Scanners3-Axis Nanopositioning Scanners of Maximum Precision
- Piezo Flexure Tilting MirrorsPiezo Flexure Tilting MirrorsThe high stiffness of piezo flexure mirror platforms allows for high dynamics and excellent position stability. The compact devices are frequently used for beam deflection in laser processing and laser steering. Their parallel-kinematic design creates identical performance in tip and tilt axis, with a common fixed pivot point and no change of polarization direction.
- Multi-Axis Piezo Flexure Stages
- Miniature StagesMiniature StagesMiniaturized stages and manipulators are essential in mobile applications for measuring and medical devices, in industrial microassembly or use for research, e.g. in UHV and non-magnetic environments.
- Miniature Linear StagesMiniature Linear StagesMiniature stages are essential in positioning tasks where available space is limited. Piezomotor solutions like Q-motion, PIline® and PiezoWalk® allow for the most compact stages due to their direct drive principle.
- Miniature Rotation StagesMiniature Rotation StagesRotation stages with piezomotor make for particularly compact sizes. These compact rotation stages can be used in optics applications, where they position, for example, filters reliably and with excellent repeatability. Rotation stages can be mounted on linear stages without adapter and allow for flexible combinations of multi-axis positioning systems.
- Miniature HexapodsMiniature HexapodsThe smallest devices for 6 degrees of freedom are built from Q-motion piezomotor stages, but also palm-size BLDC motor versions are available. Best overall homogeneity of performance is achieved with the classic hexapod design. Low-profile design is preferred when relatively large tilting angles are required.
- Miniature Linear Stages
- Linear StagesLinear StagesPI offers a wide range of motorized linear stages to supply high-precision industrial markets like semiconductor and photonics, as well as high-end research. Vacuum versions are available for a large number of different models. Multi-axis compositions can be set up with adapter brackets or specialized vertical stages and compatible rotation stages.
- Stages with Magnetic Direct-Drive Linear MotorStages with Magnetic Direct-Drive Linear MotorStages with Magnetic Direct-Drive Linear Motor. The friction-free magnetic direct drive principle allows for most dynamic stages. Compared with motor-spindle-based stages, they use fewer mechanical components which results in less friction and backlash and thus more precision.
- Stages with Stepper, DC & Brushless DC (BLDC) MotorsStages with Stepper, DC & Brushless DC (BLDC) MotorsIndustrial applications in the production process such as laser processing benefit from the precise positioning accuracy of motorized positioning stages. Their low profile makes the variable stage series suitable for universal use, ranging from testing systems to production lines in precision automation.
- Vertical Stages with Stepper, DC & Brushless DC (BLDC) MotorsVertical Stages with Stepper, DC & Brushless DC (BLDC) MotorsVertical stages can be mounted on linear stages without adapter and allow for flexible combinations of multi-axis positioning systems.
- Miniature Linear StagesMiniature Linear StagesMiniature stages are essential in positioning tasks where available space is limited. Piezomotor solutions like Q-motion, PIline® and PiezoWalk® allow for the most compact stages due to their direct drive principle.
- Stages with Magnetic Direct-Drive Linear Motor
- Linear ActuatorsLinear ActuatorsChoose from the widest range of technologies the optimum for your special demands: Set-and-forget applications benefit from the specific features of piezomotors that provide excellent long-term stability, also for vacuum or nonmagnetic environments. Stepper and DC motor solutions are well-established and reliable for both industrial and research use.
- PiezoMike for Long-Term StabilityPiezoMike for Long-Term StabilityThe PiezoMike linear actuators offer the high resolution of piezo direct drives, high forces and absolutely stable positioning. This makes them ideal for set-and-forget applications with high precision requirements like the positioning of optical elements in a laser application.
- Linear Actuators with Stepper & DC Servo MotorsLinear Actuators with Stepper & DC Servo MotorsMotorized linear actuators are indispensable in automation routines from industrial production to adjustment in research laboratories.
- PIMag® VC Voice Coil Actuators with High Dynamics & Force Control OptionPIMag® VC Voice Coil Actuators with High Dynamics & Force Control OptionVoice coil drives show very high velocities and allow for fast step-and-settle. Wear-free flexure guidings or mechanical guidings are available. The optional force control allows for stand-alone solutions in pressure-sensitive device testing.
- PiezoMove Lever ActuatorsPiezoMove Lever Actuators
- Nanopositioning Piezo ActuatorsNanopositioning Piezo ActuatorsPIezoMove actuators are flexure-guided and have strokes up to 1 mm. Being very compact, they can be easily integrated. Generating forces of up to 10000 N and strokes of up to 100 µm are the characteristics of nanopositioning piezo actuators based on PICMA® multilayer piezos.
- PiezoWalk® Actuators with High Force & StabilityPiezoWalk® Actuators with High Force & StabilityPiezoWalk® actuators are highly specialized piezobased drives intended for integration. Designed for use in the semiconductor industry, they boost on reliability, position resolution and long-term stability. Their special features include minimum size with high force generation. The drive itself is resistant to magnetic fields.
- PIRest Active Piezo ShimsPIRest Active Piezo Shims
- PiezoMike for Long-Term Stability
- Rotation StagesRotation StagesPI offers stages with all kinds of motorization and guiding options: air-bearing, torque motor driven, motorized worm-gear coupled, tiny piezomotor stages and specialized goniometer stages with orthogonal tip-tilt mounting option.
- XY StagesXY StagesStability, precision and dynamics are crucial in the application fields of PI’s XY stages. They are the basis of high throughput rates and reliable operation. PI makes use of own developments in the fields of PIMag® magnetic linear motors and PIglide air bearings. Industrial production and quality control benefit from PI’s high-load XY stages and planar scanners.
- HexapodsHexapodsHexapods provide six degrees of freedom in the most compact package. In combination with absolute measuring sensors, software and motion controllers that make the most complicated motion profiles easy to command, PI hexapods answer industrial requirements.
- Engineered Subsystems for AutomationEngineered Subsystems for AutomationPrecision components, stable control and a great deal of experience in engineering are essential for high-precision complex motion and positioning solutions. PI is a supplier of technologically sophisticated drive components and high-precision positioners and also offers all levels of integration for engineered subsystems.
- Fast Multi-Channel Photonics AlignmentFast Multi-Channel Photonics Alignment SystemsPiezo scanners take care of fast, continuous scanning tasks, where durability, dynamics, and precision matter. The larger travel ranges are realized with XYZ combinations or 6-axis hexapods. Integrated routines make it possible to perform single-axis alignments up to complex, multi-axis fiber array positioning within the shortest possible time.
- Motion Control SoftwareMotion Control SoftwareAll digital controllers made by PI are accompanied by an extensive software package.
- ConceptsConceptsPI pursues a cross-platform and hardware-independent concept in the design of the motion control software.
- User Programs and Their FunctionsUser Programs and Their FunctionsEvery PI controller is delivered with an extensive software package that supports the user in setting up and parametrizing the overall system.
- Software Tools for HexapodsSoftware Tools for Hexapods
- ProgrammingProgrammingCustomers can program or adapt their own user programs so that every PI controller can be seamlessly integrated into their application.
- Third Party SupportThird Party Support
- Software Products for Special ApplicationsSoftware Products for Special ApplicationsControllers and drivers from PI are supplied with an extensive software package that provides convenient solutions and interfaces for ensuring full functionality.
- Concepts
- Controllers & DriversControllers & DriversThe decision for a motion controller depends on the specific application situation. Various criteria, such as limited installation space, the number of axes or the type of control, determine which controller is the right one. PI offers a broad spectrum of controls and regulation concepts.
- Nanopositioning Piezo ControllersNanopositioning Piezo ControllersPI offers the broadest range of digital and analog piezo control concepts that are adapted for optimal result in every application. Calibration of all piezo systems is done before delivery and all systems are delivered ready for operation.
- Piezo Drivers for Open-Loop Operation of Piezo ActuatorsPiezo Drivers for Open-Loop Operation of Piezo ActuatorsPI’s piezo drivers are available as benchtop or rackmount solutions, and as OEM modules also with separate power supply for minimized size. Piezo drivers integrate high-performance amplifiers specialized for different fields of applications.
- Motion Controllers & Drivers for Linear, Torque, Stepper & DC Servo MotorsMotion Controllers & Drivers for Linear, Torque, Stepper & DC Servo MotorsPI develops motion control solutions in-house to best adjust the features to the requirements of both drive and application. PI’s motion controllers are generally designed as single-channel devices and are available as benchtop, rackmount or OEM versions.
- Controllers & Drivers for PiezomotorsControllers & Drivers for Piezomotors
- Controller Systems for Multiple Axes & Mixed Drive TypesController Systems for Multiple Axes & Mixed Drive TypesModular motion controller systems provide best flexibility for increasing the number of axes in a system. They allow the use of different drive types with only one user interface. The number of available models is continuously extended. Contact PI now for your individual controller setup!
- Hexapod Motion ControllersHexapod Motion ControllersAs unique as the hexapod mechanics, the motion controller is designed to make parallel kinematics algorithms as easy and unnoticed by the user as possible: All target positions are commanded in Cartesian coordinates. For best integration in automation processes, the Hexapod motion controller is available with industrial EtherCAT interface.
- ACS Motion ControlACS Motion Control for Industrial AutomationWe recommend the controllers of our partner, ACS Motion Control especially for automation with industrial standards. Ask us about your integrated solution!
- Nanopositioning Piezo Controllers
- Piezoelectric Transducers & ActuatorsPiezoelectric Transducers & ActuatorsPiezoelectric ultrasonic transducers are available in a wide range of shapes like disks, plates or tubes, and different performance levels. They can be adapted to application requirements by using different piezoceramic materials, electrodes, and assembling technology.
- Discs, Rods and CylindersPiezoceramic Discs, Rods & Cylinders
- Plates and BlocksPiezoceramic Plates & Blocks
- RingsPiezoceramic Rings
- TubesPiezoceramic Tubes
- Spheres and HemispheresPiezoceramic Spheres & Hemispheres
- Bending ElementsPiezoceramic Bending Elements
- Tube ActuatorsPiezo Tube ActuatorsRadially and axially contracting piezo tubes are often used for creating dynamic scanning motions and as fiber stretchers.
- PICMA® Piezo Linear ActuatorsPICMA® Piezo Linear ActuatorsPICMA® multilayer actuators for an up to 10 times higher lifetime and operating time than conventional multilayer piezo actuators.
- PICMA® Piezo Bender ActuatorsPICMA® Piezo Bender ActuatorsMultilayer bending actuators: large displacement and high dynamics. Their bimorph structure ensures bidirectional displacement.
- PICA Piezoelectric Stack ActuatorsPICA Piezoelectric Stack ActuatorsStacked piezo linear actuators with operating voltages to 1000 V: High reliability, large specific displacement and high forces.
- PICA Shear ActuatorsPICA Shear ActuatorsMulti-axis and shear actuators in stacked design offer excellent dynamics combined with minimum electrical power requirements.
- DuraAct Patch TransducersDuraAct Patch TransducersDuraAct patch transducers convert electrical voltage into mechanical energy and vice versa; as actuator, sensor or as energy generator.
- Picoactuator® Piezoelectric CrystalPicoactuator® Piezoelectric CrystalThe motion of the Picoactuator® piezo crystals is highly linear and almost hysteresis-free and consequently suited for high-dynamics applications.
- Discs, Rods and Cylinders
- Air Bearings & StagesAir Bearings & StagesAir bearing stages are used where vibration-free motion is required, velocity needs to be highly constant, and optimum angular repeatability is requested.
- Sensors, Components & AccessoriesSensors, Components & Accessories
- VacuumProduct Series with Vacuum-Ready ItemsPI offers specific catalogue items for selected product series that are already suitable for high vacuum (HV) or ultra-high vacuum (UHV).
- New Products
- OEMOEMCustomer- and application-specific product developments form the basis for success at PI. To this purpose, requirements have to be understood and a technological solution has to be found.
- Applications
Applications & MarketsPI positioning systems are employed where technology is pushed forward in industry and research. This is done, for example, in semiconductor manufacturing, in medical engineering, in biotechnology, in plant engineering, in surface metrology, or in astronomy.- Hexapods Support Industrial RobotsHexapods Support Industrial RobotsBecause the need for multi-axis and also precision robots in production and quality processes is on the increase, industry is looking out for new types of robotics. PI offers parallel-kinematic hexapods for these tasks.
- Scientific InstrumentationScientific InstrumentationThe term "scientific instrumentation" covers a variety of different applications, starting with microscopy via beamline processes through to the wide field of laboratory automation.
- Hexapod Systems for ALMAHexapod Systems for ALMAUnder the extreme conditions of the Atacama Desert, PI hexapods align the subreflectors to the large main reflectors of the ALMA radio telescopes.
- Double-Crystal MonochromatorDouble-Crystal Monochromator for an X-Ray SpectrometerThe PI Beamline Instrumentation division’s aim is to develop application oriented solutions, e.g., this monochromator for an X-ray spectrometer.
- Materials Research in High VacuumMaterials Research in High VacuumPI provides standard and custom high vacuum compatible positioning systems for materials research with high-energy X-rays.
- Active Vibration Isolation with Piezo ActuatorsActive Vibration Isolation with Piezo ActuatorsActive vibration isolation reduces settling times, increases precision in measurement and production sequences and achieves high throughput rates.
- Drive Technology for the ELTDrive Technology for the ELTThe European - Extremely Large Telescope, in short E-ELT, is the largest terrestrial telescope for scientific evaluation of electromagnetic radiation.
- Hexapod Systems for ALMA
- Semiconductor TechnologySemiconductor TechnologyLithographic processes are the reason why chips are getting smaller and smaller and why extremely fine structures can be realized on silicon wafers. Piezo drives have made these technical advances possible with their performance and reliability.
- MicroscopyMicroscopyImaging processes increase efficiency across a number of fields, ranging from medical engineering to pharmaceutical research and manufacturing of semiconductors.
- Confocal MicroscopyAdjustment of the Focal Planes in Confocal MicroscopyConfocal microscopy is used to detect the structure of the sample surface through the shifting of the focal plane, for example in dermatology.
- Positioning Solutions for Total Internal Reflection Fluorescence Microscopy (TIRFM)Positioning Solutions for Total Internal Reflection Fluorescence Microscopy (TIRFM)Linear stages adjust the laser beam in the TIRF microscope. Precision positioning of the sample is possible by combining two XY stages.
- High-Speed MicroscopyHigh-Speed Microscopy for Quality ControlSpecimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
- Atomic Force MicroscopyAFM Scanner for Atomic Force MicroscopySpecimen positioning on AFM scanners for atomic force microscopy is performed with piezo-based scanning stages which thus play a key role.
- White Light Interferometry3-D Surface Inspection With Piezo-Based Positioning Systems from PIHigh-resolution camera systems are combined with white light interferometry for 3-D surface inspection with picometer resolution.
- Flamingo Lightsheet Fluorescence MicroscopyFlamingo Lightsheet Fluorescence MicroscopyLight Sheet Fluorescence Microscopy (LSFM), also called Single Plane Illumination Microscopy (SPIM ) is a very powerful microscopy technology for gentle in vivo imaging offering low phototoxicity and fast image acquisition.
- IsoView Light Sheet MicroscopeIsoView Light Sheet MicroscopeLight Sheet Microscopy is a fascinating technology with a huge application potential in life sciences and biotechnology. IsoView is a brilliant interpretation of this technology, especially intended for imaging fast cellular dynamics across large specimens over several hours. Specimen positioning and objective translation plays a major role in the design of IsoView.
- Confocal Microscopy
- Silicon PhotonicsSilicon PhotonicsSilicon photonics allows data rates into the Tbit/s range and is therefore suitable for computer-aided services that require the highest possible transmission speeds.
- Photonics PackagingAutomated Photonics PackagingAn automated assembly and alignment system can reduce the manufacturing process for silicon photonics to only a few minutes. However, handling the delicate waveguides is indeed a major challenge as the integration of the light sources at a wafer level and connection of the optical inputs and outputs are difficult to perform.
- Optical Fiber AlignmentSimultaneous Testing of Optical Components in Silicon PhotonicsSilicon photonics presents new challenges for the production of components as well as testing and slicing the wafers.
- Photonics Packaging
- Medical TechnologyMedical TechnologyProgress in pharmaceutical research, diagnostics, and therapy requires high-performance and precise position systems. In addition to high positioning precision, requirements for the drives often include compact dimensions, low energy consumption, speed, and high reliability.
- EndoscopyVariable Focusing and Sharp Focus for Endoscopic ApplicationsTiniest piezomotors, magnetic miniature drives and miniaturized piezo tubes are used in various are used in various endoscopy procedures to generate high-resolution image information in the smallest possible installation space.
- Surgical Robots for OphthalmologySurgical Robots for OphthalmologyThe control and focusing of laser beams in ophthalmic surgery requires accurate positioning systems, such as piezo-driven tip/tilt mirror systems.
- Magnetic Resonance ImagingNonsensitive Drives for Magnetic Resonance TomographyPiezo drives are well suited for magnetic resonance therapy, because they are not influenced by strong magnetic fields.
- Optical Coherence TomographyPiezo Technology and Optical Coherence Tomography (OCT)Piezo actuators and drives, e.g., PILine® OEM motors, ensure the high precision and position stability required for optical coherence tomography (OCT).
- PipettingPiezomotors for Pipetting and NanodispensingPiezomotors are suited for pipetting with small devices and sample separations and are able to move the pipettes in the vertical direction.
- Precision DosingDynamic Drives for Precision Dosing with NanodispensersPiezo actuators are ideal for precision dosing with nanodispensers: They can switch valves directly, and can also work against a closing spring.
- MicropumpsPiezoelectric Micropumps – Compact Design and High PerformancePiezoelectric micro-diaphragm pumps offer high performance on small space – the drives allow a continuous flow and a variable flow rate.
- Image StabilizationImage Stabilization and Microscanning with Piezo ScannersFast, piezo-based scanners operate with the necessary velocities in the video frequency range for image stabilization and microscanning.
- Adaptive Diaphragm PositioningAdaptive Diaphragm PositioningIn radiation therapy, the individual leaves are adjusted so that the healthy tissue offers the optimum protection from the radiation.
- Positioning Solutions for Whole Genome SequencingPositioning Solutions for Whole Genome SequencingSpeed and precision have leaped since the beginnings of genome analysis – while, at the same time, costs have continuously decreased. „Sequencing-by-synthesis“, the currently leading method, is based on signal detection by fluorescence microscopes. Positioning solutions for microscope objectives and sample stages play a decisive role in it.
- Endoscopy
- Materials ResearchMaterials ResearchEfficiency has become an important buzzword these days. Materials research has paid a major contribution as the results have, for example, optimized processing methods. Methods such as X-rays and lasers or white light interferometry demand precise positioning of the specimens to be examined and of optics or beam control.
- Parallel Kinematics for Materials ResearchHigh-Load Parallel Kinematics for Materials ResearchThe high-energy X-rays at beamlines provide numerous possibilities for materials research, such as checking welding seams of workpieces.
- Laser Beam ControlPiezo Drives for Laser Beam ControlLasers are tools that can be used in many areas of application. At the same time, the laser beam control requires precision, dynamics, and reliability.
- Parallel Kinematics for Materials Research
- Mechanical EngineeringMechanical EngineeringMechanical engineering and manufacturing technology require fast, reliable and energy-saving drive components. The spectrum ranges from piezo actuators to six-axis parallel kinematics which can communicate directly with CNC controls.
- Electrical Discharge MachiningPiezo Actuators Accelerate Electrical Discharge MachiningPrecision components are manufactured using electrical discharge machining, often in large numbers. Vibrating piezo actuators make a crucial contribution here.
- Hexapods in Mechanical EngineeringHexapods in Mechanical EngineeringPI hexapod 6-axis positioning systems can handle loads from 2 kg to several tons. Ideal for precision mechanical engineering applications.
- Electrical Discharge Machining
- AutomationAutomationPiezo drives, magnetic direct drives, and hexapods are part and parcel of automation today. They operate precisely and reliably and have proven themselves under rugged conditions.
- Smarter Motion PositioningSmarter Motion PositioningPositioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing demand solutions that need to be robust and reliable.
- Hexapods in MicroproductionHexapods in MicroproductionWhat do optical components and glass fibers in photonics, mobile devices, and high-quality wristwatches all have in common?
- Hexapods for Quality AssuranceHexapods for Quality AssuranceMicroproduction technology makes high-precision positioning systems absolutely necessary for both assembly and quality assurance.
- Magnetic Direct DrivesMagnetic Direct DrivesMagnetic direct drives, which include voice-coil actuators and linear drives, are often predestined here as the best solutions for many reasons.
- Motion Simulation with HexapodsMotion Simulation with HexapodsMotion simulation with hexapods with CIPA certificate from PI (Physik Instrumente) – vibrating tables are used for testing resistance to vibration.
- Flexibility in Dimensional MeasuringHexapod Systems in AutomationHexapods allow for an outstanding flexibility for a variety of samples of in-line automation systems by minimizing the space for motion robotics.
- Motion Compensation with HexapodsMotion Compensation with HexapodsDynamic hexapods with piezo drives: Best conditions for motion compensation.
- Fast Piezo Ultrasonic Drives Advance TechnologyFast Piezo Ultrasonic Drives Advance TechnologyWhen increased demands are placed on an application, ultrasonic piezo motors can prove to be a good alternative, as they can be used in many ways.
- Laser Material ProcessingLaser Material ProcessingPI offers automation platforms for high-precision and high-throughput laser material processing, such as laser marking, laser cutting and micromachining.
- Hexapods for Optical MetrologyHexapods Support Precise Measurement of AspheresTesting aspherical shape accuracy requires the measurement of the smallest deviations in the nanometer range and short measuring and set-up times. The solution is a new interferometer from metrology company Mahr. As part of the overall system, the hexapod positions lenses and the calibration sphere.
- Smarter Motion Positioning
- Beamline InstrumentationBeamline InstrumentationScientific experiments pose their own challenges, and beamline X-ray experiments are even more special in themselves. However, the need for precision equipment is universal.
- Tomography EquipmentTomography Equipment
- Synchrotron Spectroscopy in VacuumSynchrotron Spectroscopy in Vacuum
- Beam PreparationBeam Preparation
- Sample Positioning for TomographySample Positioning for Tomography
- MicroscopyMicroscopy
- Accelerator TechnologyAccelerator TechnologyDynamic compensation of Lorentz forces at the XFEL accelerator structures: The particle accelerator XFEL at the DESY (German Electron Synchrotron) uses acceleration technology based on super-conducting acceleration structures, so-called resonators or cavities.
- Tomography Equipment
- Additive ManufacturingAdditive ManufacturingDue to their high dynamics and pushing forces piezo actuators are highly suitable for the use in machines for additive manufacturing.
- Active AlignmentActive AlignmentThe assembly of complex optical systems like objective lenses for smartphone cameras or laser cavities requires more and more accuracy. Active alignment addresses the resulting needs and helps to reduce cycle times by two orders of magnitude and more.
- Technology
Know-How & TechnologyPI combines its long-term experience in micro and nanopositioning technology with in-depth knowledge in the fields of mechanics, electronics, sensor engineering, and software. Thus, PI is able to offer its customers the most advanced drive technologies and system solutions.- Piezo TechnologyPiezo TechnologyPI Ceramic offers a wealth of experience in the manufacturing of piezoceramic materials, components, and actuators. The piezoceramic materials can be adapted individually to perfectly fit the later use of the piezo components.
- Fundamentals of Piezo TechnologyFundamentals of Piezo TechnologyPhysical basics and explanations of piezo electricity and electromechanics.
- Properties of Piezo ActuatorsProperties of Piezo ActuatorsCharacteristics of piezoceramic actuators: Displacement modes, forces and stiffnesses, dynamics. Ambient conditions.
- Piezoceramic MaterialsPiezoceramic MaterialsPI Ceramic offers a variety of different piezoelectric materials including lead-free materials.
- Manufacturing TechnologyManufacturing TechnologyPI Ceramic offers a wide range of manufacturing technologies: Pressing or tape technology, assembling technology and testing procedures.
- PICMA® TechnologyPICMA® TechnologyHighly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.
- Integrated Piezo ActuatorsIntegrated Piezo ActuatorsTo avoid pull forces, these piezo elements are provided with a mechanical preload in mechanical cases or by means of flexure joints.
- DuraAct Patch Transducer TechnologyDuraAct Patch Transducer TechnologyManufacture, functional principle and typical working parameters of DuraAct patch transducers explain the possible force generation and deflection.
- PIRest ActuatorsPIRest ActuatorsActive shims with long-term stability and nanometer resolution.
- Fundamentals of Piezo Technology
- Piezoelectric DrivesPiezoelectric DrivesDepending on the configuration and control, piezoceramic actuators can be used to create translational motions or as motors with a virtually unlimited travel range. The choice of drive depends on the requirements of the application.
- Piezo ActuatorsPiezo Actuators with and without GuidingPiezoelectric actuators offer subnanometer resolution and very short response times, making them ideally suitable for nanometer-precision positioning at high dynamics.
- PiezoWalk® Walking DrivesPiezoWalk® Walking DrivesPiezoWalk® drives were developed more than 10 years ago for the semiconductor industry, a demanding industry when it comes to reliability, position resolution and long-term stability.
- PILine® Ultrasonic PiezomotorsPILine® Ultrasonic PiezomotorsUltrasonic piezomotors dispense with the mechanical complexity of classical rotary motor/gear/leadscrew combinations in favor of costs and reliability.
- Piezo Inertia DrivesPiezo Inertia DrivesInertia Drives are space-saving and low-cost piezo-based drives with relatively high holding forces and a travel range that is only limited by the length of the runner.
- PiezoMike Linear ActuatorsPiezoMike Linear ActuatorsCompact, low-cost inertia drive principle (stick-slip). When at rest, the drive is self-locking, requires no current and generates no heat. It holds the position with maximum force.
- Comparison: Piezo Motors & Drive TechnologiesComparison: Piezo Motors & Drive TechnologiesPIs drive technologies in comparison: Piezo motors, stepping drives, ultrasonic drives, and piezo inertia drives.
- Piezo Actuators
- Electromagnetic DrivesElectromagnetic DrivesRotating electric motors such as DC or stepper motors are used in connection with screw or worm drives. Stepper motor systems with high-resolution encoders can perform minimum incremental motions of 10 nm with high reliability and repeatability.
- Rotating Electric MotorsRotating Electric Motors from PIRotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.
- Magnetic Direct DrivesMagnetic Direct DrivesIn particular in terms of wear and dynamics, magnetic direct drives offer advantages compared to common spindle-based technologies.
- PIMag® 6-D Magnetic LevitationPIMag® 6-D Magnetic Levitation at Six Levels of FreedomPIMag® 6-D is an electromagnetic positioning system in which the passive platform levitates on a magnetic field and is actively guided by it.
- Hybrid ConceptPiezo & Motor Hybrid ConceptIn the hybrid concept, the DC servo motor (large travel ranges) and the piezo drive (nanometer accuracy) are combined with one another.
- Rotating Electric Motors
- Parallel KinematicsParallel KinematicsIn a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform. This means that all axes can be designed with identical dynamic properties, thus reducing the moved mass considerably. Hexapods are used for moving and precision positioning, aligning and displacing loads in all six degrees of freedom, i.e., three linear and three rotational axes.
- Parallel KinematicsPiezo Positioning Systems with Parallel KinematicsIn a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.
- Multi-Axis PositionersMulti-Axis Positioners and Stewart PlatformsHexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes.
- Hexapod as Motion SimulatorHexapod as Motion SimulatorMotion simulators have higher motion dynamics requirements (shakers).
- Parallel Kinematics
- Sensor TechnologiesSensor TechnologiesThe linearity and repeatability achieved are not possible without highest-resolution measuring devices. Accuracies in the range of a few nanometers and below require a position measurement method that can also detect motion in this range.
- Capacitive SensorsCapacitance NanosensorsCapacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.
- Incremental SensorsLinear Scale Encoders for Nanometrology & NanopositioningPI uses incremental measurement systems for longer travel ranges, starting from approximately one millimeter. These sensors, which in most cases are optical sensors, achieve position resolution down to the picometer range.
- PIOne Optical Nanometrology EncoderPIOne Optical Nanometrology EncoderThe PIOne high-resolution linear sensor developed by PI ensures a position resolution of far less than one nanometer with adequate measurement analysis.
- Comparison: Position Sensor TechnologiesComparison: Nanopositioning Sensor TechnologiesPositioning systems that need to provide accuracies in the range of a few nanometers and below require a position measurement technique that can also detect motion in this range.
- Capacitive Sensors
- Controllers & SoftwareControllers & SoftwareFast settling or extremely smooth low speed motion, high positional stability, high resolution and high dynamics – the requirements placed on piezo systems vary greatly and need drivers and controllers with a high degree of flexibility.
- Digital & Analog InterfacesDigital & Analog InterfacesFast USB or TCP/IP interfaces as well as RS-232 are the standard interfaces supported by modern digital controllers from PI. Furthermore, PI also provides digital or analog real-time capable interfaces.
- EtherCAT Connectivity of PI ProductsEtherCAT Connectivity of PI ProductsPI offers high-precision drives for use as EtherCAT slave, or integrates with ACS Motion Controllers as Master, or 2nd Master in an existing architecture.
- Control of Piezo ActuatorsPiezo Controllers & Drivers for Nanopositioning SystemsCharacteristic properties of piezo actuators include high feed forces and fast response. Since piezoelectric actuators react to even the smallest change in voltage with a motion, noise or drift in the control must be avoided.
- Digital Motion ControllersDigital Motion ControllersDigital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.
- SoftwareMotion Control Software from PIAll positioning systems from Physik Instrumente (PI) and piezo and motion controllers and drivers are supported by a solid software package.
- Active AlignmentActive AlignmentThe need to align devices down to nanoscale accuracy is arising in many fields. Optical components such as the lenses or lens assemblies in small cameras, or even the CCD chip itself, need to be positioned with ever more precision.
- Digital & Analog Interfaces
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- Classical Guiding SystemsComparison: Classical Guiding Systems and Force TransmissionPositioners with travel ranges from several millimeters to one meter usually utilize traditional mechanical guide components such as ball bearings.
- Flexure Guiding SystemsFlexure Guiding Systems for Nanopositioning & Piezo ActuatorsFlexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.
- Magnetic BearingsMagnetic Levitation & Precision Bearings for NanopositioningMagnetic levitation allows excellent guiding accuracy in a plane, both linear and rotational.
- PIglide Air Bearing TechnologyPIglide Air Bearing TechnologyMulti-axis motion with nanometer precision and without friction.
- Classical Guiding Systems
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About PIPI stands for technical excellence and continuous advance in precision positioning – driven by the passion for technology and its use in customer applications. The target of the PI Group is to develop this market and technological leadership even further and therefore secure a decisive competitive advantage for its customers.- Technology CenterTechnology CenterThe technology center provides space not only for offices but also for application labs, metrology labs, and cleanrooms for vacuum or cryogenic chambers.
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- Heavy Load HallHeavy Duty Hall for Positioning Systems Weighing Several TonsThe product range from a two-ton hexapod to a ten-gram nanopositioner requires that PI can both manufacture and qualify these systems. For this reason, PI operates a heavy duty hall at its location in Karlsruhe for the assembly and measurement of masses up to five tons.
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Absolute Encoder
Absolute encoders are used for detecting the position and provide information on the absolute position of a motion platform. For example, this can be realized optically by using an additional Pseudo Random Code (PRC) scale.
DC Motor with ActiveDrive (PWM)
To achieve higher velocities, PI developed ActiveDrive technology for controlling motors with a rated power exceeding the controller's output power. To this end, an amplifier is integrated with the motor in a shielded case. The controller triggers the integrated amplifier via a pulse width modulation (PWM). As illustrated in figure 7, the motor power is regulated via the ratio of on/off time. This requires a separate power adapter for supplying the amplifier and optimized heat dissipation for maintaining precision.
Air Bearing
An air film of a few micrometers is used as bearing. Therefore, air bearings are free of friction and, compared to mechanical bearings, allow a considerably higher guiding accuracy.
Amplifier Classification
PI uses the following amplifier classifications: Charge controlled, switched (class D), linear (class AB).
Amplifier Resolution
Only for digitally controlled amplifiers: Measurement of the smallest digital output value (LSB) in mV.
Area Scan
Motion sequence for a predefined area.
See >> Scan Routine.
Backlash
Position error that occurs when the drive direction is reversed. Backlash is caused by mechanical play between the components of the drivetrain, such as gearheads or bearings, or by friction in the guide system. Backlash also depends on the temperature, acceleration, load, position of the leadscrew, direction, wear etc. Backlash can be reduced by preloading the drivetrain. A method for measuring that determines the platform's position directly and eliminates any errors in the drivetrain (direct measuring).
Ball Screw
In the case of ball screws, only rolling friction occurs, which allows higher speeds, drive performance, and longer lifetime than leadscrews. They are however, not self-locking. The backlash can be minimized adjusting the ball diameter and the thread profile.
Bandwidth
Max. operating frequency of a piezo driver; the measured value is the frequency in kHz that decreases the amplitude by -3 dB. Large signal values related to maximum output voltage. Small signal values at an output voltage of 10 Vpp. The values are displayed in the amplifier operating diagram.
Belt Gears
Belt drives consist of two gearwheels connected to each other by a belt. In this way, larger shaft distances can be bridged and higher peripheral speeds can be realized. Maintenance tasks usually involve a belt change or restressing of the belt. The belt limits the temperature range. The occurring pull and push forces usually cause larger shaft loads. PI often uses belt gears in compact positioning stages; e.g., Z or linear stages where the drive is "folded" on the side. Belt drives are suitable for applications in a vacuum up to 10-6 hPa.
Bevel Gears
Bevel gears as shown in figure 16 consist of a bevel pinion and a toothed wheel with respective angled teeth. Similar to the worm gear, the energy is transferred at a right angle, but reaches higher torque capacities. High gear ratios can only be achieved with additional spur gear stages. The occurring rolling contact is advantageous. This makes bevel gears low-wear and more efficient than worm gears. However, they are often more expensive. PI deploys bevel gears in customized rotation stages.
Brushless DC Motor (BLDC) / Synchronous Servo Motor (SSVM)
Due to their brushless commutation, BLDCs (brushless direct current) and SSVM (synchronous servo motors) respectively, provide many advantages compared to brush DC motors:
- The lifetime is mainly limited by the bearings and ends after several ten thousand hours. As a consequence, the motors are more reliable.
- The brushless version allows a smaller, lighter, more efficient, and low-maintenance design while providing the same performance. This results in a large torque to motor size ratio.
- The electronic commutation allows for high dynamics at low temperatures with less vibration.
These are the reasons why BLDCs and SSVMs are preferred in industrial applications instead of DC motors.
Capacitive Base Load (Internal)
For switching amplifiers. Stabilizes the output voltage even without connected capacitive load (piezo actuator). The possible output power of a piezo controller/driver depends on internal and external capacitive loads.
Capacitive Sensor
Capacitive sensors allow contactless measuring, do not introduce much energy into the piezo drive system and have a flat design. Their direct position measuring eliminates the effect of drift for travel ranges from 10 μm up to approx. 2 mm. The design consists of two conductive surfaces: A high-frequency alternating current generates a homogenous electric field between the two surfaces. The overall system consisting of positioning stage, sensor technology, and electronics gains in performance and precision. Customers from the semiconductor industry also appreciate the small and versatile design as well as the lack of thermal build-up in the system.
Center of Rotation
See >> Pivot Point.
Charge-Controlled Piezo Amplifier
The functional principle of the amplifier is based in the charge control. The voltage applied controls the amount of charge that is transmitted to the piezo actuator. The result is a highly repeatable, linear displacement of the piezo actuator in high dynamics operation, without the need for additional position measuring. The typical hysteresis that piezo actuators show when operated with a charge-controlled amplifier is only around 2%.
It is recommended to monitor the piezo temperature to protect the piezo actuators against damage from excessively high temperatures, especially in high-dynamic applications.Closed-Loop Operation
An integrated position allows the motors can be operated in closed-loop mode. The commanded and actual position reached are measured and compared to each other. Control technology is used to reach the optimum target position, for high position resolution, for uniform feed velocity, and greater dynamic velocity and acceleration ranges.
Closed-Loop Operation of Piezo Actuators and Systems
Piezo servo controllers have additional circuitry for position sensing and servo control that compensates for nonlinearity, hysteresis, and creep. Displacement of the piezo is controlled by an analog signal. Positioning accuracy and repeatability down to the subnanometer range are possible, depending on the piezo mechanics and sensor type. High-resolution position sensors provide optimum positional stability and fast response in the nanometer range. The integrated notch filters (adjustable for each axis) improve stability and allow high bandwidth operation closer to the resonant frequency of the mechanics.
PI piezo drivers for PICMA® actuators have an output voltage range of up to -30 to +135 V to provide enough margin for the servo-controller to compensate e.g. for load changes.See >> Open-Loop Operation, >> Capacitive Sensors, >> Strain Gauge Sensors.
Coordinate System
The position indicators, the direction of motion and the center of rotation of the hexapod's motion platform are determined by the coordination system. The coordinate systems are always right-handed systems.
In order to be able to adapt the motion trajectory perfectly to the requirements of the application, it is possible to define various coordinate systems that for example, relate to the position of a workpiece or tool.Crossed Roller Guide
Crossed roller guides are comparatively stiff and manage with low preload. This results in reduced friction with high load capacity, high guiding accuracy, and smooth running. An additional forced cage control helps to prevent the roller bearing from creeping. Nevertheless, this shortens the possible travel range over the same axis length.
Crosstalk
Deviation from the ideal motion in axes perpendicular to the direction of motion.
Angular errors are xrx = θX = roll, xry = θY = pitch, xrz = θZ = yaw.
Linear errors deviations in axial runout such as xty = straightness, xtz = flatness.See >> Linearity Error.
Data Recorder
Tool for analyzing data and measured values. It saves data from various sources such as position feedback from analog inputs and shows them as a function of time whereby fast visualization is made possible.
DC Motor (DC)
DC motors offer high torques at a low speed, good dynamics over a large speed range, fast response, low heat generation as well as smooth and vibration-free operation. For example, in a positioning solution, a drive screw pitch of 1 mm/per revolution results in a typical travel velocity of approximately 50 mm/s. However, the wear-prone brushes used for motor commutation can be a disadvantage that limits the lifetime from 1,000 to 5,000 hours.
Applications in a vacuum are only possible up to 10-6 hPa, otherwise the humidity is lacking that is required by the carbon brushes for commutation. Moreover, the brushes exude carbon dust; a problematic effect in vacuum applications, clean rooms, and optical applications.Design Resolution
The theoretical minimum movement that can be made. Design resolution must not be confused with minimum incremental motion. In indirect position measurement methods, values for drive screw pitch, gear ratio, motor or sensor/encoder resolution, for example, are included in the calculation of the resolution; normally it is considerably below the minimum incremental motion of a mechanics. In direct measurement methods, the resolution of the sensor system is specified.
Direct Metrology
Position measuring is performed with the highest accuracy directly at the motion platform so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. This is achieved by noncontact optical linear encoders. Precision positioning systems use different encoder types as position sensor: Incremental encoders with different accuracy levels, absolute-measuring encoders that additionally make referencing unnecessary when a machine is switched on again, and for travel ranges under 2 mm, capacitive sensors.
Drag Chain-Compatible Cable
Drag chain-compatible cables are used in the energy supply chain. They remain functional although they are subject to a large number of bending cycles during their lifetime.
Drift
See >> Creep.
Drive Type
Defines the drive types supported by the controller/driver, such as DC motors, piezo walking drives, piezo actuators or linear motors.
Dynamic Digital Linearization
Dynamic Digital Linearization (DDL) describes an iterative preshaping method minimizing the positioning error. DDL for example reduces the phase lag of the commanded and executed trajectory of repeated periodic motion patterns next to other piezoelectric motion effects. This is relevant for scanning applications, where a specific position must be identified and reached again later with high precision, or for applications where a trajectory must be followed very accurately for several processing steps.
Electrical Capacitance
The piezo capacitance values indicated in the technical data tables are small signal values (measured at 1 V, 1000 Hz, 20 °C, no load). Large-signal values at room temperature are higher by a factor of 1.3 to 1.6. The piezoelectric capacitance changes with amplitude, temperature and load to up to 200% of the unloaded, small-signal capacitance at room-temperature. Detailed information on power requirements can be found in the amplifier frequency response graphs provided for piezo drivers and controllers.
Encoder
An encoder is used for determining the position. Basically, a difference is made between linear and rotary encoders, which, depending on the setup, operate either incrementally or absolutely.
Energy Recovery
Switching amplifier (class D) with pulse width modulation (PWM) for controlling the piezo output voltage. When the piezo actuator is discharged, a patented circuitry for energy recovery stores part of the returning energy in a capacitor and makes it reusable for the next charging cycle. The amplifier reduces the power consumption by up to 80 % compared to linear piezo amplifiers, runs cooler and provides better stability. Piezo drivers that use energy recovery are ideally suited for high-dynamics scanning and switching applications.
EtherCAT® Fieldbus Interface
EtherCAT® (Ethernet for Control Automation Technology) is an open, Ethernet-based fieldbus system that operates in real time. EtherCAT® is a registered trademark and patented technology of Beckhoff Automation GmbH, Germany.
Hexapod controllers from PI support EtherCAT®. The coordination transformation required for the parallel kinematics is done by the hexapod controller and does not adversely affect the PLC.
Extensive Software Package
Each controller from PI is supplied with an extensive software package. The available user programs support the user with startup and parameterization of the overall system. The PIMikroMove user software makes it possible to display and command all connected controllers via one interface. Program interfaces are available for all common programming languages including NI LabVIEW and MATLAB for integrating PI controllers into existing applications. The special software tools for hexapods allow you to simulate motion ranges and determine the permissible forces.
Flatness
See >> Crosstalk.
Flexure Guides
The motion of a solid body is based in elastic deformation of a solid body whereby static, rolling or sliding friction is avoided. Solid body elements such as flexures or guiding systems are distinguished by high stiffness and high load capacity and are virtually insensitive to impact or vibration. They are wear- and maintenance-free, vacuum-compatible, function over a large temperature range and do not require lubrication.
Gearhead
Velocity and torque can be set with gearheads. However, the transmission ratio, which is the proportion between the speed and the gear input, is decisive. The velocity is defined at the gearbox output, so to speak. This ratio is called reduction if it is greater than one, which results in a lower speed with a higher torque. The opposite is true for higher speeds. Typical types of gears include for example, worm gears, spur gears, planetary gears, bevel gears, and belt gears.
See >> Worm Gearhead, >> Bevel Gearhead, >> Spur Gearhead, >> Planetary Gearhead, >> Harmonic Drive Gearhead, >> Belt Gearhead.
Gear Motors
Gear motors are used for precision positioning tasks to provide higher torques and higher resolutions at lower speeds. In slow applications, the rotor moves comparably fast thanks to the gear ratio. Without gears, undesired cogging torques may occur due to the low rotor speed. Moreover, gears support the holding forces in vertical applications. Often, less effort is required for the control loop because, thanks to the gearhead, the motor is only subject to a load on the motion platform that is reduced by the square of the transmission ratio.
However, a geared motor is not play-free and additional friction reduces efficiency. For this reason, gear manufacturers often offer suitable lubrication to guarantee the expected lifetime. The lifetime is subject mainly to input speed and output torque as well as operating, ambient, and installation conditions. In customized solutions, the lifetime can be prolonged by self-lubricating bearings, ball or ceramic bearings, metal gearwheels, and special greases.
Strictly speaking, drive screws also act as gears in gear spindle positioning systems because speed adjustments are achieved on the expense of the torque in dependence of the spindle pitch. To this effect, a motion platform moves twice as fast at 50% of the torque with a spindle pitch of 2 mm/revolution compared to a spindle pitch of 1 mm/revolution. For some applications, however, an actual gear is required to act between motor and drive screw. PI deploys various gear types for this scenario.Gradient Search
Mountaineering algorithm for optimizing the signal.
See >> Scan Routine.
Harmonic Drive Gears
Harmonic drive gears, are distinguished by the elastic properties of the transmission element, allowing for high transmission gear ratios, high torque capacities, high linear torsional stiffness, high degrees of efficiency as well as play-free operation. The elastic transmission element is an elliptical disc that deforms a thin steel bush with external teeth. The steel bush is located on an outer ring with ball bearing and internal teeth. When deformation occurs, the internal and external teeth interlock play-free in the area of the larger elliptical axis. Additionally, harmonic drive gears offer the possibility of using a central hollow shaft; e.g., for cables, shafts, or laser beams. However, these gears are comparatively expensive due to their complex, compact, and maintenance-free setup. PI sometimes uses harmonic drive gears for customized solutions to achieve particularly high positioning accuracy and repeatability thanks to the zero-play characteristic of these gears.
ID Chip
An ID chip is in the connector of many piezo stages. When the stage is calibrated at the factory with a digital controller, the calibration data is saved together with specific product information on the ID chip. When switched on, digital controllers read the data from the ID chip of the connected stage. Stages, whose ID chip contains the calibration data, can therefore be connected to any suitable digital electronics without renewed calibration.
Incremental Encoder
When incremental encoders are in motion, they generate impulses that are counted by the controller. However, in contrast to absolute encoders, it is a question of determining a relative position. To determine an absolute position, a limit switch or reference switch signal must also be referenced.
Lateral Force, Max.
Maximum lateral force perpendicular to the positioning direction. For piezo systems the lateral force is limited by the piezo actuator and the flexure designs. For XY stages the push/pull force capacity of the respective orthogonal module (in its positioning direction) limits the lateral force that can be tolerated.
Leadscrew
Leadscrews can achieve very high resolutions with smooth running and are often preloaded by springs to minimize backlash. This results in sliding friction and therefore a self-locking effect. However, this reduces the velocity and the lifetime.
Linear Amplifier / Driver
Most piezo drivers use linear amplifiers (class AB) to generate the output voltage. The amplifier output voltage is controlled in open-loop (voltage-controlled) piezo mode by an analog input signal optionally combined with a DC offset.
Linear Ball Guide
Linear ball guides require exact tolerances between the guide and bearing in order to keep the play and friction as low as possible. This limits the load capacity. Due to the simple design, they are only suitable for inexpensive applications with comparatively low requirements.
Linear Encoder
Linear encoders measure the position directly at the motion platform. As a rule, this means that a higher accuracy is achieved compared to rotary encoders, because nonlinearity, mechanical play, and elastic deformation have no influence.
Linear Motor
A linear motor is an electromagnetic direct drive that generates straight linear motion. The range of a linear motor is practically unlimited. A linear measuring system is always required for motion and positioning; open loop operation of a linear motor is not possible. The linear motor does not require mechanical coupling elements to convert the rotation of the motor into linear motion as is the case with servo motors. Typically, 3-phase motors are used.
Typical applications are found in the electronics and semiconductor industry, medicine and biotechnology, in tool machines with a strong focus on laser cutting but also in other fields where precision, dynamics, and productivity are important.Linearity Error
Deviation in motion direction, of measured position from commanded position (positioning accuracy). Measured with an external, traceable device. The value is given as a percentage of the entire measuring range.
Measurement of the linearity error: The target and measured actual values of the positions are plotted against each other, a line is drawn through the first and last data point, and the maximum absolute deviation is determined. A linearity error of 0.1% corresponds to an area of ±0.1% around the ideal line. Example: A linearity error of 0.1% over a measuring range of 100 µm produces a possible maximum error of 0.1 µm.Linearization
Digital piezo controllers offer the best positioning accuracy through linearization algorithms with higher-order polynomials. The linearity error with capacitive sensors can therefore be reduced to less than 0.01%.
See >> Dynamic Digital Linearization, >> Sensor Linearization.
Magnetic Bearings
Magnetic levitation allows excellent linear and rotational guiding accuracy on a plane. Flatness errors are measured and compensated by very accurate noncontact sensors. Contrary to air bearings, which are also very accurate, magnetic bearings can also be used in vacuum.
Minimum Incremental Motion
The smallest motion that can be executed repeatedly is called minimum incremental motion, or typical resolution, and is determined by measurements. The data table shows typical measured values. In most cases, minimum incremental motion differs strongly from the design resolution, which can be considerably smaller in numerical values.
See also >> Design Resolution.
NEXACT® Piezo Walking Drive
Precision piezo motor that moves a runner by means of piezo bending elements. The drives are very compact and achieve relatively high velocities around 10 mm/s, and forces up to 10 N. A suitable selection of the piezo elements optimizes step size, clamping force, velocity, and stiffness for the respective applications.
NEXLINE® Piezo Walking Drive
High-load piezo motor that combines piezo clamping and shear actuators, in order to move a runner. The drives feature particularly high force and stiffness of several 100 N. They are capable of dynamically compensating oscillations in the range of a few micrometers with nanometer resolution. The drives are designed for positioning and holding forces up to 800 N and work at velocities of about 1 mm/s.
Noise
For capacitive sensors. In extended measurement ranges, noise is considerably higher than in the nominal measurement range.
Nonlinearity
See >> Linearity Error.
Open-Loop Operation
The actuator or motor is used without a position sensor. Open-loop operation is ideal for applications where fast response and very high resolution with maximum bandwidth are essential. Here, commanding and reading the target position in absolute values is either not important or carried out by external position sensors.
The piezo actuator's displacement corresponds approximately to the drive voltage; With open-loop control, creep, nonlinearity, and hysteresis remain uncompensated.
Open-loop operation is not possible for electro-magnetic direct drives such as linear motors and voice coil drives.Operating Limits
Values measured at an ambient temperature of 20°C. A sine is used as control signal in open-loop operation. The amplifier works linearly within the operating limits, in particular without thermal limitation.
Operating Temperature Range
In any case, the device can be operated safely in the maximum permissible temperature range. To avoid internal overheating however, full performance is no longer available above a certain temperature (maximum operating temperature under full load). It may be be necessary to recalibrate or adjust the zero point if the operating temperature changes. Performance specifications in the datasheet apply only to room temperature.
P
Patents
Parallel Kinematics, Hexapods
Parallel-Kinematic Piezo Stages
Parallel Metrology
Peak Current
PICA / PICA Power
PICMA® Multilayer Piezo Actuators
PICMAWalk
Piezoelectric Inertia Drive
PiezoMove®
Piezoresistive Sensor (PRS)
PIglide Air Bearing Technology
PILine® Ultrasonic Piezomotors
PIMag® Magnetic Linear Motors
PIMag® Voice Coil
Pivot Point
PIRest
Pitch
Planetary Gears
Power Consumption
Preloaded Piezo Actuator
Profile Generator
Pulse Width Modulation (PWM)
Push/Pull Force Capacity (in Positioning Direction)
PZTParallel Kinematics, Hexapods
Hexapods are parallel-kinematic systems with six drives that are connected directly to a single platform. This makes it possible for users to position objects automatically in all degrees of freedom, X, Y, Z, and rotatory and, depending on the drive, with an accuracy in the micrometer range or lower. The parallel-kinematic system is very stiff, with only a low passive weight to move and, with the corresponding design, can carry loads up to several tons. Users are able to arbitrarily choose the reference coordinate system and, today, workers are now working together with hexapods on the production line. The user integrates the system into the automation environment via EtherCAT.
Parallel-Kinematic Piezo Stages
Piezo stages reach optimum trajectory accuracy with a parallel-kinematic setup that uses capacitive sensors for parallel measuring. All actuators act directly on one motion platform in a parallel-kinematics, multi-axis system. This means that all axes move the same minimized mass and can be designed with identical dynamic properties. Parallel-kinematic systems have additional advantages over serially stacked systems, including more compact construction and no cumulative errors from the individual axes. Multi-axis nanopositioning systems equipped with direct metrology are able to measure platform position in all degrees of freedom against one common reference. In such systems, undesirable motion from one actuator in the direction of another (crosstalk) is detected immediately and actively compensated by the servo loops. This active trajectory control concept can keep deviation from a trajectory to under a few nanometers, even in dynamic operation.
Parallel Metrology
Each sensor measures the position of the same motion platform in the respective degree of freedom. This keeps crosstalk of all axes inside the servo loop and allows it to be corrected automatically.
Peak Current
Available only for short periods of time, typically less than a few millisecond in the case of piezo amplifiers/controllers. It is used to estimate the possible dynamics with a certain capacitive load. Note: In this case, the piezo controller/ driver does not necessarily work linearly.
PICA / PICA Power
PICA piezo actuators are specifically designed for high duty cycle applications. PICA Power actuators are additionally optimized for high-temperature working conditions.
All materials used are specifically matched for robustness and lifetime. Endurance tests on PICA drives proved consistent performance, even after billions (1,000,000,000 ) of cycles. The combination of high displacement and low electrical capacitance provides for excellent dynamic behavior with reduced driving power requirements.PICMA® Multilayer Piezo Actuators
PICMA® actuators take advantage of the indirect piezoelectric effect and achieve high forces with relatively low voltages. They only need a small amount of installation space. At the same time, the PICMA® actuators are very dynamic and can reach a position with a hitherto unattained precision. This is the reason why they are used as micropump applications in metering technology. Due to their ceramic insulation, PICMA® actuators exhibit high reliability and climate resistance. PI also equips PICMA® actuators with individual connectors for customer applications.
PICMAWalk
PICMAWalk drives achieve feed forces up to 50 N and holding forces to 60 N. The maximum velocity is 15 mm/s. PICMAWalk uses the proven PICMA multilayer piezo actuators. That means lower piezo control voltages to 120 V. PICMA® piezo actuators also ensure a long lifetime and the outstanding reliability of the PICMAWalk technology.
Piezoelectric Inertia Drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a theoretically unlimited travel range. The drives acting directly on the runner achieve velocities of more than 5 mm/s with an operating frequency of max. 20 kHz. The Q-Motion drive runs silently at an operating frequency of 20 kHz. The drive is self-locking at rest, requires no current, and does not generate any heat. It holds the position with maximum force. It is therefore suitable for battery-powered, mobile applications with a low number of load cycles.
PiezoMove®
PiezoMove® actuators combine guided motion with long travel ranges up to 1 mm as well as an optional sensor which provides precision up to 10 nanometers. The high-precision, frictionless flexure guides achieve very high stiffness as well as extremely low lateral displacement.
This makes them easier to handle than a simple piezo actuator, but still keeps them extremely compact. The number and size of the piezo actuators used determine stiffness and force generation. Due to these features, their small dimensions and the inexpensive design, the PiezoMove® lever actuators are particularly suitable for OEM applications.
PiezoWalk® Walking Drive
PiezoWalk® drives take advantage of the piezo walking principle and combine subnanometer resolution with high forces, a robust design, and a scalable travel range. Industry customers use walking drives for travel ranges greater than 1 mm and to hold a stable position with nanometer precision resolution. PI (Physik Instrumente) offers walking drives with high feed forces as well as positioning and holding forces, but also relatively high velocities, and they also have a long lifetime in a vacuum.
See >> NEXLINE®, >> NEXACT®, and >> PICMAWalk.
PIglide Air Bearing Technology
The PIglide air bearing technology allows friction-free positioning with a high guiding accuracy up to 5 µrad over 100 mm. This technology improves the position resolution and makes it possible to realize constant-velocity scanning. The repeatability is only a few encoder impulses. A similar precision in the nanometer range is also possible with flexure-guided piezo nanopositioners, however, only over considerably shorter travel ranges.
PILine® Ultrasonic Piezomotors
PILine® Ultrasonic piezo motors are precise, dynamic, small, and noiseless, and are also self-locking. As a result, they don’t have to be supplied with current when at rest and that, in turn, reduces the energy requirements of the application. For this reason and due to their small size, the drives are very popular for mobile devices in the optical industry and measuring technology where they can replace classical drive technology.
PIMag® Magnetic Linear Motors
Magnetic direct drives from PI (Physik Instrumente) provide a direct and stiff connection between the load to be moved and the drive. The industry demand is particularly high when objects need to be positioned with high dynamics and precision. Thanks to the smooth-running precision linear guides with crossed roller bearings, these types of linear motor stages are particularly suitable for applications that require constant-velocity scanning. The drives operate without contact and therefore very reliable. Users can integrate the magnetic direct drives into existing machines and systems quickly and easily via standardized fieldbus systems.
PIMag® Voice Coil
Thanks to their low weight and friction-free drive principle, voice coil drives are small and particularly suitable for applications that require high dynamics and high velocities over limited travel ranges - for example, in medical technology. Voice coil drives have a greater advantage for the customer when compared to traditional drive screw-based solutions, particularly with respect to wear and dynamics. High scan frequencies and precision positioning are possible with these drives, because they are free of hysteresis effects.
See >> Voice Coil Drive.
PIMikroMove
User software with graphical user interface (GUI) for controlling positioning systems from PI, irrespective of their drive principle.
PIRest
Piezo actuator technology for active adjustment of consistently stable gaps of several micrometers with subnanometer precision. The PIRest actuator is only powered during the actual positioning sequence and holds its position without power.
Pitch
See >> Crosstalk.
Planetary Gears
Planetary gears consist of a central sun wheel connected to a shaft, and other planet wheels that are located within a ring wheel. They are suitable for transferring the highest torque because the load is distributed via several toothed wheels. In this manner, high gear ratios can be realized in very compact assembly spaces. Often, the input stage's toothed wheels are made of a synthetic material to reduce high speed noises. For applications in vacuum, high temperatures or for very high torques, the input stage is preferably made of steel. In addition to spur gears, planetary gears are generally used for the gear motors in PI's linear stages.
Preloaded Piezo Actuator
Piezoelectric stack actuators are protected by an internal preload. The preload ensures a safe operation in any kind of application scenario and is ideal for dynamic applications and for tensile loads as well. Preloaded piezo actuators are intended for integration into a customer’s system and have no guides. An external guide is required if motion crosstalk in individual axes cannot be tolerated.
Profile Generator
Functionality of motor controllers that allows motion profiles such as linear interpolation, point-to-point, trapezoid, and double bends. Several axes are referred to as an electronic gear function.
Pulse Width Modulation (PWM)
PWM-controlled motors allow control of the (motor) performance with a high-frequency-signal. This means that the power signal can be separated from the digital control signal.
PWM controllers are used for example, with high-performance switching amplifiers for piezo actuators, or for controlling electric motors such linear motors or voice coil drives. The >> ActiveDrive Motor is a special feature from PI, see there.Push/Pull Force Capacity (in Positioning Direction)
Specifies the maximum forces that can be applied to the piezo system along the active axis. Limited by the piezoelectric material and the flexure. If larger forces are applied, the piezo actuator, the flexures or the sensor could be damaged. Limiting the force must be considered in dynamic applications.
Example: the dynamic forces generated by sinusoidal operation at 500 Hz, 20 µm peak-to-peak, 1 kg moved mass, are approximately ±100 N.Recirculating Ball Bearing Guide
Due to their design, recirculating ball bearings are already insensitive to creeping. For example, they are suitable for high-precision axes, which are often used for scanning smaller areas. When assembled correctly, they offer a high load capacity and at the same time, longer lifetime, no maintenance, and guiding accuracy.
Reference Switch
A reference point is required in conjunction with an incremental position encoder to determine the absolute position. Function: Optical, magnetic.
Repeatability
Typical values in closed-loop operation mode (RMS, 1 σ). The repeatability is expressed as a percentage of the total travel range or bevel square. Repeatability may be significantly better for smaller distance travelled.
Resolution
Position resolution relates to the smallest change in displacement that can still be detected by the measuring devices. The resolution in piezo-based positioning systems and piezo actuators is basically unlimited because it is not affected by static or sliding friction. Instead, the equivalent to electronic noise is specified. Values are typical results (RMS, 1 σ).
Resonant Frequency
No load: First resonant frequency in positioning direction.
With load: Resonant frequency of the loaded system.
Resonant frequency does not specify the maximum operating frequency. PI recommends an operating frequency in open-loop of max. one third of the resonant frequency. Customized systems may differ from that. Please contact PI for more details.Rise Time
Time constant of the controller/amplifier: That time required for increasing the maximum voltage range from 10% to 90%.
Ripple, Noise, 0 to 100 kHz
Residual ripple of voltage in mVpp with unique frequency. Noise over the entire frequency range.
Roll
See >> Crosstalk.
Rotational Crosstalk
See >> Crosstalk.
Rotary Encoder
Rotary encoders measure the position indirectly because for example, they are mounted directly on the motor shaft. That means that they are attached to a rotating part of the drivetrain. Easy installation of the sensors is an advantage but backlash and mechanical play affect the resulting measurement.
Scan Routine
Algorithm that runs a motion sequence and allows the associated data to be evaluated; e.g., search for an optimum analog input signal. Examples include "area scan" and "gradient search".
Sensor Bandwidth
Measured value that specifies the frequency used to decrease the amplitude decreased by -3 dB.
Sensor Linearization
For capacitive sensors, the signal conditioning electronics demonstrates a notably low noise level. The integrated linearization system (ILS) compensates for the influences of parallelism errors between the capacitor plates.
Sensor Resolution
The smallest calculable increment that can be detected by the measuring system used. Rotary encoder: Number of counts per screw rotation. Linear encoder: Smallest increment still detected by the sensor system. The sensor can be the critical element of position resolution so it may be necessary to specify the sensor resolution separately.
See >> Design Resolution.
Serial Kinematics
Stacked or nested setup of a multi-axis motion system. Each actuator acts on its own platform. Actuator and motion axis are uniquely assigned to each other. Assembly and control of several axes are therefore relatively easy. The dynamic characteristics depend on the individual axis. Any guiding errors cumulate and the overall guiding accuracy is poorer when compared to >> Parallel Kinematics, see there.
Serial Metrology
A position sensor is assigned to each servo-controlled motion axis. Undesired crosstalk or guiding errors unnoticed and uncorrected.
Servo Motor
A motor with position detection and control is called a servo motor. The motor itself is often a DC motor. Servo motors offer high torques at a low speed, good dynamics over a large speed range, fast response, low heat generation as well as smooth and vibration-free operation. Either rotary or absolute encoders are used for detecting the position. A servo amplifier takes care of amplifying the signal and controlling the motor parameters. This is normally a PID (Proportional, Integral, Derivative) controller with additional filters in order to exploit the above-mentioned characteristics as best as possible.
SpaceFAB Design
SpaceFABs are partly parallel-kinematic setups which constant strut lengths and a particularly low profile. Each XY arrangement of linear stages in the SpaceFAB drives three individual struts. The mechanical layout allows an asymmetrical setup, e.g., longer travel ranges in the desired direction of motion.
Specifications
The performance specifications are checked before dispatch. Not all specifications can be combined. The performance specifications apply to room temperature (22 ±3 °C) and systems in closed-loop operation are calibrated at this temperature (specifications for different operating temperatures on request). It may be necessary to reset the operating parameters when operating at considerably lower or higher temperatures. Custom designs for ultralow or ultrahigh temperatures on request.
Spur Gears
Spur gears consist of two parallel but different-sized toothed wheels. Due to the simple design, spur gears can be manufactured very easily and robustly. Thanks to their simple structure, spur gears are easy to manufacture and robust. All-metal models fulfill high requirements with respect to an even and smooth run and particularly play-free models can be realized for applications where high precision at low torque is needed. To achieve this, the preload is set by inverse twisting of the gear trains and their tension on the motor pinion. In addition to planetary gears, spur gears are the normally the standard choice gear motors in linear stages from PI.
Stepper Motor, 2-Phase Stepper Motor (2SM)
Stepper motors only take discrete positions within one revolution. Due to their quantized steps, stepper motors only offer reduced momentum compared to DC motors. High speeds can only be achieved with a large number of steps at the expense of the torque, because the windings need to be energized against one another in order to set the intermediate steps.
Stepper motors can be set up for applications in a vacuum, have a long lifetime, and can be applied for positioning tasks without the requirement of an encoder. Open-loop operation of stepper motors does not cause position jitter because it is caused by the feedback loop in closed-loop operation. Often, a mechanical damper is applied in the form of a handwheel to enhance smooth running and to suppress resonances.
Stepper motors are available in different configurations.
Stiffness
Spring constant, nonlinear for piezoelectric materials. The positioner's static large signal stiffness is specified for the positioning direction at room temperature in the datasheets. Small signal stiffness and dynamic stiffness may differ for example, because of effects caused by the active nature of piezoelectric material or compound effects.
Straightness
See >> Crosstalk.
Strain Gauge Sensor (SGS)
Strain gauge sensors consist of a thin metal wire packaged on a foil (SGS), or a semiconductor foil (PRS), which is attached to the piezo actuator or to the guiding system (lever, flexure) of a flexure positioner. This type of position measurement is done with contact and indirectly, since the position of the motion platform is derived from a measurement on the lever, guide or piezo stack. Strain gauge sensors derive the position information from their expansion and the resulting change in resistance. Full-bridge circuits with several strain gauge sensors per axis improve thermal stability.
Switching Amplifier / Driver
See >> Energy Recovery.
Synchronous Servo Motor (SSVM)
A servo motor that is designed as a synchronous machine. This type of motor for example, can be realized from a brushless DC servo motor with sine commutation (see brushless >> DC Motor and >> Servo Motor).
Threaded Roller Drive Screw
In the case of threaded roller drive screws, the contact surface between the drive screw, roller, and nut is considerably larger than with ball screw drives. This results in a very high stiffness and higher loads are possible. There are various versions, for example, guided planetary rollers without roller recirculation or rotating rollers, i.e., with roller recirculation, which allow even smaller pitches.
Tip/Tilt Mirrors
Tip/tilt mirrors, fast steering mirrors, and tip/tilt platforms are used for example, for active optics and for laser beam deflection in laser processing and laser beam steering. These special piezo stages mostly provide two orthogonal tip/tilt axes with a common center of rotation. Their parallel-kinematic design creates identical performance in both tip/tilt axes, with a common fixed center of rotation and no change of polarization direction. The bandwidth, resonant frequencies, and acceleration are often higher than with voice coil or galvanometer scanners. Tilting mirrors are wear free due to the flexure guidings used in the design.
Torque Motor
Torque motors are zero-play drives with often large radial dimensions. They can have a very flat design. The large radial dimensions allow for hollow shafts and large apertures, respectively, e.g., to conduct laser beams and cables. The zero-play allows high positioning accuracy and high drive rigidity, resulting in high repeatability. The high drive torque enables high acceleration and therefore high dynamics. Additional features include high torsional rigidity, high peak torques, high degrees of efficiency, as well as very smooth running.
Among others, torque motors are suitable for high load applications on multi-axis or rotation stages thanks to their compact design with respect to torque and rotational symmetry.Trajectory Control
Precautions for avoiding deviations from the specified trajectory; Can be passive (e.g., flexure guide) or active (e.g., using additional active axes and sensors).
Trajectory Generator
A profile generator for multi-axis systems with known kinematics and interpolation. Hexapod controllers support linear interpolation, point-to-point, trapezoid and S curves.
See >> Profile Generator.
Useful Piezo Load
For switching amplifiers. The possible output power of a piezo controller/driver depends on internal and external capacitive loads.
User Software and Functions
PI provides an extensive software package with all controllers including user software and programming support such as: PIMikroMove, PI General Command Set (GCS). Drivers for NI LabVIEW, shared libraries for Windows and Linux. Compatible with µManager, MetaMorph, MATLAB, among others. Wave generator. Linearization. Data recorder. Autozero. Trigger I/O. Software-configurable parameters.
Vacuum-Compatible Versions
In a large number of industry sectors, production in a vacuum is becoming increasingly more important. Therefore, PI (Physik Instrumente) offers various different drive technologies to its customers that can be operated in a vacuum of 10–7 or even 10–10 hPa. This includes piezo actuators that work in strong magnetic fields and in a cryogenic environment, piezo systems with travel ranges lower than 1.5 mm and subnanometer precision, piezo motors in a variety of designs with respect to force, dynamics, and travel range, as well as classical motorization with specially designed DC or stepper motors that allow greater travel ranges.
Voice Coil Drives
These friction-free electromagnetic linear drives are characterized by their good dynamics, albeit with relatively low holding force.
Voice coil motors are direct drives. The drive principle is the technical implementation of the Lorentz force: The force that a live conductor exerts in a permanent magnetic field is proportional to the magnetic field strength and the current. The motion controller controls the force via PWM control. The drive is combined with a measuring system for precision positioning and operated in a closed loop. The travel ranges of voice coil drives are therefore limited by the technology and are between 0.5 mm and 25 mm.
Typical applications include short-range motion with fast settling times, applications with low noise generation, or sensitive programmable force controls.Wave Generator
Each axis can be controlled by a wave generator that outputs waveforms. The wave generator is particularly suited to dynamic applications where the axis works in a freely defined custom motion profiles.
Workspace
The entirety of all combinations of translations and rotations that the hexapod can reach from the current position from the current position is referred to as the "workspace".
Worm Gears
Worm gears consist of a shaft with helical mount and a worm wheel. The force is transferred by sliding friction at a right angle. For this reason, the worm shaft has high self-locking forces making additional brakes in some applications unnecessary. Sliding friction however, causes a low degree of efficiency, high wear, and potentially high temperatures. Typically, worm gears can achieve high gear ratios at one translation level, which makes them comparatively inexpensive. PI often uses worm gears for rotation stages because they transmit motion at a right angle. This allows lateral alignment of the motor on the rotation stage.
Yaw
See >> Crosstalk.
- Applications