P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

Active axes

Z

Z, θ_X, θ_Y

Z

Z, θ_X, θ_Y

Z

Z, θ_X, θ_Y

Motion and positioning

Integrated sensor

Capacitive

Capacitive

SGS

SGS

–

–

Travel range in Z at -20 to 120 V, open loop

150

150

150

150

150

150

µm

+20 % / -0 %

Tip/tilt angle in θ_X, θ_Y at -20 to 120 V, open loop

–

±0.6

–

±0.6

–

±0.6

mrad

+20 % / -0 %

Travel range in Z, closed loop

100

100

100

100

–

–

µm

Tip/tilt angle in θ_X, θ_Y, closed loop

–

±0.4

-

±0.4

–

–

mrad

Resolution Z, open loop

0.2

0.2

0.2

0.2

0.2

0.2

nm

typ.

Resolution in θ_X, θ_Y, open loop

–

0.02

–

0.02

–

0.02

µrad

typ.

Resolution in Z, closed loop

0.5

0.5

2.5

2.5

–

–

nm

typ.

Closed-loop resolution in θ_X, θ_Y

–

0.08

–

0.25

–

–

µrad

typ.

Linearity error Z, θ_X, θ_Y

0.03

0.03

0.2

0.2

–

–

%

typ.

Repeatability Z

<2

<2

<10

<10

–

–

nm

typ.

Repeatability θ_X, θ_Y

–

0.01

–

0.05

–

–

µrad

typ.

Tilt θ_X, θ_Y (motion in Z)

±15

±15

±15

±15

±15

±15

µrad

typ.

Mechanical properties

Stiffness Z

0.8

0.8

0.8

0.8

0.8

0.8

N/µm

±20 %

Resonant frequency Z, no load

410

410

410

410

410

410

Hz

±20 %

Resonant frequency θ_X, θ_Y, no load

–

330

–

330

–

330

Hz

±20 %

Resonant frequency Z, 200 g

250

250

250

250

250

250

Hz

±20 %

Resonant frequency @ 200 g, θ_X, θ_Y

–

270

–

270

–

270

Hz

±20 %

Push/pull force capacity

50 / 20

50 / 20

50 / 20

50 / 20

50 / 20

50 / 20

N

max.

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

6.3

6.3

6.3

6.3

6.3

6.3

µF

±20 %

Miscellaneous

Operating temperature range

20 to 80

20 to 80

20 to 80

20 to 80

20 to 80

20 to 80

°C

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Mass

750

750

730

730

700

700

g

±5 %

Cable length

1.5

1.5

1.5

1.5

1.5

1.5

m

±10 mm

Sensor connection

Sub-D 7W2 (m)

Sub-D 25W3 (m)

LEMO

3 × LEMO

–

–

Voltage connection

Sub-D 7W2 (m)

Sub-D 25W3 (m)

LEMO

3 × LEMO

LEMO

3 × LEMO

Recommended electronics

E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754

E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754

E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754

E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754

E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754

E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754