P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages
Low Profile, Large Aperture
- Low profile for easy integration: 16.5 mm
- Clear aperture 80 mm × 80 mm
- Travel range to 150 µm
- Tip/tilt angle to 1.2 mrad
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
- Outstanding lifetime due to PICMA® piezo actuators
- Combination with microscope stages possible for long travel ranges
Application fields
- Scanning microscopy
- Super-resolution microscopy
- Biotechnology
- Mask/wafer positioning
- Sample positioning
- Interferometry
- Metrology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Specifications
Specifications
P-541.ZCD | P-541.TCD* | P-541.ZSL | P-541.TSL* | P-541.Z0L | P-541.T0L* | Unit | Tolerance | |
---|---|---|---|---|---|---|---|---|
Active axes | Z | Z, θX, θY | Z | Z, θX, θY | Z | Z, θX, θY | ||
Motion and positioning | ||||||||
Integrated sensor | Capacitive | Capacitive | SGS | SGS | – | – | ||
Travel range in Z at -20 to 120 V, open loop | 150 | 150 | 150 | 150 | 150 | 150 | µm | +20 % / -0 % |
Tip/tilt angle in θX, θY at -20 to 120 V, open loop | – | ±0.6 | – | ±0.6 | – | ±0.6 | mrad | +20 % / -0 % |
Travel range in Z, closed loop | 100 | 100 | 100 | 100 | – | – | µm | |
Tip/tilt angle in θX, θY, closed loop | – | ±0.4 | - | ±0.4 | – | – | mrad | |
Resolution Z, open loop | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 | nm | typ. |
Resolution in θX, θY, open loop | – | 0.02 | – | 0.02 | – | 0.02 | µrad | typ. |
Resolution in Z, closed loop | 0.5 | 0.5 | 2.5 | 2.5 | – | – | nm | typ. |
Closed-loop resolution in θX, θY | – | 0.08 | – | 0.25 | – | – | µrad | typ. |
Linearity error Z, θX, θY | 0.03 | 0.03 | 0.2 | 0.2 | – | – | % | typ. |
Repeatability Z | <2 | <2 | <10 | <10 | – | – | nm | typ. |
Repeatability θX, θY | – | 0.01 | – | 0.05 | – | – | µrad | typ. |
Tilt θX, θY (motion in Z) | ±15 | ±15 | ±15 | ±15 | ±15 | ±15 | µrad | typ. |
Mechanical properties | ||||||||
Stiffness Z | 0.8 | 0.8 | 0.8 | 0.8 | 0.8 | 0.8 | N/µm | ±20 % |
Resonant frequency Z, no load | 410 | 410 | 410 | 410 | 410 | 410 | Hz | ±20 % |
Resonant frequency θX, θY, no load | – | 330 | – | 330 | – | 330 | Hz | ±20 % |
Resonant frequency Z, 200 g | 250 | 250 | 250 | 250 | 250 | 250 | Hz | ±20 % |
Resonant frequency θX, θY,200 g | – | 270 | – | 270 | – | 270 | Hz | ±20 % |
Push/pull force capacity | 50 / 20 | 50 / 20 | 50 / 20 | 50 / 20 | 50 / 20 | 50 / 20 | N | max. |
Drive properties | ||||||||
Ceramic type | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | PICMA® P-885 | ||
Electrical capacitance | 6.3 | 6.3 | 6.3 | 6.3 | 6.3 | 6.3 | µF | ±20 % |
Miscellaneous | ||||||||
Operating temperature range | 20 to 80 | 20 to 80 | 20 to 80 | 20 to 80 | 20 to 80 | 20 to 80 | °C | |
Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum | ||
Mass | 750 | 750 | 730 | 730 | 700 | 700 | g | ±5 % |
Cable length | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 | m | ±10 mm |
Sensor connection | D-sub 7W2 (m) | D-sub 25W3 (m) | LEMO | 3 × LEMO | – | – | ||
Voltage connection | D-sub 7W2 (m) | D-sub 25W3 (m) | LEMO | 3 × LEMO | LEMO | 3 × LEMO | ||
Recommended electronics | E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754 | E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754 | E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754 | E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754 | E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754 | E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754 |
Downloads
Datasheet
Documentation
User Manual PZ244
P-541/P-542 Nanopositioners
3-D Models
P-541.Z 3-D model
Brochure
Microscope Stage Configurator
Sample Stages and Holders for Inverted Microscopes
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Technology

PICMA® Technology
Highly reliable and extended lifetime through the patented manufacturing process for multilayer actuators.

Flexure Guiding Systems
Flexure guides from PI have proven their worth in nanopositioning. They guide the piezo actuator and ensure a straight motion without tilting or lateral offset.

Digital Motion Controllers
Digital technology opens up possibilities for improving performance in control engineering which do not exist with conventional analog technology.

Capacitive Sensors
Capacitive sensors are the metrology system of choice for the most demanding nanopositioning applications.

Parallel Kinematics
In a parallel-kinematic, multi-axis system, all actuators act directly on a single moving platform.