P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

Low Profile, Large Aperture

P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

Product Description Specifications Downloads Quote / Order

Low profile for easy integration: 16.5 mm
Clear aperture 80 mm × 80 mm
Travel range to 150 µm
Tip/tilt angle to 1.2 mrad
Parallel kinematics for faster response times and higher multi-axis accuracy
Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
Outstanding lifetime due to PICMA® piezo actuators
Combination with microscope stages possible for long travel ranges

Scanning microscopy
Super-resolution microscopy
Biotechnology
Mask/wafer positioning
Sample positioning
Interferometry
Metrology

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

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Datasheet

Datasheet P-541.Z - P-541.T

Version / Date

2018-05-08

Version / Date

2018-05-08

Version / Date

2018-06-06

Version / Date

2018-07-10

Document language

pdf - 600 KB

pdf - 607 KB

pdf - 701 KB

pdf - 784 KB

	P-541.ZCD	P-541.TCD*	P-541.ZSL	P-541.TSL*	P-541.Z0L	P-541.T0L*	Unit	Tolerance
Active axes	Z	Z, θ_X, θ_Y	Z	Z, θ_X, θ_Y	Z	Z, θ_X, θ_Y
Motion and positioning
Integrated sensor	Capacitive	Capacitive	SGS	SGS	–	–
Travel range in Z at -20 to 120 V, open loop	150	150	150	150	150	150	µm	+20 % / -0 %
Tip/tilt angle in θ_X, θ_Y at -20 to 120 V, open loop	–	±0.6	–	±0.6	–	±0.6	mrad	+20 % / -0 %
Travel range in Z, closed loop	100	100	100	100	–	–	µm
Tip/tilt angle in θ_X, θ_Y, closed loop	–	±0.4	-	±0.4	–	–	mrad
Resolution Z, open loop	0.2	0.2	0.2	0.2	0.2	0.2	nm	typ.
Resolution in θ_X, θ_Y, open loop	–	0.02	–	0.02	–	0.02	µrad	typ.
Resolution in Z, closed loop	0.5	0.5	2.5	2.5	–	–	nm	typ.
Closed-loop resolution in θ_X, θ_Y	–	0.08	–	0.25	–	–	µrad	typ.
Linearity error Z, θ_X, θ_Y	0.03	0.03	0.2	0.2	–	–	%	typ.
Repeatability Z	<2	<2	<10	<10	–	–	nm	typ.
Repeatability θ_X, θ_Y	–	0.01	–	0.05	–	–	µrad	typ.
Tilt θ_X, θ_Y (motion in Z)	±15	±15	±15	±15	±15	±15	µrad	typ.
Mechanical properties
Stiffness Z	0.8	0.8	0.8	0.8	0.8	0.8	N/µm	±20 %
Resonant frequency Z, no load	410	410	410	410	410	410	Hz	±20 %
Resonant frequency θ_X, θ_Y, no load	–	330	–	330	–	330	Hz	±20 %
Resonant frequency Z, 200 g	250	250	250	250	250	250	Hz	±20 %
Resonant frequency @ 200 g, θ_X, θ_Y	–	270	–	270	–	270	Hz	±20 %
Push/pull force capacity	50 / 20	50 / 20	50 / 20	50 / 20	50 / 20	50 / 20	N	max.
Drive properties
Ceramic type	PICMA® P-885	PICMA® P-885	PICMA® P-885	PICMA® P-885	PICMA® P-885	PICMA® P-885
Electrical capacitance	6.3	6.3	6.3	6.3	6.3	6.3	µF	±20 %
Miscellaneous
Operating temperature range	20 to 80	20 to 80	20 to 80	20 to 80	20 to 80	20 to 80	°C
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Mass	750	750	730	730	700	700	g	±5 %
Cable length	1.5	1.5	1.5	1.5	1.5	1.5	m	±10 mm
Sensor connection	Sub-D 7W2 (m)	Sub-D 25W3 (m)	LEMO	3 × LEMO	–	–
Voltage connection	Sub-D 7W2 (m)	Sub-D 25W3 (m)	LEMO	3 × LEMO	LEMO	3 × LEMO
Recommended electronics	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754	E-503, E-505, E-610, E-621, E-625, E-712, E-727, E-754

* Parallel kinematics design; the maximum displacement for translation motion and tip/tilt motion cannot be achieved simultaneously.

The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.

All specifications based on room temperature (22 °C ±3 °C).

Download datasheet Go to download

Datasheet

Datasheet P-541.Z - P-541.T

Version / Date

2018-05-08

Version / Date

2018-05-08

Version / Date

2018-06-06

Version / Date

2018-07-10

Document language

pdf - 600 KB

pdf - 607 KB

pdf - 701 KB

pdf - 784 KB

Documentation

Technical Note P541T0001

Operating Instructions for the P-541.T0L Open-Loop Stage

Version / Date

2012-03-08

Document language English

Download

pdf - 123 KB

Documentation

Short Instructions PZ240EK

P-5xx / P-6xx / P-7xx Piezo Positioning Systems

Version / Date

5.0.0 09/2018

Document language English

Download

pdf - 908 KB

3-D Models

P-541.Z 3-D model

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